王旭迪

2026

基于阿伦尼乌斯公式的不同材料放气加速因子研究

《真空科学与技术学报》

DOI

2026

真空环境颗粒检测装置杂散光仿真分析与优化设计方法

《真空科学与技术学报》

2026

真空下陶瓷的摩擦放气现象及机理研究

《真空科学与技术学报》

DOI

2026

基于双矩形密封圈超高真空差分旋转机构设计与实验

《真空科学与技术学报》

DOI

2026

超高真空蒸发制备Pd/Ti吸气薄膜的工艺优化与性能研究

《真空科学与技术学报》

DOI

2026

密闭环境下铝基碳化硅复合材料迟滞释氢特性研究

《真空科学与技术学报》

DOI

2026

真空加速键合界面水逸散机制的研究

《真空科学与技术学报》

DOI

2026

动态吸脱附效应对空间引力波惯性传感器残余气体噪声的影响

《真空科学与技术学报》

DOI

2026

螺杆真空泵抽气性能预测模型与分析方法研究

《真空科学与技术学报》

DOI

2026

G-M制冷机型低温泵智能化上位机软件系统研制

《信息与电脑》

2026

G-M制冷机型低温泵智能化运维平台研究

《信息与电脑》

2026

G-M制冷机型低温泵健康监测及故障诊断研究综述

《机械工程与自动化》

2026

Effects of non-uniform gas distribution on residual gas noise in space-borne gravitational wave detectors

The Physics of Fluids

DOI

2026

A predictive model for hydrogen pressure evolution in NEG-based ultra-high vacuum system

Vacuum

DOI

2026

Design and performance study of a combined titanium-sublimation and ion pump

Vacuum

DOI

2026

Application of equivalent stiffness theory to the corrugated diaphragm design method for diaphragm vacuum pumps

Journal of Vacuum Science & Technology B

DOI

2026

Hybrid CFD‐DSMC Simulation of Ion Transport in Photoionization Mass Spectrometry: From Atmospheric Pressure to High Vacuum

Rapid Communications in Mass Spectrometry

DOI

2025

基于NS-DSMC方法的质谱光电离源仿真研究

《真空科学与技术学报》

DOI

2025

紫外辐照对聚酰亚胺薄膜放气率的影响

《真空科学与技术学报》

DOI

2025

同步辐射弯铁真空紫外光束线气体滤波系统仿真与设计

《真空科学与技术学报》

DOI

2025

Zr-V-Fe吸气剂动态真空维持性能

《真空科学与技术学报》

DOI

2025

基于深度学习算法的G-M制冷机低温泵冷头故障诊断研究

《真空科学与技术学报》

DOI

2025

复杂载荷下的真空腔体结构变形传递特性

《真空科学与技术学报》

DOI

2025

基于再吸附效应的航天器热控系统中狭缝结构气体传输迟滞响应研究

《真空科学与技术学报》

DOI

2025

同步辐射真空紫外光束线气体滤波池差分孔的结构对分子束流和真空度的影响

《真空科学与技术学报》

DOI

2025

基于射流漩涡空化技术的金属阻氢特性研究

《真空科学与技术学报》

DOI

2025

基于热释电原理的低电压无磁离子泵性能研究

《真空与低温》

2025

Investigation on the transport mechanism of gas molecules in porous graphene membranes

Vacuum

DOI

2025

Unleashing the Power of Deep-ultraviolet Light: Innovative Fiber Optic Feedthrough Design for Space Inertial Sensors

Vacuum

DOI

2025

Investigation of the performance optimization of the low-voltage, non-magnetic, pyroelectricity-based ion pump

Journal of Vacuum Science & Technology B

DOI

2025

Review of small-scale or micro sputter ion pumps

Vacuum

DOI

2025

Investigation on the Mechanism of Maximum Efficiency Point for Helium-Based Oscillating Heat Pipe

Journal of Low Temperature Physics

DOI

2025

Research on Material Outgassing Measurement System with an In-Situ Calibration

MAPAN

DOI

2025

Fabrication of soft x-ray windows based on multilayer graphene films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI

2025

Numerical simulation and design of the gas filter system for the Hefei Light Source mass spectrometry beamline

