百晓学者学者目录

孙成亮

副研究员、助理研究员、博导、教授、研究员,武汉大学

精选作品

期刊论文

2026

Broadband MEMS piezoelectric speaker arrays enabled by resonance-phase mechanism-guided fixed out-of-phase driving of dual-resonance units

Xiao-Ming Huang, Hai-Yang Li, Qin-Wen Xu, Jia-Qi Ding, Yuan-Hang Qu, Min Wei, Xiang Chen, Yao Cai, Yan Liu, Chengliang Sun, Shi-Shang Guo

Sensors and Actuators A-Physical

2026

Miniaturized ScAlN Bimorph MEMS Microphone With Windmill Structure Achieving 61.2 dB SNR

Chaoxiang Yang, Wenjuan Liu, Yaxin Wang, Liangyu Lu, Bohao Hu, Yan Liu, Yao Cai, Shi-Shang Guo, Guo-Qiang Wu, Chengliang Sun

IEEE Electron Device Letters

2026

Enhancing film bulk acoustic resonators performance by optimizing AlN seed layer crystallinity and polarity alignment

Ting-Ting Yang, Qin-Wen Xu, Yaxin Wang, Yao Cai, Hai-Yang Li, Yupeng Zheng, Min Zeng, Jingyi Qu, Lei Li, Chao Gao, Xiyu Gu, Binghui Lin, Shi-Shang Guo, Cheng Lei, Sheng Liu, Chengliang Sun

Nature Communications

2026

High-Coupling Thickness-Shear Mode Solidly Mounted Resonator Using Y-cut LiNbO3 Thin Film via Transfer Bonding

Ronghui Wang, Min Zeng, Wenjuan Liu, Zhiwei Wen, Yao Cai, Shi-Shang Guo, Guo-Qiang Wu, Chengliang Sun

Journal of microelectromechanical systems

2026

A Wideband Lumped-Element Hybrid Coupler Using T-type Network

Zi-Yue Song, Zihang Chang, Zhiwei Wen, Guo-Qiang Wu, Chengliang Sun, Wenjuan Liu

IEEE International Conference on Nano/Micro Engineered and Molecular Systems

2026

Temperature-Decoupled Multimodal Surface Acoustic Wave Strain Sensors Using Z-Cut Lithium Niobate on Insulator Substrate

Yuan-Hang Qu, Zhiwei Wen, Yan Liu, Sheng-Xiang Wang, Xiang Chen, Jia-Qi Ding, Xiyu Gu, Yao Cai, Guo-Qiang Wu, Chengliang Sun

IEEE Transactions on Electron Devices

2026

Boosting Performance ε-Ga2O3 SAW Resonators With Mo Interlayer: Optimized Electric Field and Enhanced FOM

Jia-Qi Ding, Yao Cai, Yan Liu, Zhu-Cheng Li, Li Zhang, Yuan-Hang Qu, Xiao-Ming Huang, Xiang Chen, Sheng-Xiang Wang, Xiaodong Zhang, Chengliang Sun, Shi-Shang Guo

IEEE Microwave and Wireless Technology Letters

2026

Monolithic Integration of Sensing, Memory, and Processing in ScAlN Ferroelectric Optoelectronic Transistors for Multimodal Fusion.

Chen-Xi Hu, Qin-Wen Xu, Bing-Qian Xu, Yao Cai, Ze-Kai Wang, Xiao-Hui Li, Yu-Qi Ren, Hai-Yang Li, Ting-Ting Yang, Xiang Chen, Tu Zhao, Jian-Ping Shi, Chengliang Sun, Rui-Qing Cheng, Shi-Shang Guo

ACS Applied Materials and Interfaces

2026

Exploring the synergic effect of thermal tuning and mode-coupling for frequency stabilization in micromechanical resonators

Yu-Hao Xiao, Chengliang Sun, Sheng Liu, Guo-Qiang Wu

Microsystems & Nanoengineering

2026

Giant Flexoelectric Effect in MoS2 for High‐Performance Photodetectors and Reconfigurable Logic Computing

Yu-Qi Ren, Qin-Wen Xu, Chen-Xi Hu, Bing-Qian Xu, Binghui Lin, Hai-Yang Li, Yao Cai, Chengliang Sun

Advanced Optical Materials

2026

Analysis of Bias-Dependent Piezoelectric Coefficient and Linearity on SPL and THD in PZT Thin-Film MEMS Speaker

Xiaoming Huang, Haiyang Li, Qinwen Xu, Xiang Chen, Jiaqi Ding, Wei Ming, Yao Cai, Chengliang Sun, Shishang Guo

IEEE Sensors Journal

2026

Bandwidth Enhancement and SPL Flattening in MEMS Piezoelectric Speaker Array via Stiffness-Modulated Triangular Diaphragm Design

Xiaoming Huang, Haiyang Li, Qinwen Xu, Jiaqi Ding, Yuanhang Qu, Yao Cai, Yan Liu, Chengliang Sun, Shishang Guo

Journal of Microelectromechanical Systems

2026

Wafer-Level Thin-Film Packaging for 2.4 GHz Film Bulk Acoustic Resonator Filters

Xiang Chen, Yao Cai, Haiyang Li, Chengliang Sun

International Conference on Electronic Packaging Technology (ICEPT)

2026

Sub-6 GHz acoustic filters using laterally-excited bulk acoustic resonator with scattering vias in double-layer electrodes

Zhiwei Wen, Wenjuan Liu, Min Zeng, Jieyu Liu, Yuanhang Qu, Rong Wang, Ye Liu, Yao Cai, Chengliang Sun

Microsystems & Nanoengineering

2025

An H-Shaped Piezoelectric MEMS Dual-Axis Accelerometer

Lei Liu, Zesheng Liu, Cheng-Xiao Mo, Xiao-Ming Huang, Min Wei, Yuan-Hang Qu, Xiyu Gu, Yan Liu, Sheng-Xiang Wang, Chengliang Sun

IEEE Sensors Journal

2025

Sc₀.₁Al₀.₉N-Based Bimorph Piezoelectric MEMS Microphones With Tractive Structures

Chaoxiang Yang, Wenjuan Liu, Yaxin Wang, Bohao Hu, Liangyu Lu, Yan Liu, Yao Cai, Shi-Shang Guo, Chengliang Sun

IEEE Transactions on Electron Devices

2025

A Robust Thin-Film Encapsulation for RF-MEMS With Aluminum Nitride/Molybdenum Cap

Xiang Chen, Yan Liu, Xiyu Gu, Sheng-Xiang Wang, Jia-Qi Ding, Min Zeng, Cheam Daw Don, Yao Cai, Shi-Shang Guo, Chengliang Sun

IEEE Sensors Journal

2025

Al–Cu wafer-level bonding microscopic mechanism and its strength study

Yu-Qi Ren, Yaxin Wang, Binghui Lin, Hai-Yang Li, Ze-Kai Wang, Bing-Qian Xu, Qin-Wen Xu, Yupeng Zheng, Zi-Jun Qi, Wei Shen, Yan Liu, Yao Cai, Chengliang Sun

Japanese Journal of Applied Physics

2025

Design and fabrication of AlN thin film based bulk acoustic wave filters targeting the 2.3 GHz frequency band

Xinyang Ma, Qin-Wen Xu, Yi Cai, Yaxin Wang, Binghui Lin, Chao Gao, Yu-Qi Ren, Yupeng Zheng, Yao Cai, Chengliang Sun

Physica Scripta

2025

High-Sensitivity Solidly Mounted Resonator Load Sensor Based on AlN/AlScN Heterostructure

Wanqing Zuo, Xiyu Gu, Ting-Ting Yang, Qin-Wen Xu, Hai-Yang Li, Yao Cai, Chengliang Sun

Italian National Conference on Sensors

2025

Theoretical analysis and experiment of cantilever-based surface acoustic wave flowmeter

Zesheng Liu, Yan Liu, Xiyu Gu, Sheng-Xiang Wang, Xiao-Ming Huang, Wei Min, Xin Tong, Yuan-Hang Qu, Hai-Yang Li, Yao Cai, Chengliang Sun

Physica Scripta

2025

Impact of low-temperature AlN interlayer on quality and residual stress of AlN films deposited by MOCVD on Si (111) substrate

Yaxin Wang, Binghui Lin, Yu-Qi Ren, Ting-Ting Yang, Chaoxiang Yang, Yao Cai, Chengliang Sun

Applied Physics A

2025

Sc0.2Al0.8N Lamb wave filter with a high temperature stability using the strategy of double-layer SiO2 and groove structure

Hai-Yang Li, Qin-Wen Xu, Binghui Lin, Xiang Chen, Jie Zhou, Ting-Ting Yang, Zesheng Liu, Yan Liu, Shi-Shang Guo, Yao Cai, Chengliang Sun

Applied Physics Letters

2025

A 6-GHz XBAR Filter Using Trapezoidal Electrodes Based on LiNbO3 Thin Films

Min Zeng, Wenjuan Liu, Zhiwei Wen, Ronghui Wang, Yao Cai, Yan Liu, Shi-Shang Guo, Chengliang Sun

