刘文娟｜武汉大学｜学者主页

2026

High-Coupling Thickness-Shear Mode Solidly Mounted Resonator Using Y-cut LiNbO 3 Thin Film via Transfer Bonding

Ronghui Wang, Min Zeng, Wenjuan Liu, Zhiwei Wen, Yao Cai, Shishang Guo, Guoqiang Wu, Chengliang Sun

Journal of Microelectromechanical Systems

2026

Miniaturized ScAlN Bimorph MEMS Microphone With Windmill Structure Achieving 61.2 dB SNR

Chaoxiang Yang, Wenjuan Liu, Yaxin Wang, Liangyu Lu, Bohao Hu, Yan Liu, Yao Cai, Shi-Shang Guo, Guo-qiang Wu, Chengliang Sun

IEEE Electron Device Letters

DOI

2026

Sub-6 GHz acoustic filters using laterally-excited bulk acoustic resonator with scattering vias in double-layer electrodes

Zhiwei Wen, Wenjuan Liu, Min Zeng, Jieyu Liu, Yuan-Hang Qu, Ronghui Wang, Yan Liu, Yao Cai, Cheng-Liang Sun

Microsystems & Nanoengineering

DOI

2025

Stress-Amplified Piezoelectric MEMS Microphone with Concave-Convex Rings

Liangyu Lu, Wenjuan Liu, Chaoxiang Yang, Yao Cai, Yan Zhao, Chengliang Sun

IEEE International Ultrasonics Symposium

DOI

2025

Laterally Excited Bulk Acoustic Wave Resonators with Rotated Electrodes Using X-Cut LiNbO3 Thin-Film Substrates

Jieyu Liu, Wenjuan Liu, Zhiwei Wen, Min Zeng, Yao Cai, Chengliang Sun

Sensors

DOI

2025

Lithium niobate-based laterally excited bulk acoustic resonator with wave-shaped electrodes and its filter

Min Zeng, Wenjuan Liu, Zhiwei Wen, Tiancheng Luo, Yao Cai, Shishang Guo, Chengliang Sun

Applied Physics Letters

DOI

2025

A 6-GHz XBAR Filter Using Trapezoidal Electrodes Based on LiNbO3 Thin Films

Min Zeng, Wenjuan Liu, Zhiwei Wen, Ronghui Wang, Yao Cai, Yan Liu, Shishang Guo, Chengliang Sun

IEEE Microwave and Wireless Technology Letters

DOI

2025

A Temperature-Compensated Dual-Band Passdand Filter Based on Lithium Niobate Thin Films

Zhiwei Wen, Wenjuan Liu, Min Zeng, Yao Cai, Yan Liu, Cheng-Liang Sun

IUS

DOI

2025

Sc₀.₁Al₀.₉N-Based Bimorph Piezoelectric MEMS Microphones With Tractive Structures

Chaoxiang Yang, Wenjuan Liu, Yaxin Wang, Bohao Hu, Liangyu Lu, Yan Liu, Yao Cai, Shi-Shang Guo, Chengliang Sun

IEEE Transactions on Electron Devices

DOI

2024

A near spurious-free 6 GHz laterally-excited bulk acoustic resonator with single-sided wavy electrodes

Sijie Yang, Wenjuan Liu, Zhi-Wei Wen, Ying Mao Xie, Xin Tong, Yan Liu, Yao Cai, Shishang Guo, Chengliang Sun

Journal of Physics D Applied Physics

DOI

2024

Laterally Excited Bulk Acoustic Resonators With Grooves Between Interdigital Electrodes

Zhiwei Wen, Wenjuan Liu, Xin Tong, Sijie Yang, Ronghui Wang, Yuanhang Qu, Yan Liu, Yao Cai, Shishang Guo, Chengliang Sun

IEEE Microwave and Wireless Technology Letters

DOI

2024

A Laterally Excited Bulk Acoustic Wave Resonator Based on LiNbO3 with Arc-Shaped Electrodes

Jieyu Liu, Wenjuan Liu, Zhiwei Wen, Min Zeng, Chengliang Sun

Micromachines

DOI

2024

SC0.096Al0.904N-based Bimorph Piezoelectric Micro Machined Ultrasonic Transducers

Ziye Zhai, Wenjuan Liu, Chengliang Sun

DOI

2024

6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes

Xin Tong, Yang Zou, Zhiwei Wen, Zesheng Liu, Tiancheng Luo, Jie Zhou, Huajun Liu, Yuqi Ren, Qinwen Xu, Wenjuan Liu, Yan Liu, Yao Cai, Chengliang Sun