Vacuum

DOI

2025

Study of fluoride-ion-assisted hydroxide catalyzed bonding of MgF2 to fused silica

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI

2025

Modeling of water outgassing from polymers incorporating surface adsorption and desorption

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI

2024

差压法测定NEG吸氢性能

《真空》

2024

引力波探测中惯性传感器的残余气体动力学特性机理研究

《真空科学与技术学报》

2024

玻璃破碎新鲜表面吸气特性及其诱导下快速抽气新方法研究

《真空科学与技术学报》

2024

标准真空电馈通微型磁控管真空计及其性能研究

《真空科学与技术学报》

2024

可拆卸式深紫外光纤真空馈通结构

《真空科学与技术学报》

2024

微型磁控管式离子泵设计及其性能研究

《真空科学与技术学报》

2024

一种基于无转移PMMA和PI的渗透性标准漏孔的氦气渗透性能研究

《真空》

2024

聚变装置真空系统远程泄漏检测方法研究

《真空与低温》

2024

ITER 12号水平诊断窗口碳化硼块状材料应用特性研究

《原子能科学技术》

2024

Investigation on the surface diffusion process of gas molecules in porous graphene membranes

The Physics of Fluids

DOI

2024

Study of nano-scaffold on improving gettering performance of Ti-Zr-V film and the influencing mechanism

Materials Today Communications

DOI

2024

The pumping performance, mechanism and challenges of low voltage and non-magnetic ion pump based on pyroelectric principle

Vacuum

DOI

2024

Numerical analysis of high vacuum packaging efficiency for narrow structured devices

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI

2023

真空计量的量子化研究进展

《真空》

2023

基于氢氧催化键合的石英光学真空腔体低温封装工艺研究

《真空科学与技术学报》

2023

真空高温热解炉多均匀化温度优化设计

《真空科学与技术学报》

2023

低真空管路中颗粒传输特性研究

《真空科学与技术学报》

2023

High-rate deposition of ultra-thick silver film by hollow cathode magnetron sputtering

Vacuum

DOI

2023

A coupled NS-DSMC method applied to supersonic molecular beam and experimental validation

Vacuum

DOI

2023

Fabrication of curved MLA-grating based on 3D printing mold and vacuum-assisted deformation replication process

Microelectronic Engineering

DOI

2023

The measurement of deformation rate of flexible container based on constant conductance element in molecular regime

Flow Measurement and Instrumentation

DOI

2023

Simulation study of effective pumping speed of divertor pumping system for CFETR with COMSOL Multiphysics

Fusion engineering and design

DOI

2023

Development of microfluidic chip flowmeter-based constant pressure system for analysing the hydrogen adsorption performance of non-evaporable getters.

Analytica Chimica Acta

DOI

2023

A modified pump-down model for high vacuum packaging of vacuum insulation sandwiches under readsorption effect

Vacuum

DOI

2023

Modeling of intrinsic photon-stimulated desorption yields under readsorption effect

Vacuum

DOI

2023

Preliminary study of laser-induced breakdown spectroscopy for non-destructive pressure measurement in confined vacuum interlayers

Vacuum

DOI

2023

A permeability membrane-type leak element based on PDMS

Vacuum

DOI

2023

Application of Helium-Based Oscillating Heat Pipes in Cryogenic Superconducting System

Cryogenics (Guildford)

DOI

2023

Investigation on the heat transfer characteristics of flexible vacuum glass based on cross-laminated microcavities

Journal of Vacuum Science & Technology B

DOI

2023

Investigation of the intrinsic outgassing rates for narrow structured vacuum devices under readsorption effect

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI

2022

不同流态下真空管道流导值的数值模拟研究

《真空科学与技术学报》

2022

空心玻璃微珠内部残余气体分析

《真空科学与技术学报》

2022

基于新型固定流导元件的定压法NEG吸气性能测试方法研究

《真空科学与技术学报》

2022

碳纳米管内气体吸附与扩散的分子模拟研究

《真空科学与技术学报》

2022

极小流导分子流真空流导元件研究进展

《真空与低温》

2022

Hybrid microlens array/grating fabrication based on microfluidic system and its application in the enhancement of spectral resolution

Optics & Laser Technology

DOI

2022

PDMS-PUA bi-directional replication technology and its applications.

