杨晓峰｜复旦大学｜学者主页

2026

基于大语言模型智能体的控制系统闭环自动优化方法

卓闻超，于健博，孙煜，杨晓峰

《复旦学报(自然科学版)》

DOI

2026

Trajectory planning for wafer transfer manipulators in confined spaces

Haiyang Jiang, Yu Sun, Shangyang Zhou, Xiaofeng Yang, Yuping Liu

Control Engineering Practice

DOI

2026

A Taylor-series-based linearization approach for dynamic parameter identification of robotic manipulators

Haiyang Jiang, Yu Sun, Shangyang Zhou, Xiaofeng Yang, Yuping Liu

International Journal of Dynamics and Control

DOI

2026

Adaptive Dual-Loop Feedforward Control for Microvibration Environment Realization in High-Precision Sensor Testing Systems

Shu Dang, Yu Sun, Jia Yuan, Kaicheng Yu, Xiaofeng Yang

IEEE Sensors Journal

DOI

2026

ICDL: Inverse Compensation Direct Learning with Model-Accelerator Co-Optimization enabling Real-time Inference in Precision Motion Control

Manni Li, Longbin Jiang, Zixu Li, Jie Yang, Z Huang, Wending Zhao, Yinyin Lin, Xiaofeng Yang

IEEE International Symposium on Circuits and Systems proceedings

DOI

2026

Adaptive PID Parameter Optimization Based on Reinforcement Learning

Yuqing Jian, Sun Y, Kaicheng Yu, W Y Zhou, Chengxin Zheng, Shu Dang, Jia Yuan, Shangyang Zhou, Xiaofeng Yang, Chunfeng Jin

Journal of Physics Conference Series

DOI

2026

Iterative and Real-Time Trajectory Modification Control via Error Decoupling for Wafer Scanner Synchronization

Longbin Jiang, Yunlang Xu, Xiaofeng Yang

IEEE Transactions on Industrial Electronics

DOI

2026

Adaptive interval type-2 FNN enhanced fixed-time SMC for robust motion of piezoelectric stack actuators

Xuchen Wang, 余锦 Yu Jin, Yixiao Yang, Huazhou Kang, Xiaofeng Yang, Yang Xu, Yuping Liu

Journal of Vibration and Control

DOI

2026

Design, Modeling, and Control for a Stiffness Compensation Compliant Mechanism-Based Reluctance-Actuated Nanopositioner

Datong Pan, Yunlang Xu, Xiaofeng Yang

IEEE Transactions on Automation Science and Engineering

DOI

2026

Adaptive feedforward construction method for precision motion stage based on iterative learning control

Xuewei Fu, Zhenyu Chen, Jianbo Yu, Pericle Zanchetta, Xiaofeng Yang, Yang Liu, Jiubin Tan

Control Engineering Practice

DOI

2025

基于物理引导的RBF神经网络逆模型在ZTT运动平台前馈控制中的应用

吴聪懿，徐云浪，陈椿元，金煜，杨晓峰

《动力学与控制学报》

2025

Reinforcement Learning-Based Motion Control for Precision Motion Stage Systems

Wenchao Zhuo, Haoran Cheng, Jianbo Yu, Xiaofeng Yang

International Conference on Robotics, Control and Automation Engineering (RCAE)

DOI

2025

A high-gain skyhook damping control method based on a high-quality excitation spectrum identified model

Yu Sun, Shu Dang, Wenbao Cheng, Kaicheng Yu, Huazhou Kang, Jianbo Yu, Xiaofeng Yang

Journal of Vibration and Control

DOI

2025

A Multi-conditional Prandtl–Ishlinskii model for nonlinearity compensation on the longitudinal-shear piezoelectric nanopositioning stage

Yixiao Yang, Huazhou Kang, Yunlang Xu, Xiaofeng Yang, Zhiping Zhang

Mechanical Systems and Signal Processing

DOI

2025

A long-short motion strategy with feedforward compensation for the long-stroke inchworm piezoelectric motor driven by the bender-type actuators

Shuo Han, Huazhou Kang, Jianbo Yu, Xiaofeng Yang

Sensors and Actuators A Physical

DOI

2025

Dual-Domain High-Precision Tracking Control for PMLSMs

Xuchen Wang, Yu Jin, Xu Yang, Xiaofeng Yang, Yuping Liu

Lecture notes in electrical engineering

DOI

2024

尺蠖式压电陶瓷电机的双模式驱动器开发与研究

韩硕，杨晓峰

《压电与声光》

2024

RBFNN-based nonsingular fast terminal sliding mode control for piezoelectric stack actuator

