曹坤｜华中科技大学｜学者主页

2026

Alcohol-Mediated Area-Selective Atomic Layer Deposition through Surface Chemical States Modulation

Weizhen Wang, Boxuan Li, Kun Cao, Zilian Qi, Eryan Gu, Yanwei Wen, Bin Shan, Rong Chen

Chemistry of Materials

DOI

2026

Mechanistic Criteria for Area Selective Deposition of Multicomponent Oxide Dielectrics

Eryan Gu, Boxuan Li, Kun Cao, Miao Gong, Zhuhui Lu, Zilian Qi, Weizhen Wang, Yanwei Wen, Bin Shan, Rong Chen

Advanced Functional Materials

DOI

2026

Theoretical insights into the regulation of Pt sintering via Co3O4 nano-islands for enhanced catalysis

Fangwen Ye, Xianbao Duan, Weijing Zhou, Yanan Li, Rongzhi Liu, Kun Cao, Yanwei Wen, Bin Shan

Journal of Catalysis

DOI

2026

Atomic Layer Etching for Extreme Manufacturing: Pushing the Limits of Atomic Scale Precision

Yuqun Feng, Bowen Sun, Fan Yang, Kun Cao, Yuan Gao, Bin Shan, Fred Roozeboom, Rong Chen

Nanomanufacturing and Metrology

DOI

2025

基于DFT的Cu/SiO2衬底选择性原子层沉积前驱体筛选

葛毅骜，李博轩，文艳伟，曹坤，单斌，陈蓉

《功能材料与器件学报》

DOI

2025

Steric Barriers in Area-Selective Atomic Layer Deposition: Theoretical Insights into Al Precursors on Octadecanethiol-Covered Cu Substrates

Boxuan Li, Eryan Gu, Yiao Ge, Yanwei Wen, Kun Cao, Rong Chen, Bin Shan

The Journal of Physical Chemistry C

DOI

2025

Steric Hindrance and Film Quality in HfO2 Atomic Layer Deposition: Comparative Kinetic Monte Carlo Simulation of TEMA-Hf and HfCp(NMe2)3 Precursors

Haojie Li, Yanwei Wen, Yiao Ge, Qiyuan Ruan, Hongliang Lü, Wanliang Tan, Fangzhou Yu, Zhang Liu, Kun Cao, Bin Shan, Jeffrey Xu, Rong Chen

Chemistry of Materials

DOI

2025

Dual-Oxide Bridge-Trap Structure via Atomic Layer Infiltration for Enhanced Performance of Quantum Dot Photodetector

Tianwei Zhang, Qing Xu, Yilei Zhang, Kun Cao, Rong Chen

Nano Letters

DOI

2025

Defect-Dominated Gas Permeation through High-Barrier Coatings Modeled with Fractional Diffusion Equations

Song Tian, Kun Cao, Yuxing Wan, Lincong Zhang, Xiaodong Zhang, Rong Chen

Industrial & Engineering Chemistry Research

DOI

2025

Atomic-scale passivation strategy for stabilizing tricolor perovskite quantum dots with enhanced photoluminescence

Yilei Zhang, Di Wen, Min Wang, Tianwei Zhang, Kun Cao, Rong Chen

Journal of Information Display

DOI

2024

Area Selective Deposition of Ru on W/SiO2 Nanopatterns via Sequential Reactant Dosing and Thermal Defect Correction

Zilian Qi, Haojie Li, Kun Cao, Eryan Gu, Yanwei Wen, Junzhou Long, Bin Shan, Rong Chen

Chemistry of Materials

DOI

2024

Nucleation Delay in Selective Atomic Layer Deposition: Density Functional Insights Coupled Numerical Nucleation Model

Yanwei Wen, Yuxiao Lan, Haojie Li, Yicheng Li, Kun Cao, Feifeng Wu, Rong Chen, Bin Shan

The Journal of Physical Chemistry C

DOI

2024

Nucleation and Growth Study of Al2O3 Film Fabricated Through Atomic Layer Deposition on Pet Substrate

Wang Li, Jiacheng Hu, Di Wen, Kun Cao, Rong Chen

DOI

2024

Studies on Selective Deposition of SiO2 by Rapid Atomic Layer Deposition

Sicong Shao, Yan Juan Jin, Li Wang, Kun Cao, Rong Chen

DOI

2024

Effect of Al precursor’s properties on interactions with self-assembled monolayers for area selective deposition

Eryan Gu, Yan Juan Jin, Boxuan Li, Huilong Zhou, Zhuhui Lu, Yanwei Wen, Kun Cao, Rong Chen

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI

2024

Exploring the impact of separation wall characteristics on Pt particle sintering inhibition: A theoretical study