Applied Optics

DOI

2021

基于石墨烯本征缺陷的新型漏孔组件的制作

《真空科学与技术学报》

DOI

2021

Ag-In共晶键合在硅-铜封接中的应用

《真空科学与技术学报》

DOI

2021

可低温激活的钛锆钒非蒸散型吸气剂薄膜的制备及其性能研究

《真空科学与技术学报》

DOI

2021

基于气体渗透特性的多孔材料尺寸表征方法

《真空科学与技术学报》

DOI

2021

基于分子流传感元件的真空腔体漏率测量方法

《真空科学与技术学报》

DOI

2021

微小封闭空间气体取样过程瞬态模拟

《真空科学与技术学报》

DOI

2021

A method to increase line-density of grating based on PDMS stretching and PUA replication process

Microelectronic Engineering

DOI

2021

New leak element based on transfer-free single-layer graphene membrane

Vacuum

DOI

2021

Nanofluidic chip on tube as standard leak elements

Measurement

DOI

2021

Characterization of the average pore diameter of nanoporous media by gas permeability measurement technique in transitional flow regime

Vacuum

DOI

2021

Simulation and optimization of microlens hot-melting fabricating process based on finite element method

Microelectronic Engineering

DOI

2020

基于玻璃浆料键合的硅基漏孔封接工艺优化研究

《真空科学与技术学报》

DOI

2020

微纳通道型真空漏孔研究进展

《真空与低温》

2020

应用于同步辐射光电离质谱的原位催化高压反应器研制

Journal of University of Science and Technology of China

2020

A newly-developed wide range molecular flow meter based on AAO leak element

DOI

2020

Process simulation of nano-channel forming by thin film deposition

Journal of Physics, Conference Series

DOI

2019

铟封接和硅硅键合技术制作微通道型固定流导元件

《真空科学与技术学报》

DOI

2019

空间站舱外泄漏羽流场数值模拟与解析解研究

《真空科学与技术学报》

DOI

2019

流导可控的AAO分子流漏孔的制作与动态测试

《真空科学与技术学报》

DOI

2019

空间站舱外泄漏羽流场数值模拟

《航天器环境工程》

2019

基于动态差压法的分子流流导测量

《真空与低温》

2019

Fabrication of the nanofluidic channels type leak assembly based on the glass frit sealing method

Journal of Vacuum Science & Technology B

DOI

2019

Volume measurement based on dynamic differential pressure decay using AAO leak element

Vacuum

DOI

2018

基于动态差压衰减方法瞬时流量测量装置的研制

《真空》

2018

New leak element using 1D nanofluidic channels and indium sealing

Vacuum

DOI

2017

微压差装置整体漏率测试方法研究

《真空》

2017

升压法漏率测量装置的研制

《真空》

2017

Fabrication of conductance-controllable standard leak elements on anodic aluminum oxide using a selective coating method

DOI

2017

Fabrication of self-enclosed nanochannels based on capillary-pressure balance mechanism

DOI

2016

基于紫外固化胶/PMMA双层胶转印技术的微纳结构制作

《真空》

2016

紫外固化浇铸法制作PUA蛾眼结构

《真空》

2016

100nm周期蛾眼结构制备及其表面拉曼增强性能

《真空科学与技术学报》

2016

New leak assembly based on fluidic nanochannels

DOI

2016

New leak element using anodic aluminum oxide

DOI

2015

三种聚合物薄膜氦渗透率的测试

《真空》

2015

一种自封装技术制备PMMA微流控通道方法研究

《真空》

2015

Helium gas permeability measurements of polymeric membranes using the difference method

DOI

2015

Nanopatterning using a simple bilayer lift-off process by transfer printing based on poly(dimethylsiloxane) templates

DOI

2014

聚碳酸酯基片超疏水表面的制备与表征

《真空科学与技术学报》

2014

基于SU-8/PMMA双层胶技术的硅点阵结构制作

《真空》

2014

纳米银墨水的液桥转印技术研究

《真空》

2014

Fabrication and Characterization of Super-Hydrophobic Surfaces of Polycarbonate Slab

2014

Fabrication of size controllable SU-8 nanochannels using nanoimprint lithography and low-pressure thermal bonding methods