Microsystems & Nanoengineering

DOI

2024

Effects of interlayer SiO2 or Au on the performances of LNOS-SAW

Binghui Lin, Chao Gao, Yaxin Wang, Yang Zou, Yan Liu, Wenjuan Liu, Yao Cai, Chengliang Sun

Journal of Physics Conference Series

DOI

2024

A piezoelectric MEMS microphone with proof mass and its array

Liangyu Lu, Wenjuan Liu, Bohao Hu, Chaoxiang Yang, Zekai Wang, Yan Liu, Yao Cai, Jian Wang, Shishang Guo, Chengliang Sun

Sensors and Actuators A Physical

DOI

2024

A scandium doped aluminum nitride thin film bulk acoustic resonator

Chao Gao, Yaxin Wang, Yao Cai, Binghui Lin, Yang Zou, Qinwen Xu, Tingting Yang, Wenjuan Liu, Yan Liu, Shishang Guo, Chengliang Sun

Journal of Micromechanics and Microengineering

DOI

2024

Suppression of spurious modes in lateral-excited bulk acoustic wave resonators using piston mode electrodes

Jieyu Liu, Wenjuan Liu, Zhiwei Wen, Xin Tong, Yan Liu, Yao Cai, Chengliang Sun

Applied Physics Letters

DOI

2024

Analysis of lattice deformation originated from residual stress on performance of aluminum nitride-based bulk acoustic wave resonators

Xiyu Gu, Yan Liu, Yuanhang Qu, Min Wei, Xiang Chen, Yaxin Wang, Wenjuan Liu, Pi Bensong, Bo Woon Soon, Yao Cai, Shishang Guo, Chengliang Sun

Composite Structures

DOI

2024

MEMS Oscillators‐Network‐Based Ising Machine with Grouping Method

Yi Deng, Yi Zhang, Xinyuan Zhang, Yang Jiang, Xi Chen, Yansong Yang, Xin Tong, Yao Quan Cai, Wenjuan Liu, Chengliang Sun, Dashan Shang, Qing Wang, Hongyu Yu, Zhongrui Wang

Advanced Science

DOI

2024

Adjustable effective electromechanical coupling of Lamb wave resonator using AlN/Sc0.096Al0.904N composite films

Xiang Chen, Yan Liu, Yuanhang Qu, Tiancheng Luo, Xiyu Gu, Jiaqi Ding, Xiaoming Huang, Yao Cai, Wenjuan Liu, Shishang Guo, Chengliang Sun

Japanese Journal of Applied Physics

DOI

2024

High figure-of-merit A1-mode lamb wave resonators operating around 6 GHz based on the LiNbO3 thin film

Xin Tong, Wenjuan Liu, Zhiwei Wen, Zesheng Liu, Qinwen Xu, Yang Zou, Chao Gao, Jie Zhou, Yan Liu, Yao Cai, Chengliang Sun

Journal of Physics D Applied Physics

DOI

2024

A Sc0.096Al0.904N-Based Bimorph Piezoelectric MEMS Microphone Using 3 × 3 Circular Diaphragms

Bohao Hu, Wenjuan Liu, Yan Liu, Chaoxiang Yang, Zekai Wang, Liangyu Lu, Yao Cai, Shishang Guo, Chengliang Sun

IEEE Transactions on Electron Devices

DOI

2024

Advanced technologies of FBAR for tuning effective electromechanical coupling coefficient

Yuanhang Qu, Yan Liu, Xiyu Gu, Min Wei, Xiang Chen, Xiaoming Huang, Zesheng Liu, Jiaqi Ding, Zhiwei Wen, Yao Cai, Wenjuan Liu, Shishang Guo, Chengliang Sun

Applied Physics Letters

DOI

2024

A High Q Lamb Wave Resonator with Dummy Toes Based on 20% ScAlN Film

Sijie Yang, Wenjuan Liu, Zhiwei Wen, Yao Cai, Yan Liu, Chengliang Sun

Journal of Physics, Conference Series

DOI

2024

Analysis of Heterostructure Formation of Abnormally Oriented Grains in Sputter-Deposited AlScN Films and Its Impact on Bulk Acoustic Wave Devices.