X. M. Wang, Yu Jin, Yang Xu, Xiaofeng Yang, Yixiao Yang, Yuping Liu

International Conference on Advanced Mechatronic Systems

DOI

2024

The enhancement of displacement of shear piezoelectric stack actuator with conductive adhesive

Huazhou Kang, Yixiao Yang, Quan Wang, Xiaofeng Yang

International Conference on Advanced Mechatronic Systems

DOI

2024

A composite iterative neural network sliding mode control for hybrid reluctance actuator

Yunlang Xu, Guo Liang, Longbin Jiang, Yu Sun, Xiaofeng Yang

Nonlinear Dynamics

DOI

2024

Dynamic Separation Model-Based Sliding Mode Control with Adaptive Neural Network Compensators for a Reluctance Actuator Motion System

Yunlang Xu, Xinyi Su, Xiaofeng Yang

International Journal of Precision Engineering and Manufacturing

DOI

2024

Enhancing sparse regression modeling of hysteresis with optimized PIO algorithm in piezo actuator

Yu Jin, Jianbo Yu, Yunlang Xu, Qiaodan Lu, Xiaofeng Yang

Smart Materials and Structures

DOI

2024

Model of the longitudinal-shear piezoelectric inchworm motor in shear movement

Huazhou Kang, Zhi Li, Yu Sun, Qiufeng Yu, Xiaofeng Yang

International Journal of Mechanical Sciences

DOI

2023

Adaptive parameter learning and neural network control for uncertain permanent magnet linear synchronous motors

Xinyi Su, Xiaofeng Yang, Yunlang Xu

Journal of the Franklin Institute

DOI

2023

Fuzzy adaptive terminal sliding mode control based on recurrent neural network compensation for a maglev system

Xinyi Su, Xiaofeng Yang, Yunlang Xu

Engineering Applications of Artificial Intelligence

DOI

2023

A composite neural network-based adaptive sliding mode control method for reluctance actuator maglev system

Xu Yunlang, Feng Shu, Xinyi Su, Guo Liang, Shuo Han, Xiaofeng Yang

Neural Computing and Applications

DOI

2022

激光外差干涉技术在光刻机中的应用

张志平，杨晓峰

《激光与光电子学进展》

2022

光刻机运动台控制方法研究进展

姜龙滨，丁润泽，丁晨阳，杨晓峰，徐云浪

《激光与光电子学进展》

2022

集成电路光刻机精密运动台控制方法综述

姜龙滨，刘维珂，杨晓峰

《长春工业大学学报》

2022

High-Precision Position Tracking Control of Giant Magnetostrictive Actuators Using Fractional-Order Sliding Mode Control with Inverse Prandtl-Ishlinskii Compensator

Zidong Liu, Weike Liu, Pan Wang, Zhi Li, Yunlang Xu, Xiaofeng Yang, Feng Shu

International Journal of Precision Engineering and Manufacturing

DOI

2022

Quadrature Sinusoidal Signals Correction of Magnetic Encoders via Radial Basis Function Neural Network and Adaptive Loop Shaping

Siyi Yu, Weike Liu, Xiaofeng Yang, Feng Shu

IEEE Transactions on Industrial Electronics

DOI

2022

Predictive-adaptive sliding mode control method for reluctance actuator maglev system

Yunlang Xu, Chenyang Ding, Xinyi Su, Zhi Li, Xiaofeng Yang

Nonlinear Dynamics

DOI

2022

Design and experimental evaluation of an inchworm motor driven by bender-type piezoelectric actuators

Han Shuo, Zhi Li, Yunlang Xu, Xiaofeng Yang

Smart Materials and Structures

DOI

2022

An Adaptive Data-Driven Iterative Feedforward Tuning Approach Based on Fast Recursive Algorithm: With Application to a Linear Motor

Xuewei Fu, Xiaofeng Yang, Pericle Zanchetta, Mi Tang, Yang Liu, Zhenyu Chen

IEEE Transactions on Industrial Informatics

DOI

2022

Iterative Feedforward Tuning for A PMLSM with Unknown Time Delay and Current-Dependent Force Ripple

Weike Liu, Zidong Liu, Yang Zhang, Feng Shu, Xiaofeng Yang

IEEE International Conference on Industrial Technology (ICIT)

DOI

2022

Iterative learning based neural network sliding mode control for repetitive tasks: With application to a PMLSM with uncertainties and external disturbances

Weike Liu, Feng Shu, Yunlang Xu, Runze Ding, Xiaofeng Yang, Zhi Li, Yang Liu

Mechanical Systems and Signal Processing

DOI

2022

Neural-network-based adaptive robust precision motion control of linear motors with asymptotic tracking performance

