张嵩松｜上海大学｜学者主页

2024

Ablation for malignant liver tumor using high-intensity focused ultrasound and radio-frequency: A meta-analysis

Xing Lai, Songsong Zhang, Jian-Ping Gong, Rong Ma

Technology and Health Care

DOI

2024

A High-Performance Micro Differential Pressure Sensor

Xutao Fan, Lei Wang, Songsong Zhang

Micromachines

DOI

2024

Development of PMUT based ultrasonic gas flowmeter with conical transducer cavities for the validation of industrial standards

Chengguang Liu, Xueying Xiu, Haochen Lyu, Haolin Yang, Songsong Zhang

Sensors and Actuators A Physical

DOI

2024

An Analytical Method for the Enhancement of Electromechanical Coupling of Piezoelectric Micromachined Ultrasonic Transducers Combined with Pre-Stress

Guangzheng Deng, Haochen Lyu, Haolin Yang, Songsong Zhang

Proceedings, IEEE micro electro mechanical systems

DOI

2024

Demonstration of MHz Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) Array and the Potential Application in Biomedical Therapies

Dengke Wang, Yucheng Ji, Shaokun Wang, Haochen Lyu, Songsong Zhang

Proceedings, IEEE micro electro mechanical systems

DOI

2023

Stepped-Tube Backside Cavity Piezoelectric Ultrasound Transducer Based on Sc0.2AI0.8N Thin Films

Xiaobao Li, Haochen Lyu, A. Safari, Songsong Zhang

Micromachines

DOI

2023

A Highly Integrated 3D MEMS Force Sensing Module With Variable Sensitivity for Robotic‐Assisted Minimally Invasive Surgery

Cheng Hou, Kai‐Yao Wang, Fengxia Wang, Hanyang Li, Liang Lou, Songsong Zhang, Yuandong Alex Gu, Huicong Liu, Tao Chen, Lining Sun

Advanced Functional Materials

DOI

2023

Development of high uniformity Al1-xScxN piezoelectric film stack dry etching process on 8-inch silicon wafers

Jiahui Yan, Yongxin Zhou, Songsong Zhang

Vacuum

DOI

2022

Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections

Meilin Ji, Haolin Yang, Yongxin Zhou, Xueying Xiu, Haochen Lv, Songsong Zhang

Micromachines

DOI

2022

Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array

Xueying Xiu, Haolin Yang, Meilin Ji, Haochen Lv, Songsong Zhang

Micromachines

DOI

2022

AlScN Film Based Piezoelectric Micromechanical Ultrasonic Transducer for an Extended Long-Range Detection

Haolin Yang, Meilin Ji, Xueying Xiu, Haochen Lv, Yuandong Alex Gu, Songsong Zhang

Micromachines

DOI

2022

Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging

Junxiang Cai, Yiyun Wang, Daohuai Jiang, Songsong Zhang, Yuandong Alex Gu, Liang Lou, Fei Gao, Tao Wu

Microsystems & Nanoengineering

DOI

2022

Nondestructive Wafer Level MEMS Piezoelectric Device Thickness Detection

Yongxin Zhou, Yuandong Alex Gu, Songsong Zhang

Micromachines

DOI

2022

Ultra-wide band and improved quality factor SH-type SAW devices by employing Mn-doped Pb(In1/2Nb1/2)O3– Pb(Mg1/3Nb2/3)O3–PbTiO3 thin film/diamond layered structure

Jian Wang, Qiaozhen Zhang, Xiangyong Zhao, Huiling Liu, Songsong Zhang, Yuandong Alex Gu

Diamond and Related Materials

DOI

2022

Nonlinearity of Piezoelectric Micromachined Ultrasonic Transducer Using AlN Thin Film

Zhifang Luo, Junxiang Cai, Songsong Zhang, Yuandong Alex Gu, Liang Lou, Tao Wu

IEEE Open Journal of Ultrasonics Ferroelectrics and Frequency Control

DOI

2021

A Flexible Ultrasonic Sensor Based on Piezoelectric Micromachined Ultrasonic Transducers (pMUTs)

Zhihao Tong, Zhipeng Wu, Songsong Zhang, Huicong Liu, Liang Lou

International Conference on Electronic Packaging Technology (ICEPT)

DOI

张嵩松

精选作品

期刊论文

Ablation for malignant liver tumor using high-intensity focused ultrasound and radio-frequency: A meta-analysis

A High-Performance Micro Differential Pressure Sensor

Development of PMUT based ultrasonic gas flowmeter with conical transducer cavities for the validation of industrial standards

An Analytical Method for the Enhancement of Electromechanical Coupling of Piezoelectric Micromachined Ultrasonic Transducers Combined with Pre-Stress

Demonstration of MHz Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) Array and the Potential Application in Biomedical Therapies

Stepped-Tube Backside Cavity Piezoelectric Ultrasound Transducer Based on Sc0.2AI0.8N Thin Films

A Highly Integrated 3D MEMS Force Sensing Module With Variable Sensitivity for Robotic‐Assisted Minimally Invasive Surgery

Development of high uniformity Al1-xScxN piezoelectric film stack dry etching process on 8-inch silicon wafers

Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections

Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array

AlScN Film Based Piezoelectric Micromechanical Ultrasonic Transducer for an Extended Long-Range Detection

Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging

Nondestructive Wafer Level MEMS Piezoelectric Device Thickness Detection

Ultra-wide band and improved quality factor SH-type SAW devices by employing Mn-doped Pb(In1/2Nb1/2)O3– Pb(Mg1/3Nb2/3)O3–PbTiO3 thin film/diamond layered structure

Nonlinearity of Piezoelectric Micromachined Ultrasonic Transducer Using AlN Thin Film

A Flexible Ultrasonic Sensor Based on Piezoelectric Micromachined Ultrasonic Transducers (pMUTs)

研究方向