Xiyu Gu, Yan Liu, Xiao-Ming Huang, Jia-Qi Ding, Yuan-Hang Qu, Zesheng Liu, Yao Cai, Wenjuan Liu, Shi-Shang Guo, Chengliang Sun

ACS Applied Materials and Interfaces

DOI

2024

Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator

Xiyu Gu, Yan Liu, Yuan-Hang Qu, Xiang Chen, Zesheng Liu, Yao Cai, Wenjuan Liu, Shi-Shang Guo, Chengliang Sun

Microsystems & Nanoengineering

DOI

2024

AlN/ScAlN composite films-based spurious free A1 mode lamb wave resonator with adjustable effective electromechanical coupling coefficient

Zesheng Liu, Yan Liu, Xiang Chen, Ying Xie, Yuan-Hang Qu, Xiyu Gu, Xin Tong, Hai-Yang Li, Wenjuan Liu, Yao Cai, Shi-Shang Guo, Chengliang Sun

Journal of Physics D: Applied Physics

DOI

2024

A High Power-handling Laterally-excited Bulk Acoustic Resonator with Scattering Vias in Double-layer Electrodes over +35 dBm

Zhiwei Wen, Wenjuan Liu, Min Zeng, Sijie Yang, Yuan-Hang Qu, Yao Cai, Yan Liu, Chengliang Sun

2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

DOI

2024

Laterally Excited Bulk Acoustic Resonators with Convex Interdigital Electrodes towards SHF Applications

Zhiwei Wen, Wenjuan Liu, Min Zeng, Xin Tong, Yuan-Hang Qu, Yan Liu, Yao Cai, Chengliang Sun

2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM)

DOI

2024

Theoretical Analysis and Verification on ScAlN-Based Piezoelectric Micromachined Ultrasonic Transducers With DC Bias

Ze-Kai Wang, Wenjuan Liu, Bohao Hu, Yu-Hao Xiao, Chaoxiang Yang, Liangyu Lu, Yao Cai, Yan Liu, Chengliang Sun

Journal of microelectromechanical systems

DOI

2023

Analysis and measurement of high frequency piezoelectric ring resonator

Tingting Yang, Yao Cai, Chao Gao, Qinwen Xu, Yang Zou, Yan Liu, Wenjuan Liu, Cheng Lei, Chengliang Sun

Applied Physics Express

DOI

2023

6 GHz Lithium Niobate Lamb Wave Resonators with A High Quality Factor Implemented by Groove Structures

Xin Tong, Yao Cai, Zhiwei Wen, Qinwen Xu, Wenjuan Liu, Yan Liu, Bo Woon Soon, Chengliang Sun

IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)

DOI

2023

A ScAlN-Based Piezoelectric MEMS Microphone With Sector-Connected Cantilevers

Bohao Hu, Wenjuan Liu, Chaoxiang Yang, Liangyu Lu, Zekai Wang, Yan Liu, Yao Cai, Jian Wang, Shishang Guo, Chengliang Sun

Journal of Microelectromechanical Systems

DOI

2023

Development of Temperature Sensor Based on AlN/ScAlN SAW Resonators

Min Wei, Yan Liu, Yuanhang Qu, Xiyu Gu, Yilin Wang, Wenjuan Liu, Yao Cai, Shishang Guo, Chengliang Sun

Electronics

DOI

2023

Effects of growth temperature and reactor pressure on AlN thin film grown by metal-organic chemical vapor deposition

Binghui Lin, Yao Cai, Yaxin Wang, Yang Zou, Chao Gao, Yan Liu, Wenjuan Liu, Shishang Guo, Chengliang Sun

Thin Solid Films

DOI

2023

A laterally excited bulk acoustic resonator with scattering vias in electrodes

Zhiwei Wen, Wenjuan Liu, Tiancheng Luo, Xin Tong, Ying Xie, Xiyu Gu, Yan Liu, Yao Cai, Shishang Guo, Jian Wang, Chengliang Sun

Applied Physics Letters

DOI

2023

High crystal quality and low residual stress composite piezoelectric films prepared by a two-step method

Binghui Lin, Yao Cai, Yaxin Wang, Chao Gao, Gai Wu, Yan Liu, Wenjuan Liu, Daw Don Cheam, Chengliang Sun

Journal of Micromechanics and Microengineering

DOI

2023

Study of High-Q Laterally Excited Bulk Wave Resonator With Smaller Gap-Width Reflectors

Xiyu Gu, Yan Liu, Ying Xie, Zhiwei Wen, Yuanhang Qu, Wenjuan Liu, Yao Cai, Shishang Guo, Chengliang Sun

