百晓学者学者目录

武震宇

研究员，上海大学

精选作品

期刊论文

2026

Quasi‐Standard Platform of AlScN Piezoelectric Integrated MEMS Technology (PIMT) For Multi‐Project Wafer Fabrication

Yongquan Su, Yuqiang Hu, Xingwang Zhu, Wenli Xue, Hao Huang, Yichen Liu, Jiachen Han, Anna Li, Cheng Zhang, Wanzhu Qiao, Jiaqi Huang, Peng Ding, Qianying Sun, Huan Liu, Tao Wu, Lihao Wang, Yang Wang, Hao Chen, Zhenyu Wu

Advanced Sensor Research

DOI

2026

Ultra-Compact MEMS Pirani Gauge for In Situ Wafer-Level Vacuum Monitoring

Peng Ding, Yongquan Su, Yichen Liu, Yongkang Liu, Shuo Chen, Shinan Wang, Yang Wang, Min Li, Qifeng Qiao, Zhenyu Wu

IEEE Sensors Journal

DOI

2026

Wide-range adaptive piezoelectric MEMS-Fabry-Pérot filter for gas spectral identification

Jiachen Han, Yuqiang Hu, Yongquan Su, Xiao Peng, Qihui Liu, Xin Luo, Lihao Wang, Yichen Liu, Yang Wang, Jin Zhang, Zhenyu Wu, Hao Chen

Optics Express

DOI

2025

用于MEMS微镜激光跟瞄的扩角镜头研究

张鹏程，汪洋，李安娜，黄昊，张程，张家昌，张永贵，王栎皓，刘艺晨，武震宇

《红外与激光工程》

2025

Resolution Enhancement for mmWave Radar With Matrix Pencil-Based Coherent Extension

Zhenyu Wu, Yipeng Li, Tingkai Hu, Chuandong Li, Zhen Luo

IEEE transactions on consumer electronics

DOI

2025

Enhanced Sensing for Automotive mmWave Radar: Super-Resolution Range and Angle Estimation With Coherent Extension and Advanced IAA

Zhenyu Wu, Xuxu Ma, Fei Chang, Chuandong Li, Zhen Luo, Man-Fai Leung

IEEE transactions on consumer electronics

DOI

2025

A Super-Resolution Point Cloud Generation Method for mmWave Radar

Fang Wang, Chaojie Wang, P. Gao, Zhenyu Wu, Xing Yang, Yawei Shi

Asia

DOI

2025

A novel heat-resistant vias-first TSV MEMS silicon substrate for high density 2.5D/3D interposer application

Yanlong Wang, Yongquan Su, Yichen Liu, Lihao Wang, Zhichao Weng, Ke Xie, Yi Yang, Zhenyu Wu, Jihua Zhang

Materials Science in Semiconductor Processing

DOI

2025

A high-performance 10 mm diameter MEMS fast steering mirror with integrated piezoresistive angle sensors for laser inter-satellite links

Wenli Xue, Yichen Liu, Xingwang Zhu, Mingkun Wang, Zhichao Weng, Yongquan Su, Yi Yang, Hongfeng Zhao, Yang Wang, Hao Chen, Lihao Wang, Zhenyu Wu

Microsystems & Nanoengineering

DOI

2025

Integrated piezoresistive sensor for high-precision closed-loop control of piezoelectric MEMS fast steering mirror

Zhichao Weng, Wenli Xue, Xingwang Zhu, Mingkun Wang, Mingkun Wang, Yongquan Su, Yi Yang, Yichen Liu, Hao Huang, Yanlong Wang, Yang Wang, Ke Chang Xie, Lihao Wang, Yang Wang, Hao Chen, Lihao Wang, Zhenyu Wu

Sensors and Actuators A Physical

DOI

2025

Low transverse-sensitivity AlScN piezoelectric MEMS accelerometers with perforated diaphragm-island for high-precision vibration monitoring

A. Z. Li, Yongquan Su, Cheng Zhang, Jiachang Zhang, Hao Huang, Dalong Chen, Wenli Xue, Lihao Wang, Yichen Liu, Feng Tian, Yang Wang, Zhenyu Wu

Measurement

DOI

2025

A high-quality bimorph Sc-doped AlN deposition and characterisation process

Jia‐Qi Huang, Peng Ding, Hongfeng Zhao, Xingwang Zhu, Yichen Liu, Lihao Wang, Yongquan Su, Zhenyu Wu

Sensors and Actuators A Physical

DOI

2025

Calibration-free low-drift MEMS piezoelectric accelerometer for high-temperature vibration monitoring

Cheng Zhang, Anna Li, Jiaqi Huang, Jiachang Zhang, Hao Huang, Yongquan Su, Lihao Wang, Yichen Liu, Dalong Chen, Feng Tian, Yang Wang, Zhenyu Wu

Measurement

DOI

2025

A highly integrated three-axis vector diamond quantum magnetometer with a compact electrical package