Runze Ding, Chenyang Ding, Yunlang Xu, Xiaofeng Yang

Nonlinear Dynamics

DOI

2021

Neural network-based robust integral error sign control for servo motor systems with enhanced disturbance rejection performance

Runze Ding, Chenyang Ding, Yunlang Xu, Weike Liu, Xiaofeng Yang

ISA Transactions

DOI

2021

Neural network adaptive sliding mode control without overestimation for a maglev system

Xinyi Su, Yunlang Xu, Xiaofeng Yang

Mechanical Systems and Signal Processing

DOI

2021

An Adaptive Approach Based on Neural Network and Phase-Locked Loop for Correcting Quadrature Sinusoidal Signals of Magnetic Encoders

Siyi Yu, Weike Liu, Xiaofeng Yang, Feng Shu

Proceedings of the Annual Conference of the IEEE Industrial Electronics Society

DOI

2021

Fractional-Order Sliding Mode Control with Adaptive Neural Network for High-Precision Position Control of Reluctance Actuators

Zidong Liu, Yunlang Xu, Pan Wang, Xiaofeng Yang, Zhi Li, Feng Shu

Proceedings of the Annual Conference of the IEEE Industrial Electronics Society

DOI

2021

Time‐iteration‐domain integrated learning control for robust trajectory tracking and disturbance rejection: With application to a PMLSM

Weike Liu, Yunlang Xu, Runze Ding, Feng Shu, Xiaofeng Yang

IET Control Theory and Applications

DOI

2021

A New Regressive RBF Neural Network Model for Rate-Dependent Hysteresis in Reluctance Actuators

Yunlang Xu, Feng Shu, Xiaofeng Yang, Xinyi Su, Bing Hu

International Symposium on Linear Drives for Industry Applications (LDIA)

DOI

2021

Cogging Force Identification Based on Self-Adaptive Hybrid Self-Learning TLBO Trained RBF Neural Network for Linear Motors

Xuewei Fu, Chenyang Ding, Pericle Zanchetta, Xiaofeng Yang, Mi Tang, Yang Liu

International Symposium on Linear Drives for Industry Applications (LDIA)

DOI

2021

Multi-Kernel Neural Network Sliding Mode Control for Permanent Magnet Linear Synchronous Motors

Pan Wang, Yunlang Xu, Runze Ding, Weike Liu, Steve F. Shu, Xiaofeng Yang

IEEE Access

DOI

2020

A Parallel Inverse-Model-Based Iterative Learning Control Method for a Master-Slave Wafer Scanner

Weike Liu, Runze Ding, Xiaofeng Yang, Chenyang Ding, Feng Shu

Proceedings of the Annual Conference of the IEEE Industrial Electronics Society

DOI

2020

An Optimal Actuator Placement Method for Direct-drive Stages to Maximize Control Bandwidth

Runze Ding, Chenyang Ding, Yunlang Xu, Weike Liu, Xiaofeng Yang

Proceedings of the Annual Conference of the IEEE Industrial Electronics Society

DOI

2020

Frequency-Domain Data-Driven Adaptive Iterative Learning Control Approach: With Application to Wafer Stage

Xuewei Fu, Xiaofeng Yang, Pericle Zanchetta, Yang Liu, Chenyang Ding, Mi Tang, Zhenyu Chen

IEEE Transactions on Industrial Electronics

DOI

2020

Enhanced kalman-filtering iterative learning control with application to a wafer scanner

Yang Liu, Li Li, Xiaofeng Yang, Jiubin Tan

Information Sciences

DOI

2020

Generalized Inverse Multiplicative Structure for Differential-Equation-Based Hysteresis Models

Zhi Li, Yunlang Xu, Xiaofeng Yang, Feng Jie, Wei Fang

IEEE Transactions on Industrial Electronics

DOI

2019

A two-stage model for rate-dependent inverse hysteresis in reluctance actuators

Yunlang Xu, Xiaoping Li, Xiaofeng Yang, Zhile Yang, Liwei Wu, Qingsheng Chen

Mechanical Systems and Signal Processing

DOI

2019

A direct inverse hysteresis model and its application in reluctance actuators

Yunlang Xu, Xiaoping Li, Liwei Wu, Zhile Yang, Peijin Zhang, Xiaofeng Yang

IEEE/ASME International Conference on Advanced Intelligent Mechatronics

DOI

2018

Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables

Fazhi Song, Yang Liu, Jian‐Xin Xu, Xiaofeng Yang, Qiao Zhu

IEEE Transactions on Industrial Electronics

DOI

2018

Intelligent measurement and compensation of linear motor force ripple: a projection-based learning approach in the presence of noise