IEEE Electron Device Letters

DOI

2023

Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO3 membrane-based laterally-excited bulk acoustic resonator

Jie Zhou, Yuchen Fan, Xin Tong, Tiancheng Luo, Jieyu Liu, Yang Zou, Wenjuan Liu, Yan Liu, Jeffrey Bo Woon Soon, Yao Cai, Chengliang Sun

Journal of Micromechanics and Microengineering

DOI

2023

Effective electromechanical coupling coefficient ( keff2 ) enhancement of a Lamb wave resonator with trapezoid grooves configuration

Yuchen Fan, Jie Zhou, Qinwen Xu, Xin Tong, Ying Xie, Yang Zou, Jiaqi Ding, Chao Gao, Binghui Lin, Wenjuan Liu, Yan Liu, Yao Cai, Chengliang Sun

Applied Physics Express

DOI

2023

Design and Analysis of Lithium–Niobate-Based Laterally Excited Bulk Acoustic Wave Resonator with Pentagon Spiral Electrodes

Ying Xie, Wenjuan Liu, Yao Cai, Zhiwei Wen, Tiancheng Luo, Yan Liu, Chengliang Sun

Micromachines

DOI

2023

Quality Factor Enhancement of Laterally-excited Bulk Acoustic Resonators with Reflectors

Xin Tong, Yao Cai, Zhiwei Wen, Jieyu Liu, Yan Liu, B. Soon, Wenjuan Liu, Chengliang Sun

IUS

DOI

2023

High Figure-of-Merit LiNbO3 Lamb Wave Resonators Implemented by Two-Dimensional Bulk Reflector Arrays

Xin Tong, Wenjuan Liu, Zhiwei Wen, Jieyu Liu, Jie Zhou, Yan Liu, Chengliang Sun, Yao Cai

IUS

DOI

2023

A Novel SAW Resonator with Anti-Groove Structure Based on Heterogeneous Substrate

Binghui Lin, Yan Liu, T. Luo, Yaxin Wang, Chao Gao, Yang Zou, Wenjuan Liu, Yao Cai, Chengliang Sun

IUS

DOI

2023

Design, Fabrication, and Characterization of Aluminum Scandium Nitride-Based Thin Film Bulk Acoustic Wave Filter

Yang Zou, Yao Cai, Chao Gao, T. Luo, Yan Liu, Qin-Wen Xu, Yaxin Wang, Laixia Nian, Wenjuan Liu, J. Soon, Chengliang Sun

Journal of microelectromechanical systems

DOI

2023

Heterostructure-Based Surface Acoustic Wave Resonator for Gas Sensing

Binghui Lin, Min Wei, Yuan-Hang Qu, Xiyu Gu, Wenjuan Liu, Yan Liu, Yao Cai, Chengliang Sun

IUS

DOI

2023

A Novel 2D Phononic Crystal-based Laterally-excited Bulk Wave Resonator

Ronghui Wang, Wenjuan Liu, Zhiwei Wen, Haoyang Su, Yao Cai, Yan Liu, Chengliang Sun

IUS

DOI

2023

A Spurious-free Laterally-excited Bulk Acoustic Resonator with Ring-shaped Interdigital Electrodes

Min Zeng, Wenjuan Liu, Zhiwei Wen, T. Luo, Yao Cai, Yan Liu, Chengliang Sun

IUS

DOI

2023

A High Q 6.203 GHz Laterally-excited Bulk Acoustic Resonator with Reflective Grids

Zhiwei Wen, Wenjuan Liu, Xin Tong, Jian Wang, Shi-Shang Guo, Yan Liu, Yao Cai, Chengliang Sun

IUS

DOI

2023

A Tunable Dual-mode Lamb Wave Resonator with Floating Electrodes

Zhiwei Wen, Xiyu Gu, Yao Cai, T. Luo, Xin-Yi Tong, Wenjuan Liu, Yuan-Hang Qu, Yan Liu, Chengliang Sun

IEEE International Conference on Nano/Micro Engineered and Molecular Systems

DOI

2022

Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications

Yang Zou, Chao Gao, Jie Zhou, Yan Liu, Qinwen Xu, Yuanhang Qu, Wenjuan Liu, Jeffrey Bo Woon Soon, Yao Cai, Chengliang Sun

Microsystems & Nanoengineering

DOI

2022

A Laterally Excited Bulk Acoustic Wave Resonator towards High Figure-of-Merit in Radio-Frequency Applications

