百晓学者学者目录

王诗男

副研究员、研究员、讲师，上海大学

精选作品

期刊论文

2026

Ultra-Compact MEMS Pirani Gauge for In Situ Wafer-Level Vacuum Monitoring

Peng Ding, Yongquan Su, Yichen Liu, Yongkang Liu, Shuo Chen, Shinan Wang, Yang Wang, Min Li, Qifeng Qiao, Zhenyu Wu

IEEE Sensors Journal

DOI

2026

Improving Fabrication and Performance of Porous Silicon Electron Emission Devices via Functional Layer Resistivity Modulation

Jinxin Dong, Xiaojing Huyan, Fangzhou Luo, Guanyang Zhang, Qiang Liu, Yang Li, Tianbao Hu, Yongxun Liu, Shinan Wang, Wenjie Yu

Nanomaterials

DOI

2025

Design, fabrication, and characterization of a low-power, high-modulation-depth infrared emitter array

Peng Ding, Yongquan Su, Jiaqi Huang, Yiyi Wang, Yang Wang, Yichen Liu, Shinan Wang, Qifeng Qiao, Zhenyu Wu

International Journal of Optomechatronics

DOI

2024

采用菱形辐条的高对称MEMS蜘蛛网状盘式谐振陀螺仪

许杨，王琮琛，杨军营，陈建霖，王诗男

《微纳电子技术》

2023

A High-Symmetry Cobweb-Like Disk Ring Gyroscope Utilizing Rhomboid Spoke

Yang Xu, Jianlin Chen, Shinan Wang, Nan Wang, Yuandong Alex Gu

DOI

2023

A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy

Shuo Chen, Liuhaodong Feng, Song Guo, Yucheng Ji, Shuwen Zeng, Xinlin Peng, Yang Xu, Tianbao Hu, Zhenyu Wu, Shinan Wang

Sensors

DOI

2022

Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement

Song Guo, Liuhaodong Feng, Shuo Chen, Yucheng Ji, Xinlin Peng, Yang Xu, Yong Yin, Shinan Wang

Sensors

DOI

2022

A micro-thin-film getter–heater unit for high vacuum capsulation of MEMS devices

Yucheng Ji, Liuhaodong Feng, Song Guo, Xinlin Peng, Shuo Chen, Wenbing Li, Shinan Wang

AIP Advances

DOI

研究方向

MEMS先进传感器器件与制造工艺

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