IEEE Microwave and Wireless Technology Letters

2025

Al0.8Sc0.2N film-based BAW filters using transfer process for Wi-Fi6 applications

Yaxin Wang, Ting-Ting Yang, Chao Gao, Chaoxiang Yang, Binghui Lin, Yan Liu, Yao Cai, Chengliang Sun

Journal of Applied Physics

2025

CMOS‐Compatible ScAlN Ferroelectric Thin Films with Enhanced Polarization for High‐Performance FeFET Memory and Artificial Synapses

Bing-Qian Xu, Yao Cai, Ze-Kai Wang, Qin-Wen Xu, Yu-Qi Ren, Xiang Chen, Chen-Xi Hu, Xiao-Hui Li, Jian-Ping Shi, Chengliang Sun, Shi-Shang Guo

Small Methods

2025

Mechanistic investigation of annealing-induced power capacity enhancement in aluminum nitride bulk acoustic wave resonators

Yu-Qi Ren, Chao Gao, Hai-Yang Li, Xiang Chen, Yupeng Zheng, Yan Liu, Qin-Wen Xu, Yao Cai, Chengliang Sun

Physica Scripta

2025

Parallel Cross-sectional Lamé Mode Rod Resonator with high effective electromechanical coupling coefficient and temperature stability

Hai-Yang Li, Jie Zhou, Qin-Wen Xu, Binghui Lin, Ting-Ting Yang, Zesheng Liu, Yupeng Zheng, Xiao-Ming Huang, Yan Liu, Shi-Shang Guo, Yao Cai, Chengliang Sun

Physica Scripta

2025

Structural, anisotropic elasticity, and thermal properties of Ga2O3 polymorphs: A first-principles study

Jia-Qi Ding, Yan Liu, Sheng-Xiang Wang, Xiao-Ming Huang, Yuan-Hang Qu, Xiang Chen, Yao Cai, Chengliang Sun, Shi-Shang Guo

Computational Condensed Matter

2025

Investigation of Polarity Reversal of Bilayer AlN/Sc0.2Al0.8N Films and Its Influence on Film Bulk Acoustic Resonators

Yupeng Zheng, Ting-Ting Yang, Binghui Lin, Xiao-Ming Huang, Qin-Wen Xu, Yu-Qi Ren, Yaxin Wang, Hai-Yang Li, Shi-Shang Guo, Yao Cai, Chengliang Sun

Small Methods

2025

Enhancement of Quality Factors in a 6.5 GHz Resonator Using Mo/SiC Composite Microstructures

Binghui Lin, Yupeng Zheng, Hai-Yang Li, Yu-Qi Ren, Ting-Ting Yang, Ze-Kai Wang, Yao Cai, Qin-Wen Xu, Chengliang Sun

Micromachines

2025

Laterally Excited Bulk Acoustic Resonators With Grooves Between Interdigital Electrodes

Zhiwei Wen, Wenjuan Liu, Xin Tong, Sijie Yang, Ronghui Wang, Yuan-Hang Qu, Yan Liu, Yao Cai, Shi-Shang Guo, Chengliang Sun

IEEE Microwave and Wireless Technology Letters

2025

Novel AlN/ScAlN composite film SAW for achieving highly sensitive temperature sensors

Yuan-Hang Qu, Xiang Chen, Yan Liu, Sheng-Xiang Wang, Xiyu Gu, Min Wei, Xiao-Ming Huang, Zesheng Liu, Jia-Qi Ding, Zhiwei Wen, Yao Cai, Shi-Shang Guo, Chengliang Sun

Sensors and Actuators A-Physical

2025

Lithium niobate-based laterally excited bulk acoustic resonator with wave-shaped electrodes and its filter

Min Zeng, Wenjuan Liu, Zhiwei Wen, T. Luo, Yao Cai, Shi-Shang Guo, Chengliang Sun

Applied Physics Letters

2025

Gigahertz vibration measurement and analysis of FBARs with square and pentagon electrodes

Jia-Qi Ding, Yan Liu, Zhaoliang Peng, Lei Shao, Yuan-Hang Qu, Xiao-Ming Huang, Xiang Chen, Yao Cai, Chengliang Sun, Shi-Shang Guo

2025

Advanced AlN-based bulk acoustic wave filters on trap-rich/Si substrate

Yuan-Hang Qu, Yan Liu, Sheng-Xiang Wang, Yang Zou, Shi-Shang Guo, Chengliang Sun

Physica Scripta

2025

High-order symmetric mode of aluminum nitride-based Lamb wave resonator realizing high-sensitivity strain sensing

Xiang Chen, Yuan-Hang Qu, Yan Liu, Jia-Qi Ding, Xiao-Ming Huang, Liangyu Lu, Hai-Yang Li, Shi-Shang Guo, Yao Cai, Chengliang Sun

Applied Physics Letters

2025

Surface Acoustic Wave Resonator With Epitaxial ε-Ga2O3 Thin Films: Performance Characteristics and Temperature Sensor Potential

Jia-Qi Ding, Yan Liu, Sheng-Xiang Wang, Li Zhang, Yuan-Hang Qu, Xiyu Gu, Xiao-Ming Huang, Xiang Chen, Yao Cai, Xiaodong Zhang, Shi-Shang Guo, Chengliang Sun

IEEE Microwave and Wireless Technology Letters

2025

Design and Performance Analysis of a Multigrooved Cantilever-Type Piezoelectric Accelerometer

Xiao-Ming Huang, Xiyu Gu, Chaoxiang Yang, Jia-Qi Ding, Xiang Chen, Yuan-Hang Qu, Yao Cai, Yan Liu, Chengliang Sun, Shi-Shang Guo

IEEE Sensors Journal

2025

Laterally Excited Bulk Acoustic Wave Resonators with Rotated Electrodes Using X-Cut LiNbO3 Thin-Film Substrates

Jieyu Liu, Wenjuan Liu, Zhiwei Wen, Min Zeng, Yao Cai, Chengliang Sun

Italian National Conference on Sensors

2025

High-Sensitivity AlN-Based Surface Acoustic Wave Strain Sensor with Strain–Temperature Decoupling Method

Yuan-Hang Qu, Xiang Chen, Yan Liu, Sheng-Xiang Wang, Zhiwei Wen, Jia-Qi Ding, Xiyu Gu, Yao Cai, Guo-Qiang Wu, Chengliang Sun

Sensors and Actuators A: Physical

2025

Enhanced acoustic bandwidth and sound pressure level flatness in MEMS piezoelectric speakers via dual-resonance shape-tuned diaphragm design

Xiaoming Huang, Qinwen Xu, Jiaqi Ding, Yuanhang Qu, Min Wei, Xiang Chen, Haiyang Li, Yao Cai, Yan Liu, Chengliang Sun, Shishang Guo

Sensors and Actuators A Physical

2024

Ultrahigh electromechanical response from competing ferroic orders

Bai-Chen Lin, K. P. Ong, Tiannan Yang, Qibin Zeng, Hui Kim Hui, Zhen Ye, Celine Sim, Zhihao Yen, Ping Yang, Yan-Xin Dou, Xiao-Long Li, Xing-Yu Gao, Chee Kiang Ivan Tan, Z. Lim, Sheng-Wei Zeng, T. Luo, Jinlong Xu, Xin Tong, Patrick Wen Feng Li, Min-Qin Ren, Kaiyang Zeng, Chengliang Sun, S. Ramakrishna, M. Breese, Chris Boothroyd, Cheng-Kuo Lee, David J. Singh, Yeng-Ming Lam, Hua-Jun Liu

Nature

2024

SC0.096Al0.904N-based Bimorph Piezoelectric Micro Machined Ultrasonic Transducers

Ziye Zhai, Wenjuan Liu, Chengliang Sun

IEEE International Conference on Solid-State and Integrated Circuit Technology

2024

A Sc0.096Al0.904N-Based Bimorph Piezoelectric MEMS Microphone Using 3 × 3 Circular Diaphragms

Bohao Hu, Wenjuan Liu, Yan Liu, Chaoxiang Yang, Ze-Kai Wang, Liangyu Lu, Yao Cai, Shi-Shang Guo, Chengliang Sun

IEEE Transactions on Electron Devices

2024

A piezoelectric MEMS microphone with proof mass and its array

Liangyu Lu, Wenjuan Liu, Bohao Hu, Chaoxiang Yang, Ze-Kai Wang, Yan Liu, Yao Cai, Jian Wang, Shi-Shang Guo, Chengliang Sun

Sensors and Actuators A-Physical

2024

MEMS Oscillators‐Network‐Based Ising Machine with Grouping Method

Yi Deng, Yi Zhang, Xin-Yuan Zhang, Yang Jiang, Xi Chen, Yan-Song Yang, Xin Tong, Yao Cai, Wenjuan Liu, Chengliang Sun, Da-Shan Shang, Qing Wang, Hongyu Yu, Zhong-Rui Wang