Xin Tong, Jie Zhou, Zhiwei Wen, Yuchen Fan, Jieyu Liu, Yan Liu, Wenjuan Liu, Bo Woon Soon, Yao Quan Cai, Chengliang Sun

IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)

DOI

2022

Influence of electrode metallization rate on the effective electromechanical coefficient of AlN checker-mode lamb wave resonator

Xin Tong, Jieyu Liu, Jie Zhou, Qinwen Xu, Binghui Lin, Yan Liu, Bo Woon Soon, Wenjuan Liu, Yao Cai, Chengliang Sun

Japanese Journal of Applied Physics

DOI

2022

A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure

Chaoxiang Yang, Bohao Hu, Liangyu Lu, Zekai Wang, Wenjuan Liu, Chengliang Sun

Micromachines

DOI

2022

Laterally-excited bulk acoustic wave resonator with an adjustable piezoelectric coupling coefficient

Zhiwei Wen, Qinwen Xu, Jieyu Liu, Yuanhang Qu, Yan Liu, Wenjuan Liu, Bo Woon Soon, Yao Cai, Chengliang Sun

Japanese Journal of Applied Physics

DOI

2022

Micromechanics predictions of effective elastic, piezoelectric and dielectric properties of composite piezoelectric films

Liwenjuan Li, Xiyu Gu, Chao Gao, Shaohua Hu, Yaxin Wang, Yang Zou, Yan Liu, Wenjuan Liu, Yao Cai, Chengliang Sun

Applied Physics Express

DOI

2022

A High-Sensitivity Gravimetric Biosensor Based on S1 Mode Lamb Wave Resonator

Tiancheng Luo, Wenjuan Liu, Zhiwei Wen, Ying Xie, Xin Tong, Yao Cai, Yan Liu, Chengliang Sun

Sensors

DOI

2022

Effects of Electric Bias on Different Sc-Doped AlN-Based Film Bulk Acoustic Resonators

Yaxin Wang, Yang Zou, Chao Gao, Xiyu Gu, Ye Ma, Yan Liu, Wenjuan Liu, Jeffrey Bo Woon Soon, Yao Cai, Chengliang Sun

Electronics

DOI

2022

Tunable Electromechanical Coupling Coefficient of a Laterally Excited Bulk Wave Resonator with Composite Piezoelectric Film

Ying Xie, Yan Liu, Jieyu Liu, Lei Wang, Wenjuan Liu, Bo Woon Soon, Yao Cai, Chengliang Sun

Micromachines

DOI

2022

Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator

Chao Gao, Yang Zou, Jie Zhou, Yan Liu, Wenjuan Liu, Yao Cai, Chengliang Sun

Micromachines

DOI

2022

Piston-Mode pMUT With Mass Load

Lei Wang, Jie Zhou, Wei Zhu, Zhipeng Wu, Wenjuan Liu, Chengliang Sun

IEEE Journal of the Electron Devices Society

DOI

2022

Tuning Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducers Using DC Bias Voltage

Zhi-Peng Wu, Wenjuan Liu, Zhihao Tong, Yao Cai, Chengliang Sun, Liang Lou

IEEE Transactions on Electron Devices

DOI

2022

Design and Optimization of the Dual-Mode Lamb Wave Resonator and Dual-Passband Filter

T. Luo, Yan Liu, Yang Zou, Jie Zhou, Wenjuan Liu, Guo-qiang Wu, Yao Cai, Chengliang Sun

Micromachines

DOI

2022

Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible Keff2

Laixia Nian, Yang Zou, Chao Gao, Yu Zhou, Yuchen Fan, Jian Wang, Wenjuan Liu, Yan Liu, J. Soon, Yao Cai, Chengliang Sun

Micromachines

DOI

2022

High-Quality Single-Crystal Piezoelectric Aluminum Nitride Grown on Gallium Nitride Transition Layer on Sapphire Substrate

Binghui Lin, Yan Liu, Qin-Wen Xu, Xin-Yi Tong, Laixia Nian, Wenjuan Liu, B. Soon, Yao Cai, Chengliang Sun

IUS

DOI

2022

High-Q A0 Mode Plate Wave Resonator on X-cut LiNbO3 Films with Dummy Electrode Arrays

Qin-Wen Xu, Tong Xin, Zhiwei Wen, Yan Liu, Yao Cai, B. Soon, Wenjuan Liu, Chengliang Sun