DOI

2014

Luminescent nanoparticles as temperature probes in complex microsystems

2013

低压压印制备硅点阵结构的工艺研究

《真空》

2013

基于PDMS微结构模板转印技术的研究

《真空科学与技术学报》

2013

逆向热键合技术制作SU-8胶纳流控通道

《真空科学与技术学报》

2013

Fabrication of high density silicon nanodot array based on soft imprinting theory

Vacuum

2012

卷对卷纳米压印脱模过程的有限元模拟

《真空》

2012

Flexible subwavelength gratings fabricated by reversal soft UV nanoimprint

DOI

2012

Aligned ultralong nanowire arrays and their application in flexible photodetector devices

DOI

2012

Method for preparing micro-nano-channels based on liquid-gas equilibrium polymer nano-channels self-building mechanism

2012

Silver lines electrode patterned by transfer printing

DOI

2012

Fabrication of size-controllable nanofluidic channels using angled physical vapor deposition

DOI

2012

Multiple centimetre-long fluidic-channels with smooth and vertical sidewall fabricated by novel NIL mould and thermal bonding

DOI

2012

Nano/microchannel fabrication based on SU-8 using sacrificial resist etching method

DOI

2011

ITER水平诊断窗口插件结构分析及优化

《真空》

2011

Low-pressure thermal bonding

DOI

2011

Method for preparing micro-nanometer fluid system through compound developing of positive and negative photoresists

2011

Polymeric nanostructures fabricated by dynamic nanoinscribing technique and its applications

Applied Optics and Photonics China

DOI

2010

Soft substrate as a sacrificial layer for fabrication free-standing SU-8-based nanofluidic system

International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)

DOI

2010

Method for manufacturing micro-nano fluid control system by using low-pressure bonding technology

2010

Poly (ethylene terephthalate) (PET) micro/nanostructures fabricated by nanoimprint and its applications

International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)

DOI

2010

Surface modification on a silicon carbide mirror for space application

DOI

2010

Fabrication of micro/nano fluidic system combining hybrid mask-mould lithography with thermal bonding

DOI

2010

Manufacturing method of SU-8 nano fluid system

2010

Method for making self-supporting structure of nano fluid system based on SU-8 photoresist

2009

反应磁控溅射沉积SiOx薄膜制备镶嵌在二氧化硅介质中纳米晶硅不可行性研究

《真空科学与技术学报》

2009

Fabrication of enclosed nanofluidic channels by UV cured imprinting and optimized thermal bonding of SU-8 photoresist

DOI

2008

低能宽束离子源的研究进展

《真空》

2008

直流反应磁控溅射法制备VO2薄膜

《真空科学与技术学报》

2008

低能离子束表面改性对聚碳酸酯(PC)润湿性能的影响

《真空科学与技术学报》

2008

Fabrication of nanoimprint template in Si with high etch rate by non-switch DRIE process

DOI

2008

Experimental study of roof filling rate during thermal bonding of polymer microchannel sealing

International Conference on Optical Instruments and Technology

DOI

2008

High aspect ratio grating fabrication in SU-8 resist by UV-Curing nanoimprint

International Conference on Optical Instruments and Technology

DOI

2008

Free-standing SU-8 subwavelength gratings fabricated by UV curing imprint

DOI

2007

Free-standing SU-8 gratings fabricated by sacrificial layer-assisted UV curing imprint

SPIE/COS Photonics Asia

DOI

2007

Fabrication of CoFe nanostructures by holographic lithography

SPIE/COS Photonics Asia

DOI

2007

Fabrication of Micromirror-based Magnetic Sensor

DOI

2007

Rapid nanofabrication with high density pattern with UVN30 chemically amplified resist

International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)

DOI

2007

Fabrication of ferromagnetic nanoconstrictions by electron beam lithography using LOR/PMMA bilayer technique