Yang Liu, Fazhi Song, Xiaofeng Yang, Yue Dong, Jiubin Tan

Measurement Science and Technology

DOI

2018

A New Linear Motor Force Ripple Compensation Method Based on Inverse Model Iterative Learning and Robust Disturbance Observer

Xuewei Fu, Xiaofeng Yang, Zhenyu Chen

Complexity

DOI

2017

Iterative Learning Identification and Compensation of Space-Periodic Disturbance in PMLSM Systems With Time Delay

Fazhi Song, Yang Liu, Jian‐Xin Xu, Xiaofeng Yang, Ping He, Zhile Yang

IEEE Transactions on Industrial Electronics

DOI

2017

Mean‐square error constrained approach to robust stochastic iterative learning control

Li Li, Yang Liu, Zhile Yang, Xiaofeng Yang, Kang Li

IET Control Theory and Applications

DOI

2017

The identification of reluctance actuators B-H hysteresis model using teachinglearning-based optimization

Qingsheng Chen, Yunlang Xu, Xiaofeng Yang, Xiaoping Li

Chinese Automation Congress

DOI

2017

Integral Sliding Mode Based Precision Motion Control for PMLM

Yang Liu, Hao Luo, Zhile Yang, Zhenxian Fu, Xiaofeng Yang

Communications in computer and information science

DOI

2017

Iterative Learning Identification with Bias Compensation for Stochastic Linear Time-Varying Systems

Fazhi Song, Yang Liu, Zhile Yang, Xiaofeng Yang, Ping He

Communications in computer and information science

DOI

2014

Optimum design of voice coil motor using for nano-stage in lithographic equipment

Feng Chi, Liwei Wu, Xiaofeng Yang

World Congress on Intelligent Control and Automation

DOI

2014

Synchronous control technology of nano-stage in lithographic equipment using for LED manufacturing

Liwei Wu, Feng Chi, Xiaofeng Yang

World Congress on Intelligent Control and Automation

DOI

2014

Research on a joint mechanical and electrical simulation platform of a step-and-scan lithography based on the state-space finite element model

Zhenbin Wang, Hai Xia, Xiaofeng Yang

World Congress on Intelligent Control and Automation

DOI

2014

A Direct Adaptive MNN Control Method for Stage Having Paired Reluctance Linear Actuator with Hysteresis

Yuping Liu, Kang‐Zhi Liu, Xiaofeng Yang

Intelligent Control and Automation

DOI

2014

Nonlinear Current Control for Reluctance Actuator with Hysteresis Compensation

Liu Yu-ping, Kang‐Zhi Liu, Xiaofeng Yang

Journal of Control Science and Engineering

DOI

2013

Hysteresis compensation control for reluctance actuator force using neural network

Liu Yu-ping, Kang‐Zhi Liu, Xiaofeng Yang

精选作品

期刊论文

基于大语言模型智能体的控制系统闭环自动优化方法

Trajectory planning for wafer transfer manipulators in confined spaces

A Taylor-series-based linearization approach for dynamic parameter identification of robotic manipulators

Adaptive Dual-Loop Feedforward Control for Microvibration Environment Realization in High-Precision Sensor Testing Systems

ICDL: Inverse Compensation Direct Learning with Model-Accelerator Co-Optimization enabling Real-time Inference in Precision Motion Control

Adaptive PID Parameter Optimization Based on Reinforcement Learning

Iterative and Real-Time Trajectory Modification Control via Error Decoupling for Wafer Scanner Synchronization

Adaptive interval type-2 FNN enhanced fixed-time SMC for robust motion of piezoelectric stack actuators

Design, Modeling, and Control for a Stiffness Compensation Compliant Mechanism-Based Reluctance-Actuated Nanopositioner

Adaptive feedforward construction method for precision motion stage based on iterative learning control

基于物理引导的RBF神经网络逆模型在ZTT运动平台前馈控制中的应用

Reinforcement Learning-Based Motion Control for Precision Motion Stage Systems

A high-gain skyhook damping control method based on a high-quality excitation spectrum identified model

A Multi-conditional Prandtl–Ishlinskii model for nonlinearity compensation on the longitudinal-shear piezoelectric nanopositioning stage

A long-short motion strategy with feedforward compensation for the long-stroke inchworm piezoelectric motor driven by the bender-type actuators

Dual-Domain High-Precision Tracking Control for PMLSMs

尺蠖式压电陶瓷电机的双模式驱动器开发与研究

RBFNN-based nonsingular fast terminal sliding mode control for piezoelectric stack actuator

The enhancement of displacement of shear piezoelectric stack actuator with conductive adhesive

