张连生｜合肥工业大学｜学者主页

2026

光纤耦合系统中角位移台耦合误差建模与修正

程梦婷，李洁，靳雨菡，程真英，李瑞君，张连生

《光学精密工程》

2026

电容式三维纳米测量测头

黄强先，张星月，郝蔚宁，赵志浩，张连生，程荣俊，李红莉

《光学精密工程》

2026

面向半导体制造产业需求的集成电路测试课程改革探索与创新实践

黄亮，潘成亮，张连生，魏永清，张进，夏豪杰，侯毅

《高教学刊》

DOI

2025

弱耦合谐振式超高灵敏度微力传感器

Wang Xukang, HUANG Qiangxian, GUO Tianwu, CHENG Rongjun, LI Hongli, ZHANG Liansheng

Optics and Precision Engineering

DOI

2025

光学非球面面形检测与误差建模补偿

王广谱，黄强先，刘慧洁，程荣俊，张祖杨，李红莉，张连生

《计量学报》

2025

二维运动台系统辨识与精密驱动控制

黄强先，秦贤智，张星月，程荣俊，张连生，李红莉，王超群

《电子测量与仪器学报》

DOI

2025

跨尺度微纳米三坐标测量机研制及误差分析

黄强先，刘慧洁，张祖杨，李红莉，程荣俊，张连生，李瑞君

《光学精密工程》

2025

Correlation steered scanning with spiral scanning path for AFM to correct image distortion with real‐time compensation

Liansheng Zhang, Liang Yu, Wenbo Xia, Rongjun Cheng, Hongli Li, Qiangxian Huang

Journal of Microscopy

DOI

2025

Design and verification of a 2D-nanopositioner for high-speed scanning probe microscopy

Xin Liu, Yongjun Wang, Ying-Jun Lei, Zhenying Cheng, Shaohua Ma, Tienfu Lu, Liansheng Zhang, Ruijun Li

Measurement

DOI

2025

Design method and error analysis of 3D measurement system in accordance with the Abbe principle

Zuyang Zhang, Qiangxian Huang, Guangpu Wang, Hongli Li, Liansheng Zhang, Rongjun Cheng, Ruijun Li, Qiaosheng Pan

Measurement

DOI

2025

A novel minimum zone method for cylindricity error evaluation based on rotation projection method and adaptive particle swarm optimisation

Rongjun Cheng, Hebang Jian, Li Chen Yu, Qiangxian Huang, Liansheng Zhang, Hongli Li

Precision Engineering

DOI

2025

On-machine separation and compensation of target mirror’s surface shape errors in multidimensional interferometric measurement system

Zuyang Zhang, Qiangxian Huang, Junwei Lu, Hongli Li, Rongjun Cheng, Liansheng Zhang

Review of Scientific Instruments

DOI

2025

Design and Driving Control of Cross-Scale Micro-Nano Coordinate Measuring Machine

Zuyang Zhang, Qiangxian Huang, Huijie Liu, Hongli Li, Rongjun Cheng, Liansheng Zhang, Ruijun Li

IEEE Transactions on Instrumentation and Measurement

DOI

2025

Microstructure Edge Measurement With Nanometer Lateral Resolution Based on Astigmatism

Jian Xu, Qiangxian Huang, Zhiqin Wang, Rongjun Cheng, Liansheng Zhang, Hongli Li, Chaoqun Wang, Ruijun Li

IEEE Transactions on Instrumentation and Measurement

DOI

2025

Ultraprecision Spatial Error Compensation for Micro–Nano Coordinate Measuring Machine Following the Abbe Principle

Zuyang Zhang, Qiangxian Huang, Tianjian Guo, Rongjun Cheng, Hongli Li, Liansheng Zhang, Chaoqun Wang

IEEE Transactions on Instrumentation and Measurement

DOI

2024

一种新的大行程垂直纳米运动工作台设计与控制研究

张帆，黄强先，程荣俊，张连生，李红莉，李瑞君

《计量学报》

2024

集成电路测试新工科人才产教融合培养模式探索与实践

潘成亮，夏豪杰，黄亮，魏永清，张连生，侯毅

《高教学刊》

2024

Anchor loss in weakly coupled resonator systems of mode-localized sensor based on perfectly matched layer method