Xiao Peng, Fei Xie, Yaochen Zhu, Xin Luo, Qihui Liu, Dan Wang, Yuqiang Hu, Jiachen Han, Lingyun Li, Jianping Liu, Hao Chen, Jiangong Cheng, Zhenyu Wu

Applied Physics Letters

DOI

2025

Design, fabrication, and characterization of a low-power, high-modulation-depth infrared emitter array

Peng Ding, Yongquan Su, Jiaqi Huang, Yiyi Wang, Yang Wang, Yichen Liu, Shinan Wang, Qifeng Qiao, Zhenyu Wu

International Journal of Optomechatronics

DOI

2025

Microfabricated Active Laser Noise Suppression Device for a High-Sensitivity Diamond Quantum Magnetometer

Nan Wang, Yichen Liu, Yongquan Su, Xiao Peng, Yuqiang Hu, Qihui Liu, Fei Xie, Yaochen Zhu, Xin Chen, Xin Luo, Yonggui Zhang, Lihao Wang, Maoheng Jing, Chun Li, Shaoxiong Nie, Hao Chen, Zhenyu Wu, Jiangong Cheng

ACS Photonics

DOI

2024

高频压电MEMS微镜设计与仿真

张浩，汪洋，武震宇

《传感器与微系统》

2024

MSEDOA: Enhancing DOA Estimation with Multiscale Squeeze-and-Excitation Networks for Automotive Millimeter-Wave Radar

Tingkai Hu, Shuang Sun, Zhenyu Wu, Chuandong Li, Chou-Jun Zhan, Hailing Xiong, Zhen Luo

Asia

DOI

2024

MEMS Fabry-Perot sensor for accurate high pressure measurement up to 10 MPa

Yuqiang Hu, Lu Cao, Shaoxiong Nie, Qihui Liu, Fei Xie, Xiao Peng, Yaochen Zhu, Jiachen Han, Xin Chen, Lihao Wang, Yichen Liu, Tongyu Liu, Hao Chen, Zhenyu Wu

Optics Express

DOI

2024

Electrical aging of a piezoelectric MEMS fast steering mirror and its impact on reliability

Weihong Zhu, Yongquan Su, Shiyuan Gao, Xiaodong Li, Yonggui Zhang, Lihao Wang, Yichen Liu, Yang Wang, Zhenyu Wu

Sensors and Actuators A Physical

DOI

2024

A novel quasi-static MEMS piezoelectric micromirror array with a high fill factor and three degrees of freedom

Yongquan Su, Yichen Liu, Yang Wang, Yang Wang, Qianying Sun, Qifeng Qiao, Lihao Wang, Lihao Wang, Zhenyu Wu

Sensors and Actuators A Physical

DOI

2024

Water-Immersible MEMS Mirror with a Large Optical Aperture

Yi Yang, Yichen Liu, Yongquan Su, Yang Wang, Yonggui Zhang, Hao Chen, Lihao Wang, Zhenyu Wu

Micromachines

DOI

2024

Biaxial Lissajous Scanning Piezoelectric MEMS Mirror Based on High Fill Factor and Large Optical Aperture

Hao Huang, Lihao Wang, Yang Wang, Yichen Liu, Yongquan Su, Weihong Zhu, Yonggui Zhang, Zhenyu Wu

Proceedings, IEEE micro electro mechanical systems

DOI

2024

A MEMS Fast Steering Mirror with 10 mm Aperture for Free-Space Optical Communication

Yichen Liu, Yongquan Su, Zhichao Weng, Yi Yang, Yang Wang, Lihao Wang, Zhenyu Wu

Proceedings, IEEE micro electro mechanical systems

DOI

2024

Fiber‐Integrated Diamond Quantum Sensor for High‐Voltage Current Measurements

Qihui Liu, Shaoxiong Nie, Xiao Peng, Yaochen Zhu, Nan Wang, Yuqiang Hu, Xin Luo, Chun li, Maoheng Jing, Chunji Zhang, Wei Liu, Hao Chen, Jiangong Cheng, Zhenyu Wu

Advanced Sensor Research

DOI

2024

Miniaturized Diamond Quantum Magnetometer with Integrated Laser Source and All Electrical I/OS

Fei Xie, Zhichao Chen, Xiao Peng, Qihui Liu, Lingyun Li, Nan Wang, Yuqiang Hu, Yichen Liu, Lihao Wang, Hao Chen, Jiangong Cheng, Zhenyu Wu

Proceedings, IEEE micro electro mechanical systems

DOI

2024

Closed-Loop Diamond Quantum Sensor for Large Range and High Precision Current Measurement

Qihui Liu, Fei Xie, Xiao Peng, Yonggui Zhang, Nan Wang, Yuqiang Hu, Lihao Wang, Yichen Liu, Yang Wang, Shaoxiong Nie, Hao Chen, Jiangong Cheng, Zhenyu Wu