DOI

2007

High sensitive magnetically actuated micromirrors for magnetic field measurement

DOI

2007

High density patterns fabricated in SU-8 by UV curing nanoimprint

DOI

2006

Reactive ion beam etching of HfO2 film and removal of sidewall redeposition

DOI

2006

Nano metamaterials and photonic gratings by nanoimprint and hot embossing

2006 International Symposium on Biophotonics, Nanophotonics and Metamaterials

DOI

2005

VO2的MIT特性及应用机理

《红外》

2005

用于超宽焦斑光束整形的大口径衍射光学元件设计和制作

《量子电子学报》

2005

CF4/CHF3反应刻蚀石英和BK7玻璃

《真空》

2005

DC反应磁控溅射制备VO2薄膜及XPS分析

《合肥工业大学学报(自然科学版)》

2005

MIT Properties and Application Mechanism of VO_2

Infrared

2005

Reactive ion beam etching of HfO2 film using Ar/CHF3 gas chemistries

SPIE/COS Photonics Asia

DOI

2005

Preparation of VO_2 thin films by reactive DC magnetron sputtering and analysis by XPS

Journal of Hefei University of Technology

2005

Reactive ion etching on quartz and BK7 glass with CF_4/CHF_3

2004

HfO2薄膜的反应离子刻蚀特性研究

《真空科学与技术学报》

2004

HfO2薄膜的离子束刻蚀特性研究

《光学精密工程》

2004

深高宽比微结构的干法刻蚀

《真空》

2004

石英和BK7玻璃的离子束刻蚀特性研究

《真空科学与技术学报》

2004

N2、Ar气体对磁控溅射沉积掩膜铬膜性能的影响

《真空》

2004

反应离子束刻蚀应用于光刻胶灰化技术研究

《微细加工技术》

2004

Reactive Ion Beam Etching Applied to Photoresist Ashing

2004

Ion beam etching of HfO_2 film

2003

软刻蚀技术及其应用

《真空》

2002

罗茨泵径向间隙泄漏量的研究与建模

《流体机械》

2001

涡旋真空泵型线设计

《合肥工业大学学报(自然科学版)》

2001

On the curve design of the dry scroll vacuum pump

1999

涡旋式真空泵

《真空与低温》

2025

复杂超高真空系统维持与测试技术

《第十七届国际真空科学与工程应用学术会议摘要集》

DOI

2023

面向国家重大需求的前沿真空技术

《中国真空学会2023学术年会论文集》

DOI

2020

极小气体流量精确控制、测量与应用

《第四届粤港澳大湾区真空科技创新发展论坛暨2020年广东省真空学会学术年会》

DOI

2019

基于微纳制造技术的新型真空漏孔及其应用

《第十四届国际真空科学与工程应用学术会议论文（摘要）集》

DOI

2012

基于PET表面超疏水结构的制备与表征

《中国真空学会2012学术年会》

2010

Welding Quality Analysis of Electron Beam Processing for a Diagnostic Equatorial Port Plug of ITER Tokomak

Abstracts of the 18th International of Vacuum Congress

2006

利用UVN-30光刻胶制作高线密度纳米压印模板

《中国真空学会2006年学术会议论文摘要集》

2006

氧化铪光栅离子束刻蚀方法研究

《中国光学学会2006年学术大会》

2006

影响反应磁控溅射制备VO 2 薄膜的各种因素

《中国真空学会2006年学术会议》

2005

影响反应磁控溅射法制备VO 2 薄膜的各种因素

《TFC'05全国薄膜技术学术研讨会论文摘要集》

2004

Closed Draft无栅网离子源及其应用

《中国真空学会第六届全国会员代表大会暨学术会议论文摘要集》

2004

ZrO 2 /SiO 2 非规整倍频增透膜系设计、制备及其光学特性的研究

《中国真空学会第六届全国会员代表大会暨学术会议论文摘要集》

2004

Cr/Cr2O3膜系的微结构研究

《中国真空学会第六届全国会员代表大会暨学术会议论文摘要集》

2000

涡旋真空泵型线设计理论

《华东三省一市第三届真空学术交流会》

2000

涡旋真空泵的工作过程模拟

《华东三省一市第三届真空学术交流会》

2026

An adaptive symmetrized generalized Bernoulli trial collision scheme based on a target acceptance probability for direct simulation Monte Carlo

SSRN Electronic Journal

DOI

2026

Effects of Ni and Au/Ni coatings on the hydrogen outgassing kinetics of Al-based silicon carbide composites

SSRN Electronic Journal

DOI

2023

Effect of surface diffusion on rapid gas transport in carbon nanotubes

Research Square

DOI