Rongjun Cheng, Wenlong Zhang, Yi Yuan, Qiangxian Huang, Liansheng Zhang, Hongli Li

Microsystem Technologies

DOI

2024

Parameter estimation method of multidimensional measurement model with small sample based on MCM

Zhihao Zhao, Zhiwen Chen, Zuyang Zhang, Qiangxian Huang, Hongli Li, Rongjun Cheng, Liansheng Zhang

Seventh International Symposium on Precision Mechanical Measurements

DOI

2024

Design and experiment of multidimensional and subnanometer stage driven by spatially distributed piezoelectric ceramics

Fan Zhang, Qiangxian Huang, Chibin Zhang, Baolin Cheng, Rongjun Cheng, Liansheng Zhang, Hongli Li

Review of Scientific Instruments

DOI

2024

Research on a Single-Vibrator Multimodal Inertial Impact Piezoelectric Motor With Self-Clamping Backsliding Suppression

Liangguo He, Xukang Yue, Zengxiang Shan, Chengliang Pan, Liansheng Zhang, Feiyun Xiao

IEEE Transactions on Industrial Electronics

DOI

2024

Nano Precision Noncontact Probing System Using Tungsten Ball Tip for High Aspect Ratio Structures With Horizontal Internal Dimensions Below 100 μm

Peng Xia Xu, Ruijun Li, Yi Shen, Rong-Wei Lin, Yao Pan, Zhenying Cheng, Liansheng Zhang, Qiangxian Huang, Fang Cheng

IEEE Transactions on Instrumentation and Measurement

DOI

2024

Three-Dimensional Nano Measurement System Based on Resonant Trigger Probe

Qiangxian Huang, Jian Xu, Xianzhi Qin, Liansheng Zhang, Rongjun Cheng, Hongli Li, Chaoqun Wang, Ruijun Li

IEEE Transactions on Instrumentation and Measurement

DOI

2023

亚纳米驱动分辨力的六自由度微动台

黄强先，程保林，张弛斌，张帆，张连生

《光学精密工程》

2023

基于电荷泵的压电致动器迟滞非线性改善研究

张连生，张鹏程，郝爽，黄强先，程荣俊，李红莉

《计量学报》

2023

Development of a Driving and Control System of Large Stroke 3-D Air-Floating Motion Stage With Submicrometer-Scale Positioning Accuracy

Fan Zhang, Qiangxian Huang, Rongjun Cheng, Liansheng Zhang, Hongli Li, Ruijun Li, Qiaosheng Pan

IEEE Sensors Journal

DOI

2023

Non-contact optical probe with nanometer resolution and large measurement range based on the astigmatism method

Jian Xu, Qiangxian Huang, Zhihao Zhao, Xinlei Chen, Liansheng Zhang, Rongjun Cheng, Qiaosheng Pan, Ruijun Li

Measurement

DOI

2023

Dual-Amplifier Driving in Sequence Method with Switches for Piezoelectric Stack Actuators to Reduce Hysteresis

Liansheng Zhang, Shuang Hao, Pengcheng Zhang, Qiangxian Huang, Rongjun Cheng, Ruijun Li, Ping Wang

International Journal of Precision Engineering and Manufacturing

DOI

2023

High Precision and Low Force Resonant Probe Based on Quartz Tuning Fork

Qiangxian Huang, Wenqian Wang, Guangpu Wang, Rongjun Cheng, Liansheng Zhang, Hongli Li, Ruijun Li

International Journal of Precision Engineering and Manufacturing

DOI

2023

Development of submicron precision three-dimensional low cross-interference air-floating motion stage

Fan Zhang, Qiangxian Huang, Yunsheng Ye, Baolin Cheng, Zuyang Zhang, Rongjun Cheng, Liansheng Zhang, Hongli Li

Review of Scientific Instruments

DOI

2023

Development of a High-Precision and Low Cross-Axis Sensitivity 3-D Accelerometer for Low-Frequency Vibration Measurement