Advancement of science

2024

A Laterally Excited Bulk Acoustic Wave Resonator Based on LiNbO3 with Arc-Shaped Electrodes

Jieyu Liu, Wenjuan Liu, Zhiwei Wen, Min Zeng, Chengliang Sun

Micromachines

2024

A High Q Lamb Wave Resonator with Dummy Toes Based on 20% ScAlN Film

Sijie Yang, Wenjuan Liu, Zhiwei Wen, Yao Cai, Yan Liu, Chengliang Sun

Journal of Physics, Conference Series

2024

High Figure of Merit 4.5 GHz Solidly Mounted Resonator Fabricated Using High-Quality Al₀.₈Sc₀.₂N Films

Ze-Kai Wang, Yao Cai, Ting-Ting Yang, Binghui Lin, Yaxin Wang, Yu-Qi Ren, Yupeng Zheng, Shi-Zhao Wang, Yan Liu, Chengliang Sun

IEEE Electron Device Letters

2024

Design and Fabrication of 3.5 GHz Band-Pass Film Bulk Acoustic Resonator Filter

Yu Zhou, Yupeng Zheng, Qin-Wen Xu, Yuan-Hang Qu, Yu-Qi Ren, Xiao-Ming Huang, Chao Gao, Yan Liu, Shi-Shang Guo, Yao Cai, Chengliang Sun

Micromachines

2024

Analysis of Heterostructure Formation of Abnormally Oriented Grains in Sputter-Deposited AlScN Films and Its Impact on Bulk Acoustic Wave Devices.

Xiyu Gu, Yan Liu, Xiao-Ming Huang, Jia-Qi Ding, Yuan-Hang Qu, Zesheng Liu, Yao Cai, Wenjuan Liu, Shi-Shang Guo, Chengliang Sun

ACS Applied Materials and Interfaces

2024

Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator

Xiyu Gu, Yan Liu, Yuan-Hang Qu, Xiang Chen, Zesheng Liu, Yao Cai, Wenjuan Liu, Shi-Shang Guo, Chengliang Sun

Microsystems & Nanoengineering

2024

Effects of interlayer SiO2 or Au on the performances of LNOS-SAW

Binghui Lin, Chao Gao, Yaxin Wang, Yang Zou, Yan Liu, Wenjuan Liu, Yao Cai, Chengliang Sun

Journal of Physics, Conference Series

2024

A near spurious-free 6 GHz laterally-excited bulk acoustic resonator with single-sided wavy electrodes

Sijie Yang, Wenjuan Liu, Zhiwei Wen, Ying Xie, Xin Tong, Yan Liu, Yao Cai, Shi-Shang Guo, Chengliang Sun

Journal of Physics D: Applied Physics

2024

Electronic transport and optical properties of five different phases (α, β, ε, δ and γ) of Ga2O3: A first-principles study

Jia-Qi Ding, Yan Liu, Xiyu Gu, Li Zhang, Xiaodong Zhang, Xiang Chen, Wenjuan Liu, Yao Cai, Shi-Shang Guo, Chengliang Sun

Physica. B, Condensed matter

2024

Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz–3.2 GHz S-Band

Chao Gao, Yupeng Zheng, Hai-Yang Li, Yu-Qi Ren, Xiyu Gu, Xiao-Ming Huang, Yaxin Wang, Yuan-Hang Qu, Yan Liu, Yao Cai, Chengliang Sun

Italian National Conference on Sensors

2024

A cancer cell nanotherapy method based on GHz film bulk acoustic resonator and nanoscale CaO2

Zhichao Liu, Yu-Lun Nie, Shuo Wang, Chengliang Sun, Yao Cai, Sheng Liu

Journal of Biomaterials Applications

2024

High figure-of-merit A1-mode lamb wave resonators operating around 6 GHz based on the LiNbO3 thin film

Xin Tong, Wenjuan Liu, Zhiwei Wen, Zesheng Liu, Qin-Wen Xu, Yang Zou, Chao Gao, Jie Zhou, Yan Liu, Yao Cai, Chengliang Sun

Journal of Physics D: Applied Physics

2024

Transverse Resonance Suppression of AlN-based Surface Acoustic Wave Resonators using Trench Structure

Yuan-Hang Qu, Xiyu Gu, Xiang Chen, Min Wei, Zesheng Liu, Jia-Qi Ding, Yan Liu, Chengliang Sun

2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

2024

Conformable Shear Mode Transducers from Lead‐Free Piezoelectric Ceramic Coatings: An Innovative Ultrasonic Solution for Submerged Structural Health Monitoring

Jie Yin, Voon‐Kean Wong, Qin-Wen Xu, Percis Teena Christopher Subhodayam, Yasmin Mohamed Yousry, A. Shashidhara, Jie Zhou, Ping Luo, Poh-Chong Lim, Fengxia Wei, David Boon Kiang Lim, Chengliang Sun, Kui Yao

Advanced Functional Materials

2024

6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes

Xin Tong, Yang Zou, Zhiwei Wen, Zesheng Liu, T. Luo, Jie Zhou, Hua-Jun Liu, Yu-Qi Ren, Qin-Wen Xu, Wenjuan Liu, Yan Liu, Yao Cai, Chengliang Sun

Microsystems & Nanoengineering

2024

Advanced technologies of FBAR for tuning effective electromechanical coupling coefficient

Yuan-Hang Qu, Yan Liu, Xiyu Gu, Min Wei, Xiang Chen, Xiao-Ming Huang, Zesheng Liu, Jia-Qi Ding, Zhiwei Wen, Yao Cai, Wenjuan Liu, Shi-Shang Guo, Chengliang Sun

Applied Physics Letters

2024

Ferroelectric‐Controllable Optoelectronic Performance in 2D‐Metallic SnSe/Sc0.25Al0.75N Heterostructure

Bing-Qian Xu, Ruo-Fan Du, Ze-Kai Wang, Xiao-Hui Li, Qin-Wen Xu, Yu-Qi Ren, Chen-Xi Hu, Lu-Ying Song, Xiang Chen, Yanan Peng, Yan Liu, Jian-Ping Shi, Chengliang Sun, Yao Cai, Shi-Shang Guo

Advanced Optical Materials

2024

Analysis and Guideline for Determining Piezoelectric Coefficient for Films With Substrate Constraint

Qin-Wen Xu, Jie Zhou, Shashidhara Acharya, Jian-Wei Chai, Mingsheng Zhang, Chengliang Sun, Kui Yao

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

2024

5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications

Ting-Ting Yang, Chao Gao, Yaxin Wang, Binghui Lin, Yupeng Zheng, Yan Liu, Cheng Lei, Chengliang Sun, Yao Cai

Microsystems & Nanoengineering

2024

Low temperature coefficient of frequency AlN Lamb wave resonator using groove structure between interdigital transducers

Hai-Yang Li, Jie Zhou, Qin-Wen Xu, Zesheng Liu, Yu-Qi Ren, Yan Liu, Shi-Shang Guo, Yao Cai, Chengliang Sun

Journal of Applied Physics

2024

High-Q film bulk acoustic resonator with high quality AlN film based on transfer method

Yaxin Wang, Chao Gao, Chaoxiang Yang, Ting-Ting Yang, Yan Liu, Ye Ma, Xiao-min Ren, Yao Cai, Chengliang Sun

Physica Scripta

2024

The effect of busbar structure on Q factor enhancement and spurious mode suppression in Lamb wave resonators

Qin-Wen Xu, Yang Zou, Chao Gao, Xiang Chen, Jie Zhou, Xin Tong, Yan Liu, Shi-Shang Guo, Yao Cai, Chengliang Sun

Applied Physics Letters

2024

Adjustable effective electromechanical coupling of Lamb wave resonator using AlN/Sc0.096Al0.904N composite films

Xiang Chen, Yan Liu, Yuan-Hang Qu, T. Luo, Xiyu Gu, Jia-Qi Ding, Xiao-Ming Huang, Yao Cai, Wenjuan Liu, Shi-Shang Guo, Chengliang Sun

Japanese Journal of Applied Physics

2024

AlN/ScAlN composite films-based spurious free A1 mode lamb wave resonator with adjustable effective electromechanical coupling coefficient

Zesheng Liu, Yan Liu, Xiang Chen, Ying Xie, Yuan-Hang Qu, Xiyu Gu, Xin Tong, Hai-Yang Li, Wenjuan Liu, Yao Cai, Shi-Shang Guo, Chengliang Sun

Journal of Physics D: Applied Physics

2024

Analysis of lattice deformation originated from residual stress on performance of aluminum nitride-based bulk acoustic wave resonators

Xiyu Gu, Yan Liu, Yuan-Hang Qu, Min Wei, Xiang Chen, Yaxin Wang, Wenjuan Liu, Ben-Song Pi, Bo Woon Soon, Yao Cai, Shi-Shang Guo, Chengliang Sun