Caoran Li, Xianbao Duan, Yuzheng Li, Rongli Ye, Fangwen Ye, Liuqing Chen, Chun Du, Kun Cao, Yuzhi Zhang, Bin Shan

Journal of Catalysis

DOI

2024

Area selective deposition for bottom-up atomic-scale manufacturing

Rong Chen, Eryan Gu, Kun Cao, Jingming Zhang

International Journal of Machine Tools and Manufacture

DOI

2024

CsBr-Triggered Reversible Phase Transition of Perovskite Nanocrystals for Advanced Information Encryption and Decryption

Qing Xu, Tianwei Zhang, Mengjia Liu, Min Wang, Kun Cao, Rong Chen

ACS Applied Materials & Interfaces

DOI

2023

Multi‐Functional Atomically Thin Oxides from Bismuth Liquid Metal

Xiangyang Guo, C. Nguyen, Nitu Syed, A. Ravindran, Md Akibul Islam, T. Filleter, Kun Cao, Yichao Wang, A. Mazumder, Cheng-Long Xu, S. Walia, M. Ghasemian, K. Kalantar-zadeh, S. C. Scholten, I. Robertson, A. J. Healey, J. Tetienne, Teng Lu, Yun Liu, A. Elbourne, T. Daeneke, A. Holland, S. Russo, Yong-Xiang Li, A. Zavabeti

Advanced Functional Materials

DOI

2023

Surface Reaction Kinetics for Inherent Selective Atomic Layer Deposition of Tantalum Oxide

Kun Cao, Zilian Qi, Eryan Gu, Yanwei Wen, Rong Chen

ECS Meeting Abstracts

DOI

2023

Numerical Simulation of Spatial Atomic Layer Deposition on Moving Substrates with Microgrooves and Porous Structures

Zoushuang Li, Kun Cao, Bin Shan, Rong Chen

ECS Meeting Abstracts

DOI

2023

Atomic Layer Deposition for Quantum Dots Displays’ Devices Stabilization

Di Wen, Kun Cao, Eryan Gu, Xuewei Jiang, Yanwei Wen, Rong Chen

ECS Meeting Abstracts

DOI

2023

Selective Atomic Layer Deposition to Extend Moore’s Law and Beyond: Surface Kinetic Tuning for Self-Aligned Growth

Yan Juan Jin, Eryan Gu, Kun Cao, Huilong Zhou, Rong Chen

IEEE International Conference on ASIC (ASICON)

DOI

2023

Self-aligned patterning of tantalum oxide on Cu/SiO2 through redox-coupled inherently selective atomic layer deposition

Yicheng Li, Zilian Qi, Yuxiao Lan, Kun Cao, Yanwei Wen, Jingming Zhang, Eryan Gu, Junzhou Long, Yan Juan Jin, Bin Shan, Rong Chen

Nature Communications

DOI

2023

Atomic layer deposition in advanced display technologies: from photoluminescence to encapsulation

Rong Chen, Kun Cao, Yanwei Wen, Yang Fan, Jian Wang, Xiao Liu, Bin Shan

International Journal of Extreme Manufacturing

DOI

2023

Calibration of a QMS System for High-Sensitivity Gas Permeation Measurement

Runqing Wu, Lincong Zhang, Kun Cao, Song Tian, Xiaodong Zhang, Rong Chen

IEEE Transactions on Instrumentation and Measurement

DOI

2022

Selectivity dependence of atomic layer deposited manganese oxide on the precursor ligands on platinum facets

Yuxiao Lan, Yanwei Wen, Yicheng Li, Jiaqiang Yang, Kun Cao, Bin Shan, Rong Chen

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI

2022

Surface Acidity-Induced Inherently Selective Atomic Layer Deposition of Tantalum Oxide on Dielectrics

Yicheng Li, Yuxiao Lan, Kun Cao, Jingming Zhang, Yanwei Wen, Bin Shan, Rong Chen

Chemistry of Materials

DOI

2022

Advances in Atomic Layer Deposition

Jingming Zhang, Yicheng Li, Kun Cao, Rong Chen

Nanomanufacturing and Metrology

DOI

2022

Stretchable PDMS Encapsulation via SiO2 Doping and Atomic Layer Infiltration for Flexible Displays

Yinghao Zhang, Di Wen, Mengjia Liu, Yun Li, Yuan Lin, Kun Cao, Fan Yang, Rong Chen

Advanced Materials Interfaces

DOI

2022

Acid-mediated phase transition synthesis of stable nanocrystals for high-power LED backlights

Rong Chen, Mengjia Liu, Min Wang, Yinghao Zhang, Bin Shan, Kun Cao

Nanoscale

DOI

2022

MXene-based flexible pressure sensor with piezoresistive properties significantly enhanced by atomic layer infiltration

