百晓学者学者目录

张立锋

复旦大学

精选作品

期刊论文

2017

Effect of Single Sio2 Layer Incorporation on Electrical Performances of Metal-insulator-metal Capacitors with Al2O3-Hfo2-Al2O3 Dielectrics

Lifeng Zhang, Saisheng Xu

Annual International Conference on Advanced Material Engineering (AME)

DOI

2013

基于高K复合介质的高密度MIM电容研究

张立锋

《复旦大学》

2013

Reactively sputtered HfO2 and Ba(Zr0.2Ti0.8)O3–HfO2 dielectrics for metal–insulator–metal capacitor applications

Lifeng Zhang, Hui Xu, Qiu-Xiang Zhang, Shi‐Jin Ding, David Wei Zhang

Microelectronic Engineering

DOI

2011

Comparison of electrical performances of metal-insulator-metal capacitors with sputtered HfO2 and BZT-HfO2 dielectrics

Lifeng Zhang, Hui Xu, Qiuxiang Zhang, Shi‐Jin Ding, David Wei Zhang

IEEE International Interconnect Technology Conference (IITC)

DOI

研究方向

原子层淀积(ALD)薄膜制备 集成电路MIM电容研究 高K介质研究

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