Composite structures

2024

A Lamb Wave Resonator with Trapezoidal Interdigitated Electrodes

Xiang Chen, Yuan-Hang Qu, T. Luo, Xiyu Gu, Xiao-Ming Huang, Yao Cai, Shi-Shang Guo, Yan Liu, Chengliang Sun

2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM)

2024

Suppression of spurious modes in lateral-excited bulk acoustic wave resonators using piston mode electrodes

Jieyu Liu, Wenjuan Liu, Zhiwei Wen, Xin Tong, Yan Liu, Yao Cai, Chengliang Sun

Applied Physics Letters

2024

A High Power-handling Laterally-excited Bulk Acoustic Resonator with Scattering Vias in Double-layer Electrodes over +35 dBm

Zhiwei Wen, Wenjuan Liu, Min Zeng, Sijie Yang, Yuan-Hang Qu, Yao Cai, Yan Liu, Chengliang Sun

2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

2024

A scandium doped aluminum nitride thin film bulk acoustic resonator

Chao Gao, Yaxin Wang, Yao Cai, Binghui Lin, Yang Zou, Qin-Wen Xu, Ting-Ting Yang, Wenjuan Liu, Yan Liu, Shi-Shang Guo, Chengliang Sun

Journal of Micromechanics and Microengineering

2024

Laterally Excited Bulk Acoustic Resonators with Convex Interdigital Electrodes towards SHF Applications

Zhiwei Wen, Wenjuan Liu, Min Zeng, Xin Tong, Yuan-Hang Qu, Yan Liu, Yao Cai, Chengliang Sun

2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM)

2024

Role of oxygen on structure and piezoelectric properties of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline" overflow="scroll"><mml:msub><mml:mi>Al</mml:mi><mml:mrow><mml:mn>0.65</mml:mn></mml:mrow></mml:msub><mml:msub><mml:mi>Sc</mml:mi><mml:mrow><mml:mn>0.35</mml:mn></mml

Shashidhara Acharya, Xian Wang, Qin-Wen Xu, Mingsheng Zhang, Jian-Wei Chai, Ping Luo, Poh-Chong Lim, Ping Yang, Lei Shen, Chengliang Sun, Kui Yao

Physical Review Applied

2024

Theoretical Analysis and Verification on ScAlN-Based Piezoelectric Micromachined Ultrasonic Transducers With DC Bias

Ze-Kai Wang, Wenjuan Liu, Bohao Hu, Yu-Hao Xiao, Chaoxiang Yang, Liangyu Lu, Yao Cai, Yan Liu, Chengliang Sun

Journal of microelectromechanical systems

2024

An oven controlled piezoelectric MEMS dual-resonator platform with frequency stability of ± 100 ppb over industrial temperature range

Yuhao Xiao, Kewen Zhu, Jinzhao Han, Fang Dong, Chengliang Sun, Sheng Liu, Guoqiang Wu

Sensors and Actuators A Physical

2023

A ScAlN-Based Piezoelectric MEMS Microphone With Sector-Connected Cantilevers

Bohao Hu, Wenjuan Liu, Chaoxiang Yang, Liangyu Lu, Ze-Kai Wang, Yan Liu, Yao Cai, Jian Wang, Shi-Shang Guo, Chengliang Sun

Journal of microelectromechanical systems

2023

A dual-mass fully decoupled MEMS gyroscope with optimized structural design for minimizing mechanical quadrature coupling

Zhongye Wu, Rong-Hui Feng, Chengliang Sun, P. Wang, Guo-Qiang Wu

Microelectronic Engineering

2023

3.75 GHz AlN Lamb wave resonator with hole-like acoustic reflection structure

Xiang Chen, T. Luo, Yuan-Hang Qu, Zhiwei Wen, Jia-Qi Ding, Yan Liu, Chengliang Sun

IUS

2023

Investigation of thermal annealing on the characteristics of Sc Al1−N thin films

Chao Gao, Yao Cai, Yang Zou, Binghui Lin, Ting-Ting Yang, Yaxin Wang, Yan Liu, Shi-Shang Guo, Chengliang Sun

Vacuum

2023

Analysis and measurement of high frequency piezoelectric ring resonator

Ting-Ting Yang, Yao Cai, Chao Gao, Qin-Wen Xu, Yang Zou, Yan Liu, Wenjuan Liu, Cheng Lei, Chengliang Sun

Applied Physics Express

2023

A transceiver integrated piezoelectric micromachined ultrasound transducer array for underwater imaging

Yunxin Yao, Licheng Jia, Chongbin Liu, Xiang-Yang Wang, Chengliang Sun, Sheng Liu, Guo-Qiang Wu

Sensors and Actuators A-Physical

2023

Quality Factor Enhancement of Laterally-excited Bulk Acoustic Resonators with Reflectors

Xin Tong, Yao Cai, Zhiwei Wen, Jieyu Liu, Yan Liu, B. Soon, Wenjuan Liu, Chengliang Sun

IUS

2023

Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure

Yuan-Hang Qu, Xiyu Gu, Yang Zou, Zhiwei Wen, Yao Cai, B. Soon, Yan Liu, Chengliang Sun

Journal of microelectromechanical systems

2023

High Q-value Solid Mounted Resonator Based on Aluminum Nitride Film

Yuan-Hang Qu, Xiang Chen, Xiyu Gu, Zhiwei Wen, Yao Cai, Yan Liu, Chengliang Sun

IEEE Electron Devices Technology and Manufacturing Conference

2023

High Figure-of-Merit LiNbO3 Lamb Wave Resonators Implemented by Two-Dimensional Bulk Reflector Arrays

Xin Tong, Wenjuan Liu, Zhiwei Wen, Jieyu Liu, Jie Zhou, Yan Liu, Chengliang Sun, Yao Cai

IUS

2023

Self-Powered Droplet Sensor Based on Triboelectric Nanogenerator toward the Internet-of-Things (IoT) Alarm System

Jing-Xing Li, Yuan-Zheng Zhang, Xiangyang Gao, Yiqian Mao, Chen-Xi Hu, Kaixiang Long, Chengliang Sun, Shi-Shang Guo

ACS Applied Electronic Materials

2023

Boosting Performance of SAW Resonator via AlN/ScAlN Composite Films and Dual Reflectors

Yan Liu, Binghui Lin, Ying Xie, B. Soon, Yao Cai, Jun He, Chengliang Sun

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

2023

Effective electromechanical coupling coefficient ( keff2 ) enhancement of a Lamb wave resonator with trapezoid grooves configuration

Yu-Chen Fan, Jie Zhou, Qin-Wen Xu, Xin-Yi Tong, Ying Xie, Yang Zou, Jiaqi Ding, Chao Gao, Binghui Lin, Wenjuan Liu, Yan Liu, Yao Cai, Chengliang Sun

Applied Physics Express

2023

High crystal quality and low residual stress composite piezoelectric films prepared by a two-step method

Binghui Lin, Yao Cai, Yaxin Wang, Chao Gao, Gai Wu, Yan Liu, Wenjuan Liu, D. D. Cheam, Chengliang Sun

Journal of Micromechanics and Microengineering

2023

Spurious-Free S₁ Mode AlN/ScAlN-Based Lamb Wave Resonator With Trapezoidal Electrodes

T. Luo, Qin-Wen Xu, Zhiwei Wen, Yuan-Hang Qu, Jie Zhou, Binghui Lin, Yao Cai, Yan Liu, Chengliang Sun

IEEE Electron Device Letters

2023

Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO3 membrane-based laterally-excited bulk acoustic resonator

Jie Zhou, Yuchen Fan, Xin-Yi Tong, T. Luo, Jieyu Liu, Yang Zou, Wenjuan Liu, Yan Liu, J. Soon, Yao Cai, Chengliang Sun

Journal of Micromechanics and Microengineering

2023

Effect of Film Stress on the Performance of Solidly Mounted Resonator

Yuan-Hang Qu, Xiyu Gu, Zhiwei Wen, Yilin Wang, Min Wei, Xiang Chen, Yan Liu, Chengliang Sun

IUS

2023

A laterally excited bulk acoustic resonator with scattering vias in electrodes

Zhiwei Wen, Wenjuan Liu, T. Luo, Xin-Yi Tong, Ying Xie, Xiyu Gu, Yan Liu, Yao Cai, Shi-Shang Guo, Jian Wang, Chengliang Sun

Applied Physics Letters

2023

Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films

Laixia Nian, Yuan-Hang Qu, Xiyu Gu, T. Luo, Ying Xie, Min-sheng Wei, Yao Cai, Yan Liu, Chengliang Sun

Micromachines

2023

Experimental and theoretical studies of effective piezoelectric coefficients of 2-2 connectivity AlN/AlScN composite piezoelectric films

Xiyu Gu, Yan Liu, Yuan-Hang Qu, Liwenjuan Li, Yao Cai, Jia-Qi Ding, Ting Yu, Shi-Shang Guo, Chengliang Sun

Composites Communications

2023

A Novel SAW Resonator with Anti-Groove Structure Based on Heterogeneous Substrate