A composite iterative neural network sliding mode control for hybrid reluctance actuator

Dynamic Separation Model-Based Sliding Mode Control with Adaptive Neural Network Compensators for a Reluctance Actuator Motion System

Enhancing sparse regression modeling of hysteresis with optimized PIO algorithm in piezo actuator

Model of the longitudinal-shear piezoelectric inchworm motor in shear movement

Adaptive parameter learning and neural network control for uncertain permanent magnet linear synchronous motors

Fuzzy adaptive terminal sliding mode control based on recurrent neural network compensation for a maglev system

A composite neural network-based adaptive sliding mode control method for reluctance actuator maglev system

激光外差干涉技术在光刻机中的应用

光刻机运动台控制方法研究进展

集成电路光刻机精密运动台控制方法综述

High-Precision Position Tracking Control of Giant Magnetostrictive Actuators Using Fractional-Order Sliding Mode Control with Inverse Prandtl-Ishlinskii Compensator

Quadrature Sinusoidal Signals Correction of Magnetic Encoders via Radial Basis Function Neural Network and Adaptive Loop Shaping

Predictive-adaptive sliding mode control method for reluctance actuator maglev system

Design and experimental evaluation of an inchworm motor driven by bender-type piezoelectric actuators

An Adaptive Data-Driven Iterative Feedforward Tuning Approach Based on Fast Recursive Algorithm: With Application to a Linear Motor

Iterative Feedforward Tuning for A PMLSM with Unknown Time Delay and Current-Dependent Force Ripple

Iterative learning based neural network sliding mode control for repetitive tasks: With application to a PMLSM with uncertainties and external disturbances

Neural-network-based adaptive robust precision motion control of linear motors with asymptotic tracking performance

Neural network-based robust integral error sign control for servo motor systems with enhanced disturbance rejection performance

Neural network adaptive sliding mode control without overestimation for a maglev system

An Adaptive Approach Based on Neural Network and Phase-Locked Loop for Correcting Quadrature Sinusoidal Signals of Magnetic Encoders

Fractional-Order Sliding Mode Control with Adaptive Neural Network for High-Precision Position Control of Reluctance Actuators

Time‐iteration‐domain integrated learning control for robust trajectory tracking and disturbance rejection: With application to a PMLSM

A New Regressive RBF Neural Network Model for Rate-Dependent Hysteresis in Reluctance Actuators

Cogging Force Identification Based on Self-Adaptive Hybrid Self-Learning TLBO Trained RBF Neural Network for Linear Motors

Multi-Kernel Neural Network Sliding Mode Control for Permanent Magnet Linear Synchronous Motors

A Parallel Inverse-Model-Based Iterative Learning Control Method for a Master-Slave Wafer Scanner

An Optimal Actuator Placement Method for Direct-drive Stages to Maximize Control Bandwidth

Frequency-Domain Data-Driven Adaptive Iterative Learning Control Approach: With Application to Wafer Stage

Enhanced kalman-filtering iterative learning control with application to a wafer scanner

Generalized Inverse Multiplicative Structure for Differential-Equation-Based Hysteresis Models

A two-stage model for rate-dependent inverse hysteresis in reluctance actuators

A direct inverse hysteresis model and its application in reluctance actuators

Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables

Intelligent measurement and compensation of linear motor force ripple: a projection-based learning approach in the presence of noise

A New Linear Motor Force Ripple Compensation Method Based on Inverse Model Iterative Learning and Robust Disturbance Observer

Iterative Learning Identification and Compensation of Space-Periodic Disturbance in PMLSM Systems With Time Delay

Mean‐square error constrained approach to robust stochastic iterative learning control

The identification of reluctance actuators B-H hysteresis model using teachinglearning-based optimization

Integral Sliding Mode Based Precision Motion Control for PMLM

Iterative Learning Identification with Bias Compensation for Stochastic Linear Time-Varying Systems

Optimum design of voice coil motor using for nano-stage in lithographic equipment

Synchronous control technology of nano-stage in lithographic equipment using for LED manufacturing

Research on a joint mechanical and electrical simulation platform of a step-and-scan lithography based on the state-space finite element model

A Direct Adaptive MNN Control Method for Stage Having Paired Reluctance Linear Actuator with Hysteresis

Nonlinear Current Control for Reluctance Actuator with Hysteresis Compensation

Hysteresis compensation control for reluctance actuator force using neural network

会议论文

独立同步和双交叉同步策略在光刻机气浮直线运动台中的应用研究

预印本

An Identification Method for Dynamic Systems with SCNs Hysteresis Compensator: Application to the Inchworm Piezo Motor

研究方向