IUS

DOI

2022

AlN/Al0.8Sc0.2N film S0 mode lamb wave resonator with spurious mode suppression

Qin-Wen Xu, Jie Zhou, Yan Liu, Yang Zou, Wenjuan Liu, Yao Cai, Chengliang Sun

Journal of Applied Physics

DOI

2022

Bimorph Piezoelectric MEMS Microphone with Tractive Structure

Chaoxiang Yang, Bohao Hu, Liangyu Lu, Yaxin Wang, Yao Cai, Yan Liu, Wenjuan Liu, Chengliang Sun

IUS

DOI

2021

High Sensitivity Piezoelectric MEMS Microphones Based on AlN with Cavity-SOI

Bohao Hu, Binghui Lin, Wenjuan Liu, Chengliang Sun

IEEE International Ultrasonics Symposium

DOI

2021

Lithium Niobate Thin Film Based A3 Mode Resonators with High Effective Coupling Coefficient of 6.72%

Yi Zhang, Liang Wang, Yang Zou, Qinwen Xu, Jieyu Liu, Qing Wang, Alexander Tovstopyat, Wenjuan Liu, Chengliang Sun, Hongyu Yu

Proceedings, IEEE micro electro mechanical systems

DOI

2021

Lithium Niobate Film Based Acoustic Wave Resonator with Arc Shaped Electrodes

Jieyu Liu, Xin-Yi Tong, Jie Zhou, Yan Liu, Wenjuan Liu, Yao Cai, Chengliang Sun

IUS

DOI

2021

A Way to Increase Q of FBARs Using Supporting Column

Yuan-Hang Qu, Yang Zou, Chao Gao, Zhiwei Wen, Wenjuan Liu, Yao Cai, Cheng Sun

IUS

DOI

2021

A Broadband Piezoelectric Micromachined Acoustic Transducer with Variable Mass Loading

Binghui Lin, Bohao Hu, Wenjuan Liu, Chengliang Sun

IUS

DOI

2021

A Novel Transfer Function Based Ring-Down Suppression System for PMUTs

Zhi-Peng Wu, Wenjuan Liu, Zhihao Tong, Songsong Zhang, Y. Gu, Guoqiang Wu, Alexander Tovstopyat, Chengliang Sun, Liang Lou

Italian National Conference on Sensors

DOI

2021

ScAlN/AlN Film-Based Lamé Mode Resonator With High Effective Electromechanical Coupling Coefficient

Jie Zhou, Yan Liu, Qin-Wen Xu, Ying Xie, Yao Cai, Jieyu Liu, Wenjuan Liu, Alexander Tovstopyat, Chengliang Sun

Journal of microelectromechanical systems

DOI

2021

A Novel Piezoelectric Micromachined Ultrasonic Transducer with Adjustable Broad and Flat Frequency Band

Lei Wang, Wei Zhu, Zhi-Peng Wu, Wenjuan Liu, Chengliang Sun

IEEE International Conference on Nano/Micro Engineered and Molecular Systems

DOI

2021

A Novel Tri-Axial Piezoelectric MEMS Accelerometer with Folded Beams

Yan Liu, Bohao Hu, Yao Cai, Wenjuan Liu, Alexander Tovstopyat, Chengliang Sun

Italian National Conference on Sensors

DOI

2021

Broadband Piezoelectric Micromachined Ultrasonic Transducer With a Resonant Cavity

Wei Zhu, Lei Wang, Zhi-Peng Wu, Wenjuan Liu, Chengliang Sun

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

DOI

2021

A Novel Trapezoidal ScAlN/AlN-Based MEMS Piezoelectric Accelerometer

Bohao Hu, Yan Liu, Binghui Lin, Guo-qiang Wu, Wenjuan Liu, Chengliang Sun

IEEE Sensors Journal

DOI

2021

A Novel Broadband Piezoelectric Micromachined Ultrasonic Transducer with Resonant Cavity

Lei Wang, Wei Zhu, Zhi-Peng Wu, Wenjuan Liu, Chengliang Sun

IUS

DOI

2021

A High Q Value ScAlN/AlN-Based SAW Resonator for Load Sensing

Binghui Lin, Yan Liu, Yao Cai, Jie Zhou, Yang Zou, Yi Zhang, Wenjuan Liu, Chengliang Sun

IEEE Transactions on Electron Devices

DOI

2021

A Novel Coupled Piezoelectric Micromachined Ultrasonic Transducer Based on Piston Mode