Binghui Lin, Yan Liu, T. Luo, Yaxin Wang, Chao Gao, Yang Zou, Wenjuan Liu, Yao Cai, Chengliang Sun

IUS

2023

Effects of Growth Temperature and Reactor Pressure on AlN Thin Film Grown by Metal-Organic Chemical Vapor Deposition

Binghui Lin, Yaxin Wang, Yang Zou, Chao Gao, Yan Liu, Wenjuan Liu, Shi-Shang Guo, Yao Cai, Chengliang Sun

Thin Solid Films

2023

Design and Analysis of Lithium–Niobate-Based Laterally Excited Bulk Acoustic Wave Resonator with Pentagon Spiral Electrodes

Ying Xie, Wenjuan Liu, Yao Cai, Zhiwei Wen, T. Luo, Yan Liu, Chengliang Sun

Micromachines

2023

Switchable ferroelectric photovoltaic response in Sc0.2Al0.8N-based optoelectronic devices

Xiaolong Ma, Jiahe Zhang, Rong-Hui Wang, Chao Gao, Ye Ma, Binghui Lin, Yang Zou, Yan Liu, Hong-Xing Xu, Chengliang Sun, Yao Cai

Applied Physics Express

2023

Design, Fabrication, and Characterization of Aluminum Scandium Nitride-Based Thin Film Bulk Acoustic Wave Filter

Yang Zou, Yao Cai, Chao Gao, T. Luo, Yan Liu, Qin-Wen Xu, Yaxin Wang, Laixia Nian, Wenjuan Liu, J. Soon, Chengliang Sun

Journal of microelectromechanical systems

2023

Heterostructure-Based Surface Acoustic Wave Resonator for Gas Sensing

Binghui Lin, Min Wei, Yuan-Hang Qu, Xiyu Gu, Wenjuan Liu, Yan Liu, Yao Cai, Chengliang Sun

IUS

2023

A Novel 2D Phononic Crystal-based Laterally-excited Bulk Wave Resonator

Ronghui Wang, Wenjuan Liu, Zhiwei Wen, Haoyang Su, Yao Cai, Yan Liu, Chengliang Sun

IUS

2023

A Spurious-free Laterally-excited Bulk Acoustic Resonator with Ring-shaped Interdigital Electrodes

Min Zeng, Wenjuan Liu, Zhiwei Wen, T. Luo, Yao Cai, Yan Liu, Chengliang Sun

IUS

2023

6 GHz Lithium Niobate Lamb Wave Resonators with A High Quality Factor Implemented by Groove Structures

Xin Tong, Yao Cai, Zhiwei Wen, Qin-Wen Xu, Wenjuan Liu, Yan Liu, B. Soon, Chengliang Sun

IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications

2023

A High Q 6.203 GHz Laterally-excited Bulk Acoustic Resonator with Reflective Grids

Zhiwei Wen, Wenjuan Liu, Xin Tong, Jian Wang, Shi-Shang Guo, Yan Liu, Yao Cai, Chengliang Sun

IUS

2023

Development of Temperature Sensor Based on AlN/ScAlN SAW Resonators

Min Wei, Yan Liu, Yuan-Hang Qu, Xiyu Gu, Yilin Wang, Wenjuan Liu, Yao Cai, Shi-Shang Guo, Chengliang Sun

Electronics

2023

A Tunable Dual-mode Lamb Wave Resonator with Floating Electrodes

Zhiwei Wen, Xiyu Gu, Yao Cai, T. Luo, Xin-Yi Tong, Wenjuan Liu, Yuan-Hang Qu, Yan Liu, Chengliang Sun

IEEE International Conference on Nano/Micro Engineered and Molecular Systems

2023

Study of High-Q Laterally Excited Bulk Wave Resonator With Smaller Gap-Width Reflectors

Xiyu Gu, Yan Liu, Ying Xie, Zhiwei Wen, Yuan-Hang Qu, Wenjuan Liu, Yao Cai, Shi-Shang Guo, Chengliang Sun

IEEE Electron Device Letters

2023

Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator

Yuan-Hang Qu, T. Luo, Zhiwei Wen, Min-sheng Wei, Xiyu Gu, Xiang Chen, Yang Zou, Yao Cai, Yan Liu, Chengliang Sun

Micromachines

2022

A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure

Chaoxiang Yang, Bohao Hu, Liangyu Lu, Zekai Wang, Wenjuan Liu, Chengliang Sun

Micromachines

2022

A ScAlN Piezoelectric High-Frequency Acoustic Pressure-Gradient MEMS Vector Hydrophone With Large Bandwidth

Zhi-Kai Zhou, Chongbin Liu, Licheng Jia, Lei Shi, Xian-Zhong Wang, Ji-Fang Tao, Chengliang Sun, Guo-Qiang Wu

IEEE Electron Device Letters

2022

Bimorph Piezoelectric MEMS Microphone with Tractive Structure

Chaoxiang Yang, Bohao Hu, Liangyu Lu, Yaxin Wang, Yao Cai, Yan Liu, Wenjuan Liu, Chengliang Sun

IUS

2022

Tuning Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducers Using DC Bias Voltage

Zhi-Peng Wu, Wenjuan Liu, Zhihao Tong, Yao Cai, Chengliang Sun, Liang Lou

IEEE Transactions on Electron Devices

2022

Large piezoelectricity response in Li and Ti (or Zr) co-alloyed w-AlN

Ze-Chao Tao, Zhibin Hu, Liu Xie, Chengliang Sun, Q. Tang, Yong-Hui Liu, Junrong Jia, Yu-Zheng Guo, Jun Wang, Guo-Qiang Wu

Journal of Applied Physics

2022

Design and Optimization of the Dual-Mode Lamb Wave Resonator and Dual-Passband Filter

T. Luo, Yan Liu, Yang Zou, Jie Zhou, Wenjuan Liu, Guo-Qiang Wu, Yao Cai, Chengliang Sun

Micromachines

2022

Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible Keff2

Laixia Nian, Yang Zou, Chao Gao, Yu Zhou, Yuchen Fan, Jian Wang, Wenjuan Liu, Yan Liu, J. Soon, Yao Cai, Chengliang Sun

Micromachines

2022

Piston-Mode pMUT With Mass Load

Lei Wang, Jie Zhou, Wei-Ping Zhu, Zhi-Peng Wu, Wenjuan Liu, Chengliang Sun

IEEE Journal of the Electron Devices Society

2022

High-Quality Single-Crystal Piezoelectric Aluminum Nitride Grown on Gallium Nitride Transition Layer on Sapphire Substrate

Binghui Lin, Yan Liu, Qin-Wen Xu, Xin-Yi Tong, Laixia Nian, Wenjuan Liu, B. Soon, Yao Cai, Chengliang Sun

IUS

2022

High-Q A0 Mode Plate Wave Resonator on X-cut LiNbO3 Films with Dummy Electrode Arrays

Qin-Wen Xu, Tong Xin, Zhiwei Wen, Yan Liu, Yao Cai, B. Soon, Wenjuan Liu, Chengliang Sun

IUS

2022

Giant pyroelectricity in nanomembranes

Jie Jiang, Li-Fu Zhang, Ming Chen, Hua Zhou, Pritom Bose, Yu-Wei Guo, Yang Hu, Bai-Wei Wang, Zhi-Zhong Chen, Ru Jia, S. Pendse, Yu Xiang, Yaobiao Xia, Zong-Huan Lu, Xixing Wen, Yao Cai, Chengliang Sun, Gwo-Ching Wang, Toh-Ming Lu, D. Gall, Yi-Yang Sun, N. Koratkar, E. Fohtung, Yunfeng Shi, Jian Shi

Nature

2022

AlN/Al0.8Sc0.2N film S0 mode lamb wave resonator with spurious mode suppression

Qin-Wen Xu, Jie Zhou, Yan Liu, Yang Zou, Wenjuan Liu, Yao Cai, Chengliang Sun

Journal of Applied Physics

2022

Tunable Electromechanical Coupling Coefficient of a Laterally Excited Bulk Wave Resonator with Composite Piezoelectric Film

Ying Xie, Yan Liu, Jieyu Liu, Lei Wang, Wenjuan Liu, B. Soon, Yao Cai, Chengliang Sun

Micromachines

2022

A High-Sensitivity Gravimetric Biosensor Based on S1 Mode Lamb Wave Resonator

T. Luo, Wenjuan Liu, Zhi-Wei Wen, Ying Xie, Xin-Yi Tong, Yao Cai, Yan Liu, Chengliang Sun

Italian National Conference on Sensors

2022

van der Waals Ferroelectric Halide Perovskite Artificial Synapse

Yao Cai, Yang Hu, Zhi-Zhong Chen, Jie Jiang, Li-Fu Zhang, Yu-Wei Guo, S. Pendse, Ru Jia, Jiahe Zhang, Xiaolong Ma, Chengliang Sun, Jian Shi

Physical Review Applied

2022

Effects of Electric Bias on Different Sc-Doped AlN-Based Film Bulk Acoustic Resonators