Ying-Jun Lei, Liansheng Zhang, Xia Wen-bo, Qiaosheng Pan, Penghao Hu, Qiangxian Huang, Ruijun Li

IEEE Sensors Journal

DOI

2023

Two-Dimensional Low-Frequency Optical Accelerometer With High Accuracy and Low Cross-Axis Sensitivity

Ying-Jun Lei, Liansheng Zhang, Qiaosheng Pan, Penghao Hu, Qiangxian Huang, Ruijun Li

IEEE Transactions on Instrumentation and Measurement

DOI

2022

微纳测量机靶镜正交偏差角测量不确定度评定

黄强先，张祖杨，郭小倩，陈志文，李红莉，程荣俊，张连生

《电子测量与仪器学报》

2022

Hysteresis Segmentation Modeling and Experiment of Piezoelectric Ceramic Actuator

Fan Zhang, Chibin Zhang, Liansheng Zhang, Rongjun Cheng, Ruijun Li, Qiaosheng Pan, Qiangxian Huang

IEEE Sensors Journal

DOI

2022

Thermoelastic damping suppression method of micro-beam resonators with basically constant resonant frequency

Rongjun Cheng, Pengcheng Song, Jiaxing Chen, Qiangxian Huang, Liansheng Zhang

Journal of Thermal Stresses

DOI

2022

Molecular dynamics analysis of friction-triggering process with spherical probe

Rongjun Cheng, Jiaxing Chen, Hebang Jian, Qiangxian Huang, Liansheng Zhang, Hongli Li

Surface Topography Metrology and Properties

DOI

2022

Large-scale and high-depth three dimensional scanning measurement system and algorithm optimization

Fan Zhang, ZhenYang Li, Liansheng Zhang, Rongjun Cheng, Qiangxian Huang, Ruijun Li, Chaoqun Wang

Review of Scientific Instruments

DOI

2022

Optical Accelerometers for Detecting Low-Frequency Micro-Vibrations

Ying-Jun Lei, Ruijun Li, Liansheng Zhang, Penghao Hu, Qiangxian Huang

Applied Sciences

DOI

2022

Development of a High-Resolution Touch Trigger Probe Based on an Optical Lever for Measuring Micro Components

Xiaoyu Feng, Peng Xia Xu, Ruijun Li, Ying-Jun Lei, Liansheng Zhang, Biao Wang, Qiangxian Huang

IEEE Sensors Journal

DOI

2021

A path planning method for real time correction of image distortion in atomic force microscope

Liansheng Zhang, Junjie Yan, Ying-Jun Lei, Ruijun Li, Qiangxian Huang

Seventh International Symposium on Precision Mechanical Measurements

DOI

2021

Design of a high-precision two-dimensional coplanar micro-vibration generator

Liansheng Zhang, Ke-wei Bian, Ying-Jun Lei, Ruijun Li, Kuang–Chao Fan

Seventh International Symposium on Precision Mechanical Measurements

DOI

2021

Measurement Range Enhancement of a Scanning Probe by the Real Time Adjustment of the Interferometer Reference Mirror

Liansheng Zhang, You Xi Tang, He Luan, Ruijun Li, Qiangxian Huang, Kuang–Chao Fan

IEEE Sensors Journal

DOI

2021

Development of a high-precision two-dimensional coplanar micro-vibration generator

Ying-Jun Lei, Ruijun Li, Wen-Shu Jiang, Liansheng Zhang, Penghao Hu, Qiangxian Huang, Kuang–Chao Fan

Measurement Science and Technology

DOI

2021

Modeling and improvement of a low-frequency micro-accelerometer

Zhenying Cheng, Liying Liu, Ying-Jun Lei, Hongli Li, Liansheng Zhang, Ruijun Li, Qiangxian Huang

Review of Scientific Instruments

DOI

2021

Analog Electronic Method for Solving Nonlinear Errors of Sinusoidal Waves in Interferometry