Zilian Qi, Tianwei Zhang, Xiaodong Zhang, Qing Xu, Kun Cao, Rong Chen

Nano Materials Science

DOI

2022

Atomic layer deposition for advanced nanomanufacturing

Kun Cao, Xiao Liu, Fan Yang, Rong Chen

Science China Technological Sciences

DOI

2022

First-principles study of electronic properties of amine ligand-capped CsPbBr3 surface with organo-metallic alumina precursor treatment

Zhaojie Wang, Liu Zhang, Kun Cao, Yanwei Wen, Rong Chen, Bin Shan

Applied Surface Science

DOI

2022

Promotional Effect of H2 Pretreatment on the CO PROX Performance of Pt1/Co3O4: A First-Principles-Based Microkinetic Analysis

Zhang Liu, Jiaqiang Yang, Yanwei Wen, Yuxiao Lan, Limin Guo, Xi Chen, Kun Cao, Rong Chen, Bin Shan

ACS Applied Materials & Interfaces

DOI

2022

Empirical Model and PSO-Based Algorithm for Efficient Measurement of Gas Permeation Through High Barrier

Zhiping Chen, Kun Cao, Runqing Wu, Lincong Zhang, Xiaodong Zhang, Rong Chen

IEEE Transactions on Instrumentation and Measurement

DOI

2021

金属前驱体区域选择性原子层沉积机制

单斌，蓝宇啸，文艳伟，曹坤，陈蓉

《金属功能材料》

2021

A Predictive Instrument for Sensitive and Expedited Measurement of Ultra-Barrier Permeation

Jianfeng Wanyan, Kun Cao, Zhiping Chen, Yun Li, Chenxi Liu, Runqing Wu, Xiaodong Zhang, Rong Chen

Engineering

DOI

2021

Flexible PDMS/Al2O3 Nanolaminates for the Encapsulation of Blue OLEDs

Yun Li, Yingfei Xiong, Weiran Cao, Qianqian Zhu, Yuan Lin, Yinghao Zhang, Mengjia Liu, Fan Yang, Kun Cao, Rong Chen

Advanced Materials Interfaces

DOI

2021

Inherently Area-Selective Atomic Layer Deposition of Manganese Oxide through Electronegativity-Induced Adsorption

Yicheng Li, Kun Cao, Yuxiao Lan, Jingming Zhang, Miao Gong, Yanwei Wen, Bin Shan, Rong Chen

Molecules

DOI

2021

23.2: Invited Paper: Performance Boosting of Quantum Dots based LED via Atomic Layer Deposition

Binze Zhou, Qinyong Xiang, Yanwei Wen, Kun Cao, Yun Li, Rong Chen

SID Symposium Digest of Technical Papers

DOI

2021

Computational fluid dynamics modeling of spatial atomic layer deposition on microgroove substrates

Zoushuang Li, Kun Cao, Xiaobo Li, Rong Chen

International Journal of Heat and Mass Transfer

DOI

2021

28.3: Stabilization of photoluminescence perovskite nanocrystals via atomic layer deposition and the process influences

ZhiYong Lei, Yao Jing, Binze Zhou, Mengjia Liu, Kun Cao, Xiaodong Zhang, Rong Chen

SID Symposium Digest of Technical Papers

DOI

2021

High Luminance and Stability of Perovskite Quantum Dot Light-Emitting Diodes via ZnBr2 Passivation and an Ultrathin Al2O3 Barrier with Improved Carrier Balance and Ion Diffusive Inhibition

Shicai Geng, Yanwei Wen, Binze Zhou, Zhaojie Wang, Zhaojin Wang, Pengfei Wang, Yao Jing, Kun Cao, Kai Wang, Rong Chen

ACS Applied Electronic Materials

DOI

2021

Bifunctionally faceted Pt/Ru nanoparticles for preferential oxidation of CO in H2

Xudong Du, Yun Lang, Kun Cao, Jiaqiang Yang, Jiaming Cai, Bin Shan, Rong Chen

Journal of Catalysis

DOI

2021

Highly-stable PEN as a gas-barrier substrate for flexible displays via atomic layer infiltration

Yun Li, Di Wen, Yinghao Zhang, Yuan Lin, Kun Cao, Fan Yang, Rong Chen

Dalton Transactions

DOI

2020

基于原子层沉积技术的纳米颗粒表面改性方法（英文）

曹坤，蔡佳明，单斌，陈蓉

Science Bulletin

2020

Dependence of inherent selective atomic layer deposition of FeOx on Pt nanoparticles on the coreactant and temperature

Jiaming Cai, Marc J. M. Merkx, Yuxiao Lan, Yao Jing, Kun Cao, Yanwei Wen, W. M. M. Kessels, Adriaan J. M. Mackus, Rong Chen

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI

2020

Two-Step Hybrid Passivation Strategy for Ultrastable Photoluminescence Perovskite Nanocrystals