Yaxin Wang, Yang Zou, Chao Gao, Xiyu Gu, Ye Ma, Yan Liu, Wenjuan Liu, J. Soon, Yao Cai, Chengliang Sun

Electronics

2022

Investigation of film bulk acoustic resonators for sensing applications in liquid environment

Yu Zhou, Yang Zou, Chao Gao, Qin-Wen Xu, Xin-Yi Tong, Binghui Lin, Yan Liu, B. Soon, Yao Cai, Chengliang Sun

Applied Physics Letters

2022

Theoretical Modeling of Piezoelectric Micromachined Ultrasonic Transducers With Honeycomb Structure

Chongbin Liu, Licheng Jia, Lei Shi, Chengliang Sun, D. D. Cheam, Peng Wang, Guo-Qiang Wu

Journal of microelectromechanical systems

2022

A Laterally Excited Bulk Acoustic Wave Resonator towards High Figure-of-Merit in Radio-Frequency Applications

Xin-Yi Tong, Jie Zhou, Zhiwei Wen, Yuchen Fan, Jieyu Liu, Yan Liu, Wenjuan Liu, B. Soon, Yao Cai, Chengliang Sun

IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications

2022

Piezoelectric Micromachined Ultrasonic Transducer Array-Based Electronic Stethoscope for Internet of Medical Things

Licheng Jia, Lei Shi, Chongbin Liu, Jing Xu, Yongjie Gao, Chengliang Sun, Sheng Liu, Guo-Qiang Wu

IEEE Internet of Things Journal

2022

Influence of electrode metallization rate on the effective electromechanical coefficient of AlN checker-mode lamb wave resonator

Xin-Yi Tong, Jieyu Liu, Jie Zhou, Qin-Wen Xu, Binghui Lin, Yan Liu, B. Soon, Wenjuan Liu, Yao Cai, Chengliang Sun

Japanese Journal of Applied Physics

2022

Micromechanics predictions of effective elastic, piezoelectric and dielectric properties of composite piezoelectric films

Liwenjuan Li, Xiyu Gu, Chao Gao, Shao-Yu Hu, Yaxin Wang, Yang Zou, Yan Liu, Wenjuan Liu, Yao Cai, Chengliang Sun

Applied Physics Express

2022

A Miniaturized Ultrasonic Sugar Concentration Detection System Based on Piezoelectric Micromachined Ultrasonic Transducers

Lei Shi, Licheng Jia, Chongbin Liu, Chengliang Sun, Sheng Liu, Guo-Qiang Wu

IEEE Transactions on Instrumentation and Measurement

2022

Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications

Yang Zou, Chao Gao, Jie Zhou, Yan Liu, Qin-Wen Xu, Yuan-Hang Qu, Wenjuan Liu, J. Soon, Yao Cai, Chengliang Sun

Microsystems & Nanoengineering

2022

Dual Redox Active Sites N‐C@Ni2P/NiSe2 Heterostructure Supercapacitor Integrated with Triboelectric Nanogenerator toward Efficient Energy Harvesting and Storage

Xiangyang Gao, Yuan-Zheng Zhang, Shukun Yin, Yiqian Mao, J. Gui, Jing-Xing Li, Yafei Zhao, Chengliang Sun, Shi-Shang Guo

Advanced Functional Materials

2022

Laterally-excited bulk acoustic wave resonator with an adjustable piezoelectric coupling coefficient

Zhiwei Wen, Qin-Wen Xu, Jieyu Liu, Yuan-Hang Qu, Yan Liu, Wenjuan Liu, B. Soon, Yao Cai, Chengliang Sun

Japanese Journal of Applied Physics

2022

A Van Der Waals Photo‐Ferroelectric Synapse

Yao Cai, Li-Fu Zhang, Jie Jiang, Yang Hu, Zhi-Zhong Chen, Ru Jia, Chengliang Sun, Jian Shi

Advanced Electronic Materials

2022

Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator

Chao Gao, Yang Zou, Jie Zhou, Yan Liu, Wenjuan Liu, Yao Cai, Chengliang Sun

Micromachines

2021

Investigation on the release of residual stress in a folded structure applied to MEMS devices

Chuying Tang, Hongyu Yu, Chengliang Sun, Yi Zhang, Liang Wang, Yao Cai, Jingyi Wu, Qing Wang, Sheng Liu

Micro & Nano Letters

2021

6 GHz Lithium Niobate MEMS Resonator with Square Spiral Electrodes

Ying Xie, Jie Zhou, Yan Liu, Lei Wang, Yao Cai, Chengliang Sun

IUS

2021

A High-Performance 9.5% Scandium-Doped Aluminum Nitride Piezoelectric MEMS Hydrophone With Honeycomb Structure

Licheng Jia, Lei Shi, Zhao-Jiong Lu, Chengliang Sun, Guo-Qiang Wu

IEEE Electron Device Letters

2021

A Novel Tri-Axial Piezoelectric MEMS Accelerometer with Folded Beams

Yan Liu, Bohao Hu, Yao Cai, Wenjuan Liu, Alexander Tovstopyat, Chengliang Sun

Italian National Conference on Sensors

2021

Design and Characterization of an Aluminum Nitride-Based MEMS Hydrophone With Biologically Honeycomb Architecture

Licheng Jia, Lei Shi, Chongbin Liu, Yunxin Yao, Chengliang Sun, Guo-Qiang Wu

IEEE Transactions on Electron Devices

2021

High Sensitivity Piezoelectric MEMS Microphones Based on AlN with Cavity-SOI

Bohao Hu, Binghui Lin, Wenjuan Liu, Chengliang Sun

IUS

2021

Lithium Niobate Thin Film Based A3 Mode Resonators with High Effective Coupling Coefficient of 6.72%

Yi Zhang, Liang Wang, Yang Zou, Qinwen Xu, Jieyu Liu, Qing Wang, Alexander Tovstopyat, Wenjuan Liu, Chengliang Sun, Hong-Yu Yu

IEEE/LEOS International Conference on Optical MEMS

2021

A Novel Trapezoidal ScAlN/AlN-Based MEMS Piezoelectric Accelerometer

Bohao Hu, Yan Liu, Binghui Lin, Guo-Qiang Wu, Wenjuan Liu, Chengliang Sun

IEEE Sensors Journal

2021

Aln Based Piezoelectric Micromachined Ultrasonic Transducers for Continuous Monitoring of the Mechano-Acoustic Cardiopulmonary Signals

Licheng Jia, Lei Shi, Chengliang Sun, Sheng Liu, Guoqiang Wu

IEEE/LEOS International Conference on Optical MEMS

2021

Design and Performance of ScAlN/AlN Trapezoidal Cantilever-Based MEMS Piezoelectric Energy Harvesters

Yan Liu, Bohao Hu, Yao Cai, Jie Zhou, Wenjuan Liu, Alexander Tovstopyat, Guoqiang Wu, Chengliang Sun

IEEE Transactions on Electron Devices

2021

Lithium Niobate Film Based Acoustic Wave Resonator with Arc Shaped Electrodes

Jieyu Liu, Xin-Yi Tong, Jie Zhou, Yan Liu, Wenjuan Liu, Yao Cai, Chengliang Sun

IUS

2021

Performance of aluminum nitride-based piezoelectric micromachined ultrasonic transducers under different readout configurations

Lei Shi, Licheng Jia, Chongbin Liu, Hong-Bin Yu, Chengliang Sun, Guo-Qiang Wu

Journal of Micromechanics and Microengineering

2021

A Broadband Piezoelectric Micromachined Acoustic Transducer with Variable Mass Loading

Binghui Lin, Bohao Hu, Wenjuan Liu, Chengliang Sun

IUS

2021

A Novel Transfer Function Based Ring-Down Suppression System for PMUTs

Zhi-Peng Wu, Wenjuan Liu, Zhihao Tong, Songsong Zhang, Y. Gu, Guoqiang Wu, Alexander Tovstopyat, Chengliang Sun, Liang Lou

Italian National Conference on Sensors

2021

Ultra-Low Stress Die Attachment Based on a Stacked Multilayer Substrate

Zhongye Wu, Shangshu Yang, Longjian Xue, Chengliang Sun, Sheng Liu, Guo-Qiang Wu

Journal of microelectromechanical systems

2021

Ring-shaped Lamb Wave Resonator based LiNbO3 Film with A1/A3 Mode Resonance above 6/17 GHz

Jie Zhou, Qin-Wen Xu, Jieyu Liu, Zhongye Wu, Ying Xie, Chengliang Sun, Yao Cai

IUS

2021

ScAlN/AlN Film-Based Lamé Mode Resonator With High Effective Electromechanical Coupling Coefficient

Jie Zhou, Yan Liu, Qin-Wen Xu, Ying Xie, Yao Cai, Jieyu Liu, Wenjuan Liu, Alexander Tovstopyat, Chengliang Sun

Journal of microelectromechanical systems

2021

A Novel Piezoelectric Micromachined Ultrasonic Transducer with Adjustable Broad and Flat Frequency Band