Wenkai Zhao, Ruijun Li, Xin Li, Ya-Xiong He, Zhenying Cheng, Liansheng Zhang, Qiaosheng Pan, Qiangxian Huang, Kuang–Chao Fan

IEEE Transactions on Instrumentation and Measurement

DOI

2021

Correction to “Analog Electronic Method for Solving Nonlinear Errors of Sinusoidal Waves in Interferometry” [2021 Art. no. 6504710]

Wenkai Zhao, Ruijun Li, Xin Li, Ya-Xiong He, Zhenying Cheng, Liansheng Zhang, Qiaosheng Pan, Qiangxian Huang, Kuang–Chao Fan

IEEE Transactions on Instrumentation and Measurement

DOI

2020

A high-precision two-dimensional micro-accelerometer for low-frequency and micro-vibrations

Ying-Jun Lei, Ruijun Li, Ruo-Xuan Chen, Liansheng Zhang, Penghao Hu, Qiangxian Huang, Kuang–Chao Fan

Precision Engineering

DOI

2020

Compensation Method for Polarization Mixing in the Homodyne Interferometer

Chaoqun Wang, Qiangxian Huang, Xuemeng Ding, Rongjun Cheng, Liansheng Zhang, Ruijun Li, Hongli Li

Applied Sciences

DOI

2020

Uncertainty evaluation for dynamic identification of a micro contact probe based on the signal transmission chain analysis method

Zhenying Cheng, Wen-Shu Jiang, Ying-Jun Lei, Ruijun Li, Liansheng Zhang, Qiangxian Huang, Kuang–Chao Fan

Measurement Science and Technology

DOI

2020

A simple asymptotic search method for estimation of minimum zone sphericity error

Jian Mei, Qiangxian Huang, Jianguo Chen, Rongjun Cheng, Liansheng Zhang, Chuanzhi Fang, Chaoqun Wang, Zhenying Cheng

AIP Advances

DOI

2019

Thermoelastic damping suppression method for MEMS resonant beam by introducing vertical slots

Rongjun Cheng, Yuhai Qi, Pengcheng Song, Qiangxian Huang, Liansheng Zhang

Seventh International Symposium on Precision Mechanical Measurements

DOI

2019

A simple method for minimum zone sphericity evaluation

Jian Mei, Qiangxian Huang, Longlong Yue, Rongjun Cheng, Liansheng Zhang, Chuanzhi Fang, Chaoqun Wang, Hongli Li

Seventh International Symposium on Precision Mechanical Measurements

DOI

2019

Independent driving method for significant hysteresis reduction of piezoelectric stack actuators

Liansheng Zhang, Jichao Huang, You Xi Tang, Ruijun Li, Qiangxian Huang, Rongjun Cheng, Chaoqun Wang

Review of Scientific Instruments

DOI

2019

Measurement and uncertainty evaluation of the microsphere used for micro-CMM probe

Chuanzhi Fang, Qiangxian Huang, Xuemeng Ding, Rongjun Cheng, Liansheng Zhang, Chaoqun Wang, Jian Mei, Hongli Li

Measurement Science and Technology

DOI

2019

A Measurement Method of Microsphere with Dual Scanning Probes

Chuanzhi Fang, Qiangxian Huang, Jian Xu, Rongjun Cheng, Lijuan Chen, Ruijun Li, Chaoqun Wang, Liansheng Zhang

Applied Sciences

DOI

2019

Design of optical accelerometer using four-quadrant photodetector

Ying-Jun Lei, Ruijun Li, Zhen-Xin Chang, Liansheng Zhang, Kuang–Chao Fan

Tenth International Symposium on Precision Engineering Measurements and Instrumentation

DOI

2019

A measurement method for probe microsphere of micro-CMM with double SPMs

Chuanzhi Fang, Qiangxian Huang, Meng Mi, Chaoqun Wang, Lijuan Chen, Liansheng Zhang, Hongli Li

Tenth International Symposium on Precision Engineering Measurements and Instrumentation

DOI

2019

A method to correct hysteresis of scanning probe microscope images based on a sinusoidal model