Lei Wang, Wei Zhu, Zhi-Peng Wu, Wenjuan Liu, Chengliang Sun

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

DOI

2021

Design and Performance of ScAlN/AlN Trapezoidal Cantilever-Based MEMS Piezoelectric Energy Harvesters

Yan Liu, Bohao Hu, Yao Cai, Jie Zhou, Wenjuan Liu, Alexander Tovstopyat, Guoqiang Wu, Chengliang Sun

IEEE Transactions on Electron Devices

DOI

2021

A Novel Piston-Like Piezoelectric Micromachined Ultrasonic Transducer Based on Mass Loading Effect

Lei Wang, Jie Zhou, Wei Zhu, Zhi-Peng Wu, Wenjuan Liu, Chengliang Sun

IEEE Electron Devices Technology and Manufacturing Conference

DOI

2020

Dual-mode thin film bulk acoustic wave resonator and filter

Yang Zou, Laixia Nian, Yao Cai, Yan Liu, Alexander Tovstopyat, Wenjuan Liu, Chengliang Sun

DOI

2014

一种用于安全芯片的高性能温度监测传感器设计

刘文娟，赵毅强，李雪民，赵国芬

《传感器与微系统》

2013

基于长线列探测器的图像非均匀性研究与校正

徐敏，赵毅强，刘文娟

《传感器与微系统》

精选作品

期刊论文

High-Coupling Thickness-Shear Mode Solidly Mounted Resonator Using Y-cut LiNbO 3 Thin Film via Transfer Bonding

Miniaturized ScAlN Bimorph MEMS Microphone With Windmill Structure Achieving 61.2 dB SNR

Sub-6 GHz acoustic filters using laterally-excited bulk acoustic resonator with scattering vias in double-layer electrodes

Stress-Amplified Piezoelectric MEMS Microphone with Concave-Convex Rings

Laterally Excited Bulk Acoustic Wave Resonators with Rotated Electrodes Using X-Cut LiNbO3 Thin-Film Substrates

Lithium niobate-based laterally excited bulk acoustic resonator with wave-shaped electrodes and its filter

A 6-GHz XBAR Filter Using Trapezoidal Electrodes Based on LiNbO3 Thin Films

A Temperature-Compensated Dual-Band Passdand Filter Based on Lithium Niobate Thin Films

Sc₀.₁Al₀.₉N-Based Bimorph Piezoelectric MEMS Microphones With Tractive Structures

A near spurious-free 6 GHz laterally-excited bulk acoustic resonator with single-sided wavy electrodes

Laterally Excited Bulk Acoustic Resonators With Grooves Between Interdigital Electrodes

A Laterally Excited Bulk Acoustic Wave Resonator Based on LiNbO3 with Arc-Shaped Electrodes

SC0.096Al0.904N-based Bimorph Piezoelectric Micro Machined Ultrasonic Transducers

6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes

Effects of interlayer SiO2 or Au on the performances of LNOS-SAW

A piezoelectric MEMS microphone with proof mass and its array

A scandium doped aluminum nitride thin film bulk acoustic resonator

Suppression of spurious modes in lateral-excited bulk acoustic wave resonators using piston mode electrodes

Analysis of lattice deformation originated from residual stress on performance of aluminum nitride-based bulk acoustic wave resonators

MEMS Oscillators‐Network‐Based Ising Machine with Grouping Method

Adjustable effective electromechanical coupling of Lamb wave resonator using AlN/Sc0.096Al0.904N composite films

High figure-of-merit A1-mode lamb wave resonators operating around 6 GHz based on the LiNbO3 thin film

A Sc0.096Al0.904N-Based Bimorph Piezoelectric MEMS Microphone Using 3 × 3 Circular Diaphragms

Advanced technologies of FBAR for tuning effective electromechanical coupling coefficient

A High Q Lamb Wave Resonator with Dummy Toes Based on 20% ScAlN Film

Analysis of Heterostructure Formation of Abnormally Oriented Grains in Sputter-Deposited AlScN Films and Its Impact on Bulk Acoustic Wave Devices.

Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator

AlN/ScAlN composite films-based spurious free A1 mode lamb wave resonator with adjustable effective electromechanical coupling coefficient

A High Power-handling Laterally-excited Bulk Acoustic Resonator with Scattering Vias in Double-layer Electrodes over +35 dBm

Laterally Excited Bulk Acoustic Resonators with Convex Interdigital Electrodes towards SHF Applications

Theoretical Analysis and Verification on ScAlN-Based Piezoelectric Micromachined Ultrasonic Transducers With DC Bias

Analysis and measurement of high frequency piezoelectric ring resonator

6 GHz Lithium Niobate Lamb Wave Resonators with A High Quality Factor Implemented by Groove Structures

A ScAlN-Based Piezoelectric MEMS Microphone With Sector-Connected Cantilevers

Development of Temperature Sensor Based on AlN/ScAlN SAW Resonators

Effects of growth temperature and reactor pressure on AlN thin film grown by metal-organic chemical vapor deposition

A laterally excited bulk acoustic resonator with scattering vias in electrodes

High crystal quality and low residual stress composite piezoelectric films prepared by a two-step method

Study of High-Q Laterally Excited Bulk Wave Resonator With Smaller Gap-Width Reflectors

Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO3 membrane-based laterally-excited bulk acoustic resonator

Effective electromechanical coupling coefficient ( keff2 ) enhancement of a Lamb wave resonator with trapezoid grooves configuration

Design and Analysis of Lithium–Niobate-Based Laterally Excited Bulk Acoustic Wave Resonator with Pentagon Spiral Electrodes

Quality Factor Enhancement of Laterally-excited Bulk Acoustic Resonators with Reflectors

High Figure-of-Merit LiNbO3 Lamb Wave Resonators Implemented by Two-Dimensional Bulk Reflector Arrays

A Novel SAW Resonator with Anti-Groove Structure Based on Heterogeneous Substrate

Design, Fabrication, and Characterization of Aluminum Scandium Nitride-Based Thin Film Bulk Acoustic Wave Filter

Heterostructure-Based Surface Acoustic Wave Resonator for Gas Sensing

A Novel 2D Phononic Crystal-based Laterally-excited Bulk Wave Resonator

A Spurious-free Laterally-excited Bulk Acoustic Resonator with Ring-shaped Interdigital Electrodes

A High Q 6.203 GHz Laterally-excited Bulk Acoustic Resonator with Reflective Grids

A Tunable Dual-mode Lamb Wave Resonator with Floating Electrodes

Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications

A Laterally Excited Bulk Acoustic Wave Resonator towards High Figure-of-Merit in Radio-Frequency Applications

Influence of electrode metallization rate on the effective electromechanical coefficient of AlN checker-mode lamb wave resonator

A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure

Laterally-excited bulk acoustic wave resonator with an adjustable piezoelectric coupling coefficient

Micromechanics predictions of effective elastic, piezoelectric and dielectric properties of composite piezoelectric films

A High-Sensitivity Gravimetric Biosensor Based on S1 Mode Lamb Wave Resonator

Effects of Electric Bias on Different Sc-Doped AlN-Based Film Bulk Acoustic Resonators

Tunable Electromechanical Coupling Coefficient of a Laterally Excited Bulk Wave Resonator with Composite Piezoelectric Film

Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator

Piston-Mode pMUT With Mass Load

Tuning Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducers Using DC Bias Voltage

Design and Optimization of the Dual-Mode Lamb Wave Resonator and Dual-Passband Filter

Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible Keff2

High-Quality Single-Crystal Piezoelectric Aluminum Nitride Grown on Gallium Nitride Transition Layer on Sapphire Substrate

High-Q A0 Mode Plate Wave Resonator on X-cut LiNbO3 Films with Dummy Electrode Arrays

AlN/Al0.8Sc0.2N film S0 mode lamb wave resonator with spurious mode suppression

Bimorph Piezoelectric MEMS Microphone with Tractive Structure

High Sensitivity Piezoelectric MEMS Microphones Based on AlN with Cavity-SOI

Lithium Niobate Thin Film Based A3 Mode Resonators with High Effective Coupling Coefficient of 6.72%

Lithium Niobate Film Based Acoustic Wave Resonator with Arc Shaped Electrodes

A Way to Increase Q of FBARs Using Supporting Column

A Broadband Piezoelectric Micromachined Acoustic Transducer with Variable Mass Loading

A Novel Transfer Function Based Ring-Down Suppression System for PMUTs

ScAlN/AlN Film-Based Lamé Mode Resonator With High Effective Electromechanical Coupling Coefficient

A Novel Piezoelectric Micromachined Ultrasonic Transducer with Adjustable Broad and Flat Frequency Band

A Novel Tri-Axial Piezoelectric MEMS Accelerometer with Folded Beams