Lei Wang, Wei Zhu, Zhi-Peng Wu, Wenjuan Liu, Chengliang Sun

IEEE International Conference on Nano/Micro Engineered and Molecular Systems

2021

Performance-enhanced flexible piezoelectric nanogenerator via layer-by-layer assembly for self-powered vagal neuromodulation

Yuan-Zheng Zhang, Li-Ping Zhou, Xiangyang Gao, Chengzhe Liu, Hua-Qiang Chen, Hai-Wu Zheng, J. Gui, Chengliang Sun, Lilei Yu, Shi-Shang Guo

2021

Broadband Piezoelectric Micromachined Ultrasonic Transducer With a Resonant Cavity

Wei Zhu, Lei Wang, Zhi-Peng Wu, Wenjuan Liu, Chengliang Sun

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

2021

A Novel Broadband Piezoelectric Micromachined Ultrasonic Transducer with Resonant Cavity

Lei Wang, Wei Zhu, Zhi-Peng Wu, Wenjuan Liu, Chengliang Sun

IUS

2021

Heterointerface engineering and piezoelectric effect enhanced performance of self-charging supercapacitors power cell

Xiangyang Gao, Yuan-Zheng Zhang, Yafei Zhao, Shukun Yin, J. Gui, Chengliang Sun, Shi-Shang Guo

Nano Energy

2021

A High Q Value ScAlN/AlN-Based SAW Resonator for Load Sensing

Binghui Lin, Yan Liu, Yao Cai, Jie Zhou, Yang Zou, Yi Zhang, Wenjuan Liu, Chengliang Sun

IEEE Transactions on Electron Devices

2021

A Novel Coupled Piezoelectric Micromachined Ultrasonic Transducer Based on Piston Mode

Lei Wang, Wei Zhu, Zhi-Peng Wu, Wenjuan Liu, Chengliang Sun

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

2021

A Novel Piston-Like Piezoelectric Micromachined Ultrasonic Transducer Based on Mass Loading Effect

Lei Wang, Jie Zhou, Wei Zhu, Zhi-Peng Wu, Wenjuan Liu, Chengliang Sun

IEEE Electron Devices Technology and Manufacturing Conference

2021

Laterally-excited bulk-wave resonators (XBARs) with embedded electrodes in 149.5° Z-cut LiNbO3

Xiyu Gu, Jieyu Liu, Yao Cai, Yan Liu, Chao Gao, Zhiwei Wen, Shi-Shang Guo, Chengliang Sun

IEEE International Conference on Nano/Micro Engineered and Molecular Systems

2021

Doping-Enabled Reconfigurable Strongly Correlated Phase in a Quasi-2D Perovskite.

Li-Fu Zhang, Jie Jiang, Yao Cai, Shukai Yao, Bilal Azhar, Zhi-Zhong Chen, Yang Hu, S. Pendse, Yu-Wei Guo, Ru Jia, Zhiting Tian, Chengliang Sun, Peilin Liao, Jian Shi

Journal of Physical Chemistry Letters

2021

Enhancement of Transmitting Sensitivity of Piezoelectric Micromachined Ultrasonic Transducers by Electrode Design

Licheng Jia, Lei Shi, Chongbin Liu, Chengliang Sun, Guoqiang Wu

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

2020

声表面波型紫外探测器(英文)

张一,蔡耀,周杰,谢英,徐沁文,邹杨,国世上,徐红星,孙成亮,刘胜

Science Bulletin

2020

Dual-mode thin film bulk acoustic wave resonator and filter

Yang Zou, Laixia Nian, Yao Cai, Yan Liu, Alexander Tovstopyat, Wenjuan Liu, Chengliang Sun

2020

Investigation of modified Lamé mode resonator with high coupling coefficient

Jie Zhou, Jieyu Liu, Yang Zou, Yao Cai, Yi Zhang, Qinwen Xu, Xin-Yi Tong, Alexander Tovstopyat, Shi-Shang Guo, Chengliang Sun

2020

Surface acoustic wave-based ultraviolet photodetectors: a review.

Yi Zhang, Yao Cai, Jie Zhou, Ying Xie, Qinwen Xu, Yang Zou, Shi-Shang Guo, Hong-Xing Xu, Chengliang Sun, Sheng Liu

Science Bulletin

2020

Band structure, effective mass, and carrier mobility of few-layer h-AlN under layer and strain engineering

Yao Cai, Yan Liu, Ying Xie, Yang Zou, Chao Gao, Yan Zhao, Sheng Liu, Hong-Xing Xu, Jian Shi, Shi-Shang Guo, Chengliang Sun

2020

Materials, Design, and Characteristics of Bulk Acoustic Wave Resonator: A Review

Yan Liu, Yao Cai, Yi Zhang, Alexander Tovstopyat, Sheng Liu, Chengliang Sun

Micromachines

2020

Electronic Structure and Optical Properties of YAlN: A First‐Principles Study

Ying Xie, Yao Cai, Yan Liu, Yan Zhao, Shi-Shang Guo, Chengliang Sun, Sheng Liu

physica status solidi (b)

2020

Dual-Mode Hybrid Quasi-SAW/BAW Resonators With High Effective Coupling Coefficient

Yi Zhang, Jie Zhou, Ying Xie, Chuying Tang, Yang Zou, Alexander Tovstopyat, Hongyu Yu, Chengliang Sun

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

2020

Residual Stress Analysis and Structural Parameters Optimization of Corrugated Diaphragms Applied to MEMs Device

Chuying Tang, Liang Wang, Yao Cai, Yi Zhang, Qing Wang, Chengliang Sun, Hong-Yu Yu

IEEE Electron Devices Technology and Manufacturing Conference

2019

Design of AlN Meshed LCAT Mode Resonators for Coupling Coefficient Beyond BAW

Yao Zhu, Nan Wang, Chengliang Sun, Ying Zhang

IUS

2019

AlN Checker-mode Resonators with Routing Structures

Jieyu Liu, Jie Zhou, Yang Zou, Chao Gao, Ying Xie, Chengliang Sun

IUS

2019

Enhanced performance of piezoelectric nanogenerator based on aligned nanofibers and three-dimensional interdigital electrodes

Lingling Zhang, J. Gui, Zezheng Wu, Rui Li, Yuan Wang, Zhiyi Gong, Xing-Zhong Zhao, Chengliang Sun, Shi-Shang Guo

Nano Energy

2018

A Micro-fabricated flexible and flat polyimide module with highly C-axis oriented AlN piezoelectric element for accurate vital signs monitoring

T. Sun, Bei-Bei Han, Chengliang Sun, L. Wong, A. Gu

IEEE/LEOS International Conference on Optical MEMS

2018

Efficient Welding of Silver Nanowires embedded in a Poly(vinylidene fluoride) Film for Robust Wearable Electronics

Lingling Zhang, Yuan Wang, J. Gui, Xue-Ning Wang, Rui Li, Wei Liu, Chengliang Sun, Xing-Zhong Zhao, Shi-Shang Guo

Advanced Materials & Technologies

2017

AlN wideband energy harvesters with wafer-level vacuum packaging utilizing three-wafer bonding

Nan Wang, Chengliang Sun, L. Siow, Hong-Miao Ji, P. Chang, Qing-Xin Zhang, Y. Gu

IEEE/LEOS International Conference on Optical MEMS

2017

A passively temperature-compensated dual-frequency aln-on-silicon resonator for accurate pressure sensing

Q. Xie, Nan Wang, Chengliang Sun, A. Randles, Pushpapraj Singh, Xiao-Ling Zhang, Y. Gu

IEEE/LEOS International Conference on Optical MEMS

2017

High-Band AlN Based RF-MEMS Resonator for TSV Integration

Nan Wang, Yao Zhu, Chengliang Sun, Mingbin Yu, Geng L. Chua, S. Merugu, Navab Singh, Y. Gu

Electronic Components and Technology Conference

2017

Numerical modeling and validation of squeezed-film damping in vacuum-packaged industrial MEMS

W. Syed, Ayoola T. Brimmo, O. Waheed, Alabi Bojesomo, M. H. Ali, I. Ocak, Chengliang Sun, A. Chatterjee, I. Elfadel

2017

3ウエハボンディングを利用したウエハレベル真空パッケージングを用いたAlN広帯域エネルギーハーベスタ【Powered by NICT】

Nan Wang, Chengliang Sun, S. Yan, Hong-Miao Ji, C. Peter, Qing-Xin Zhang, Y. Gu

2017

Wafer-Level Vacuum-Packaged Piezoelectric Energy Harvesters Utilizing Two-Step Three-Wafer Bonding

Nan Wang, L. Siow, L. Wong, Chengliang Sun, Hong-Miao Ji, D. Made, P. Chang, Qing-Xin Zhang, Y. Gu

Electronic Components and Technology Conference

2017

ScAlN-Based LCAT Mode Resonators Above 2 GHz With High FOM and Reduced Fabrication Complexity