Liansheng Zhang, Xiaobo Chen, Jichao Huang, Hongli Li, Lijuan Chen, Qiangxian Huang

Review of Scientific Instruments

DOI

2018

Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

Ruijun Li, Ying-Jun Lei, Zhen-Xin Chang, Liansheng Zhang, Kuang–Chao Fan

Sensors

DOI

2018

High-frequency performance for a spiral-shaped piezoelectric bimorph

Fang Sheng Huang, Zhi Hua Feng, Ting Yu, Qiao Sheng Pan, Liansheng Zhang, Yong Bin Liu, L. He

Modern Physics Letters B

DOI

2017

多模态动态原子力显微镜系统

黄强先，张蕤，刘凯，赵阳，张连生

《光学精密工程》

2017

High-precision and low-cost vibration generator for low-frequency calibration system

Ruijun Li, Ying-Jun Lei, Liansheng Zhang, Zhen-Xin Chang, Kuang–Chao Fan, Zhenying Cheng, Penghao Hu

Measurement Science and Technology

DOI

2017

Squeeze Film Air Damping in Tapping Mode Atomic Force Microscopy

Yang Zhao, Qiangxian Huang, Liansheng Zhang, Yong Zhang, Rongjun Cheng

Micromachines

DOI

2017

A Three-Dimensional Resonant Triggering Probe for Micro-CMM

Qiangxian Huang, Chen Chen, Kui Hua Wu, Liansheng Zhang, Ruijun Li, Kuang–Chao Fan

Applied Sciences

DOI

2016

动态原子力显微镜悬臂高阶谐振相位特性研究

黄强先，张蕤，张连生，赵阳，陈丽娟

《电子测量与仪器学报》

2016

Characteristics of a dynamic atomic force microscopy based on a higher-order resonant silicon cantilever and experiments

Qiangxian Huang, Yang Zhao, Dan Yuan, Liansheng Zhang, Zhenying Cheng

Measurement

DOI

2016

Correlation-steered scanning for scanning probe microscopes to overcome thermal drift for ultra-long time scanning

Liansheng Zhang, Qian Long, Yongbin Liu, Jie Zhang, Zhihua Feng

Ultramicroscopy

DOI

2015

基于压电驱动的自感知振动抑制研究

刘永斌，陈凤林，张连生，张平

《振动与冲击》

2010

基于机械振动的压电陶瓷超高隔离度电源

邵维维，赵娟，潘成亮，张连生

《压电与声光》

精选作品

期刊论文

光纤耦合系统中角位移台耦合误差建模与修正

电容式三维纳米测量测头

面向半导体制造产业需求的集成电路测试课程改革探索与创新实践

弱耦合谐振式超高灵敏度微力传感器

光学非球面面形检测与误差建模补偿

二维运动台系统辨识与精密驱动控制

跨尺度微纳米三坐标测量机研制及误差分析

Correlation steered scanning with spiral scanning path for AFM to correct image distortion with real‐time compensation

Design and verification of a 2D-nanopositioner for high-speed scanning probe microscopy

Design method and error analysis of 3D measurement system in accordance with the Abbe principle

A novel minimum zone method for cylindricity error evaluation based on rotation projection method and adaptive particle swarm optimisation

On-machine separation and compensation of target mirror’s surface shape errors in multidimensional interferometric measurement system

Design and Driving Control of Cross-Scale Micro-Nano Coordinate Measuring Machine

Microstructure Edge Measurement With Nanometer Lateral Resolution Based on Astigmatism

Ultraprecision Spatial Error Compensation for Micro–Nano Coordinate Measuring Machine Following the Abbe Principle

一种新的大行程垂直纳米运动工作台设计与控制研究

集成电路测试新工科人才产教融合培养模式探索与实践

Anchor loss in weakly coupled resonator systems of mode-localized sensor based on perfectly matched layer method

Parameter estimation method of multidimensional measurement model with small sample based on MCM

Design and experiment of multidimensional and subnanometer stage driven by spatially distributed piezoelectric ceramics

Research on a Single-Vibrator Multimodal Inertial Impact Piezoelectric Motor With Self-Clamping Backsliding Suppression