IEEE Sensors Journal

DOI

2023

卫星激光通信MEMS快速反射镜可靠性研究进展

朱伟鸿，汪洋，王栎皓，刘艺晨，武震宇

《红外与激光工程》

2023

卫星激光通信快速反射镜研究进展及发展趋势

余子昊，王栎皓，汪洋，刘艺晨，武震宇

《激光与光电子学进展》

2023

A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy

Shuo Chen, Liuhaodong Feng, Song Guo, Yucheng Ji, Shuwen Zeng, Xinlin Peng, Yang Xu, Tianbao Hu, Zhenyu Wu, Shinan Wang

Sensors

DOI

2023

Control of a MEMS Fast Steering Mirror With Improved Quasi-Static Performance

Yu Zihao, Lihao Wang, Wang Yang, Yonggui Zhang, Liu Yichen, Zhenyu Wu

IEEE Access

DOI

2023

High-Q adiabatic micro-resonators on a wafer-scale ion-sliced 4H-silicon carbide-on-insulator platform

Liping Zhou, Ailun Yi, Yongquan Su, Bingcheng Yang, Yifan Zhu, Jiachen Cai, Chengli Wang, Zhenyu Wu, Sannian Song, Jiaxiang Zhang, Xin Ou

Optics Letters

DOI

2023

Millimeter‐Scale Temperature Self‐Calibrated Diamond‐Based Quantum Sensor for High‐Precision Current Sensing

Qihui Liu, Fei Xie, Xiao Peng, Yuqiang Hu, Nan Wang, Yonggui Zhang, Yang Wang, Lingyun Li, Hao Chen, Jiangong Cheng, Zhenyu Wu

Advanced Quantum Technologies

DOI

2023

A Microfabricated Diamond Quantum Magnetometer with Picotesla Scale Sensitivity

Fei Xie, Qihui Liu, Yuqiang Hu, Lingyun Li, Zhichao Chen, Jin Zhang, Yonggui Zhang, Yuyao Zhang, Yang Wang, Jiangong Cheng, Hao Chen, Zhenyu Wu

Proceedings, IEEE micro electro mechanical systems

DOI

2023

Realization of high-dynamic-range broadband magnetic-field sensing with ensemble nitrogen-vacancy centers in diamond

Cao Wang, Qihui Liu, Yuqiang Hu, Fei Xie, Krishangi Krishna, Nan Wang, Lihao Wang, Yang Wang, Kimani C. Toussaint, Jiangong Cheng, Hao Chen, Zhenyu Wu

Review of Scientific Instruments

DOI

2022

Resolution adjustable Lissajous scanning with piezoelectric MEMS mirrors

Yuyao Zhang, Yichen Liu, Lihao Wang, Yongquan Su, Yonggui Zhang, Zihao Yu, Weihong Zhu, Yang Wang, Zhenyu Wu

Optics Express

DOI

2022

A two-step wet etching process of PZT thin film with ultra-low undercut for MEMS applications

Yongquan Su, Yichen Liu, Yue Fei, Lihao Wang, Jindong Cai, Siqi Chen, Zhenyu Wu

Sensors and Actuators A Physical

DOI

2022

AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application

Yichen Liu, Lihao Wang, Yongquan Su, Yuyao Zhang, Yang Wang, Zhenyu Wu

Micromachines

DOI

2022

Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application

Liuhaodong Feng, Shuwen Zeng, Yongquan Su, Lihao Wang, Yang Xu, Song Guo, Shuo Chen, Yucheng Ji, Xinlin Peng, Zhenyu Wu, Shinan Wang

Micromachines

DOI

2022

Microfabricated sensor device for CW and pulsed laser power measurements

Yuqiang Hu, Fei Xie, Qihui Liu, Nan Wang, Jin Zhang, Yichen Liu, Yongquan Su, Yang Wang, Hao Chen, Zhenyu Wu

Optics Express

DOI

2022

A microfabricated fiber-integrated diamond magnetometer with ensemble nitrogen-vacancy centers

Fei Xie, Yuqiang Hu, Lingyun Li, Cao Wang, Qihui Liu, Nan Wang, Lihao Wang, Shuna Wang, Jiangong Cheng, Hao Chen, Zhenyu Wu

Applied Physics Letters

DOI

2022

Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric Coefficients d31 and d33 of AlN and AlScN Thin Films

Hao Zhang, Yang Wang, Lihao Wang, Yichen Liu, Hao Chen, Zhenyu Wu

Micromachines

DOI

预印本

2024

Mechanical robust biaxial MEMS mirror achieving > 100° optical scanning angle for LiDAR application

Yonggui Zhang, Hao Huang, Lihao Wang, Yongquan Su, Yang Wang, Yichen Liu, Zhenyu Wu

Research Square

DOI

研究方向

先进MEMS器件与微系统

此主页由公开资料整理，尚未经学者本人认领。