Yao Zhu, Nan Wang, Geng L. Chua, Chengliang Sun, Navab Singh, Y. Gu

IEEE Electron Device Letters

2017

Effectiveness of oxide trench array as a passive temperature compensation structure in AlN-on-silicon micromechanical resonators

Q. Xie, Nan Wang, Chengliang Sun, A. Randles, Pushpapraj Singh, Xiao-Ling Zhang, Y. Gu

2016

A High Coupling Coefficient 2.3-GHz AlN Resonator for High Band LTE Filtering Application

Yao Zhu, Nan Wang, Chengliang Sun, S. Merugu, Navab Singh, Y. Gu

IEEE Electron Device Letters

2016

Flutter Phenomenon in Flow Driven Energy Harvester–A Unified Theoretical Model for “Stiff” and “Flexible” Materials

Yu Chen, Xiaojing Mu, Tao Wang, Weiwei Ren, Ya Yang, Zhong-Lin Wang, Chengliang Sun, A. Gu

Scientific Reports

2016

GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers

Guoqiang Wu, Yao Zhu, S. Merugu, Nan Wang, Chengliang Sun, Y. Gu

2015

Two dimensional, high electromechanical coupling aluminium nitride Lamb wave resonators

S. Loke, Chengliang Sun, Yao Zhu, Nan Wang, Y. Gu

International Conference on Electron Devices and Solid-State Circuits

2015

An Energy Autonomous 400 MHz Active Wireless SAW Temperature Sensor Powered by Vibration Energy Harvesting

Yao Zhu, Yuan-Jin Zheng, Yuan Gao, D. Made, Chengliang Sun, M. Je, A. Gu

IEEE Transactions on Circuits and Systems Part 1: Regular Papers

2015

Flow‐Driven Triboelectric Generator for Directly Powering a Wireless Sensor Node

Shu-Hua Wang, Xiaojing Mu, Ya Yang, Chengliang Sun, A. Gu, Zhong-Lin Wang

Advances in Materials

2015

Methods for improving electromechanical coupling coefficient in two dimensional electric field excited AlN Lamb wave resonators

Chengliang Sun, B. Soon, Yao Zhu, Nan Wang, S. Loke, Xiaojing Mu, Ji-Fang Tao, A. Gu

2014

Correction to “A Miniaturization Strategy for Harvesting Vibration Energy Utilizing Helmholtz Resonance and Vortex Shedding Effect”

Chengliang Sun, Xiaojing Mu, L. Siow, W. Tsang, Hong-Miao Ji, H. Chang, Qing-Xin Zhang, Y. Gu, D. Kwong

2014

A Miniaturization Strategy for Harvesting Vibration Energy Utilizing Helmholtz Resonance and Vortex Shedding Effect

Chengliang Sun, Xiaojing Mu, L. Siow, W. Tsang, Hong-Miao Ji, H. Chang, Qing-Xin Zhang, Y. Gu, D. Kwong

IEEE Electron Device Letters

2014

A high-impedance dual-mode SAW resonator for ultra low power and high data rate FSK modulator

Yao Zhu, Yuan-Jin Zheng, Chengliang Sun, Yuan Gao, A. Gu, H. Campanella

2010

Fundamental study of mechanical energy harvesting using piezoelectric nanostructures

Chengliang Sun, Jian Shi, Xu-Dong Wang

2010

Ferroelectric and electromechanical property characterization of single Pb(ZrTi)O3 fiber resonator

Chengliang Sun, Lifeng Qin, H. Xue, Zhaoxian Xiong, Qing-ming Wang

2009

The effect of magnetic nanoparticles on the morphology, ferroelectric, and magnetoelectric behaviors of CFO/P(VDF-TrFE) 0–3 nanocomposites

Jin-Xing Zhang, Ji-Yan Dai, L.-C. So, Chengliang Sun, Ching-Yin Lo, S. Or, Hlw L. W. Chan

2009

Piezoelectric dispenser based on a piezoelectric-metal-cavity actuator.

Kwok-Ho Lam, Chengliang Sun, Kin-Wing Kwok, H. L. W. Chan

Review of Scientific Instruments

2009

Piezoelectric Energy Harvesting using Single Crystal Pb(Mg1/3Nb2/3)O 3-xPbTiO3 (PMN-PT) Device

Chengliang Sun, Lifeng Qin, Fang Li, Qing-Ming Wang

2008

Magnetoelectric coupling in CoFe2O4∕SrRuO3∕Pb(Zr0.52Ti0.48)O3 heteroepitaxial thin film structure

Jin-Xing Zhang, Ji-Yan Dai, C.-K. Chow, Chengliang Sun, V. Lo, H. L. Chan

2007

Energy harvesting with piezoelectric drum transducer

Sheng-xiang Wang, Kwok-Ho Lam, Chengliang Sun, Kin-Wing Kwok, H. L. Chan, Ming-Sen Guo, Xing-Zhong Zhao

2007

Lead-free multilayer piezoelectric transformer.

Ming-Sen Guo, X.-P. Jiang, Kwok-Ho Lam, Sheng Wang, Chengliang Sun, H. L. Chan, Xing-Zhong Zhao

Review of Scientific Instruments

2007

Thermal study on structural changes and phase transition in high-energy electron-irradiated blends of P(VDF–TrFE) copolymers

Shi-Shang Guo, Chengliang Sun, T.-S. Wu, X.-Z. Zhao, H. Chan

2007

Effect of Geometry on the Characteristics of a Drum Actuator

Chengliang Sun, Kwok-Ho Lam, S.-G. Lu, H. L. Chan, Xing-Zhong Zhao, C. Choy

2007

Fabrication and characterization of Ni/P(VDF-TrFE) nanoscaled coaxial cables

Chengliang Sun, Kwok-Ho Lam, Chen Chao, Sienting Lau, H. Chan, Shi-Shang Guo, Xing-Zhong Zhao

2007

A Piezoelectric-Metal-Cavity (PMC) actuator

Kwok Ho Lam, Chengliang Sun, H.L.W. Chan, Xingzhong Zhao, C. L. Choy

Journal of Electroceramics

2006

Dielectric and tunable properties of K-doped Ba0.6Sr0.4TiO3 thin films fabricated by sol-gel method

Xiao-Hua Sun, Bai-Lin Zhu, Tao Liu, Mei-Ya Li, Xing-Zhong Zhao, Danyang Wang, Chengliang Sun, H. Chan

2006

FINITE ELEMENT ANALYSIS OF UNDERWATER CYMBAL TRANSDUCERS WITH LARGE DISPLACEMENT AND FAST RESPONSE TIME

Shi-Shang Guo, Wei-Ping Li, L. Sang, Chengliang Sun, Xing-Zhong Zhao

2006

High sensitivity cymbal-based accelerometer

Chengliang Sun, Kwok-Ho Lam, S. H. Choy, H. L. Chan, Xing-Zhong Zhao, C. Choy

2006

THE EFFECT OF GEOMETRY ON THE DISPLACEMENT AMPLIFICATION AND RESONANCE CHARACTERISTICS OF THE CYMBAL TRANSDUCERS

Chengliang Sun, Shi-Shang Guo, Wei-Ping Li, Z.-B. Xing, Gang Liu, Xing-Zhong Zhao

2006

Precision piezoelectric acoustic position detector

Chengliang Sun, Kwok-Ho Lam, J. Wang, H. L. Chan, Xing-Zhong Zhao, C. Choy

2006

A novel drum piezoelectric-actuator

Chengliang Sun, Kwok Ho Lam, H.L.W. Chan, Xiao-Ming Zhao, C. L. Choy

Applied Physics A

2005

Effect of 2-methoxyethanol on structure and dielectrical properties of (Pb0.25Ba0.15Sr0.6)Tio3 thin films by modified sol–gel technique

Xiao-Hua Sun, Chengliang Sun, Sheng Xu, Mei-Ya Li, Xing-Zhong Zhao

2005

Displacement amplification and resonance characteristics of the cymbal transducers

Chengliang Sun, Shi-Shang Guo, W.-P. Li, Z.-B. Xing, Gang Liu, Xing-Zhong Zhao

2004

巨电致伸缩共聚物P(VDF-TrFE)超声传感器的研制

国世上,李伟平,孙成亮,赵兴中

《传感技术学报》

2004

Structural modification of electron-irradiated poly (vinylidene fluoride-trifluoroethylene) copolymer

Wei Li, Shi-Shang Guo, Yi-Wen Tang, Chengliang Sun, Xiao-Long Zhao

2004

Leakage current and relaxation characteristics of electron-irradiated poly(vinylidene fluoride-trifluoroethylene) copolymers

Shi-Shang Guo, Wenbin Li, Chengliang Sun, D.-H. Wang, Xing-Zhong Zhao, Jie Wang, H. Chan, C. Choy

会议论文

2004

铁电共聚物P(VDF-TrFE)电子辐照的相变特性与弛豫现象研究

国世上,李伟平,孙成亮,赵兴中

《第五届中国功能材料及其应用学术会议论文集Ⅲ》

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