Nano Precision Noncontact Probing System Using Tungsten Ball Tip for High Aspect Ratio Structures With Horizontal Internal Dimensions Below 100 μm

Three-Dimensional Nano Measurement System Based on Resonant Trigger Probe

亚纳米驱动分辨力的六自由度微动台

基于电荷泵的压电致动器迟滞非线性改善研究

Development of a Driving and Control System of Large Stroke 3-D Air-Floating Motion Stage With Submicrometer-Scale Positioning Accuracy

Non-contact optical probe with nanometer resolution and large measurement range based on the astigmatism method

Dual-Amplifier Driving in Sequence Method with Switches for Piezoelectric Stack Actuators to Reduce Hysteresis

High Precision and Low Force Resonant Probe Based on Quartz Tuning Fork

Development of submicron precision three-dimensional low cross-interference air-floating motion stage

Development of a High-Precision and Low Cross-Axis Sensitivity 3-D Accelerometer for Low-Frequency Vibration Measurement

Two-Dimensional Low-Frequency Optical Accelerometer With High Accuracy and Low Cross-Axis Sensitivity

微纳测量机靶镜正交偏差角测量不确定度评定

Hysteresis Segmentation Modeling and Experiment of Piezoelectric Ceramic Actuator

Thermoelastic damping suppression method of micro-beam resonators with basically constant resonant frequency

Molecular dynamics analysis of friction-triggering process with spherical probe

Large-scale and high-depth three dimensional scanning measurement system and algorithm optimization

Optical Accelerometers for Detecting Low-Frequency Micro-Vibrations

Development of a High-Resolution Touch Trigger Probe Based on an Optical Lever for Measuring Micro Components

A path planning method for real time correction of image distortion in atomic force microscope

Design of a high-precision two-dimensional coplanar micro-vibration generator

Measurement Range Enhancement of a Scanning Probe by the Real Time Adjustment of the Interferometer Reference Mirror

Development of a high-precision two-dimensional coplanar micro-vibration generator

Modeling and improvement of a low-frequency micro-accelerometer

Analog Electronic Method for Solving Nonlinear Errors of Sinusoidal Waves in Interferometry

Correction to “Analog Electronic Method for Solving Nonlinear Errors of Sinusoidal Waves in Interferometry” [2021 Art. no. 6504710]

A high-precision two-dimensional micro-accelerometer for low-frequency and micro-vibrations

Compensation Method for Polarization Mixing in the Homodyne Interferometer

Uncertainty evaluation for dynamic identification of a micro contact probe based on the signal transmission chain analysis method

A simple asymptotic search method for estimation of minimum zone sphericity error

Thermoelastic damping suppression method for MEMS resonant beam by introducing vertical slots

A simple method for minimum zone sphericity evaluation

Independent driving method for significant hysteresis reduction of piezoelectric stack actuators

Measurement and uncertainty evaluation of the microsphere used for micro-CMM probe

A Measurement Method of Microsphere with Dual Scanning Probes

Design of optical accelerometer using four-quadrant photodetector

A measurement method for probe microsphere of micro-CMM with double SPMs

A method to correct hysteresis of scanning probe microscope images based on a sinusoidal model

Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

High-frequency performance for a spiral-shaped piezoelectric bimorph

多模态动态原子力显微镜系统

High-precision and low-cost vibration generator for low-frequency calibration system

Squeeze Film Air Damping in Tapping Mode Atomic Force Microscopy

A Three-Dimensional Resonant Triggering Probe for Micro-CMM

动态原子力显微镜悬臂高阶谐振相位特性研究

Characteristics of a dynamic atomic force microscopy based on a higher-order resonant silicon cantilever and experiments

Correlation-steered scanning for scanning probe microscopes to overcome thermal drift for ultra-long time scanning

基于压电驱动的自感知振动抑制研究

基于机械振动的压电陶瓷超高隔离度电源

预印本

Molecular Dynamics Study of Probe-Sample Friction in Micro/Nano Measurements: The Impact of Temperature and Speed

研究方向