Yao Jing, Kun Cao, Binze Zhou, Shicai Geng, Yanwei Wen, Bin Shan, Rong Chen

Chemistry of Materials

DOI

2020

(Invited) Area-Selective Atomic Layer Deposition of Manganese Oxides on Metal−Dielectric Patterns

Yicheng Li, Kun Cao, Rong Chen

ECS Meeting Abstracts

DOI

2020

Nanoscale Encapsulation of Perovskite Nanocrystal Luminescent Films via Plasma-Enhanced SiO2 Atomic Layer Deposition

Yao Jing, Marc J. M. Merkx, Jiaming Cai, Kun Cao, W. M. M. Kessels, Adriaan J. M. Mackus, Rong Chen

ACS Applied Materials & Interfaces

DOI

2020

Effect of Microgroove Structures on the Fluid Dynamics and Film Conformality in Spatial Atomic Layer Deposition of Al2O3

Zoushuang Li, Xiaobo Li, Kun Cao, Rong Chen

ECS Transactions

DOI

2020

Quantum‐Dot Luminescent Microspheres: Atomic Layer Deposition Assisted Encapsulation of Quantum Dot Luminescent Microspheres toward Display Applications (Advanced Optical Materials 12/2020)

Fan Fang, Mengjia Liu, Wei Chen, Hongcheng Yang, Yizun Liu, Xiang Li, Junjie Hao, Bing Xu, Dan Wu, Kun Cao, Wei Lei, Peter Müller‐Buschbaum, Xiao Wei Sun, Rong Chen, Kai Wang

Advanced Optical Materials

DOI

2020

Composite Encapsulation Films with Ultrahigh Barrier Performance for Improving the Reliability of Blue Organic Light‐Emitting Diodes

Yun Li, Kun Cao, Ying Xiong, Huizhi Yang, Yinghao Zhang, Yuan Lin, Binze Zhou, Jing Huang, Rong Chen

Advanced Materials Interfaces

DOI

2020

Dual‐Shelled RbLi(Li3SiO4)2:Eu2+@Al2O3@ODTMS Phosphor as a Stable Green Emitter for High‐Power LED Backlights

Ming Zhao, Kun Cao, Mengjia Liu, Jing Zhang, Rong Chen, Qinyuan Zhang, Zhiguo Xia

Angewandte Chemie

DOI

2020

Atomic Layer Deposition Assisted Encapsulation of Quantum Dot Luminescent Microspheres toward Display Applications

Fan Fang, Mengjia Liu, Wei Chen, Hongcheng Yang, Yizun Liu, Xiang Li, Junjie Hao, Bing Xu, Dan Wu, Kun Cao, Wei Lei, Peter Müller‐Buschbaum, Xiao Wei Sun, Rong Chen, Kai Wang

Advanced Optical Materials

DOI

2020

Interface Engineering of CsPbBr3 Nanocrystal Light‐Emitting Diodes via Atomic Layer Deposition

Binze Zhou, Zhaojie Wang, Shicai Geng, Yun Li, Kai Wang, Kun Cao, Yanwei Wen, Rong Chen

physica status solidi (RRL) - Rapid Research Letters

DOI

2020

Inherently Selective Atomic Layer Deposition and Applications

Kun Cao, Jiaming Cai, Rong Chen

Chemistry of Materials

DOI

2020

Atomically decorating of MnOx on palladium nanoparticles towards selective oxidation of benzyl alcohol with high yield

Jianfeng Yang, Kun Cao, Miao Gong, Bin Shan, Rong Chen

Journal of Catalysis

DOI

2020

Atomic level deposition to extend Moore’s law and beyond

Rong Chen, Yicheng Li, Jiaming Cai, Kun Cao, Han‐Bo‐Ram Lee

International Journal of Extreme Manufacturing

DOI

2020

Particle-Size-Dependent Methane Selectivity Evolution in Cobalt-Based Fischer–Tropsch Synthesis

Xuejin Fang, Bing Liu, Kun Cao, Pengju Yang, Qi Zhao, Feng Jiang, Yuebing Xu, Rong Chen, Xiaohao Liu

ACS Catalysis

DOI

2020

Transient analysis and process optimization of the spatial atomic layer deposition using the dynamic mesh method

Wentao Cong, Zoushuang Li, Kun Cao, Guang Feng, Rong Chen

Chemical Engineering Science

DOI

2020

Surface functionalization on nanoparticles via atomic layer deposition

Kun Cao, Jiaming Cai, Bin Shan, Rong Chen

《中国科学通报：英文版》

DOI

2020

Highly dispersed Pt studded on CoO x nanoclusters for CO preferential oxidation in H 2

Jiaming Cai, Zhang Liu, Kun Cao, Yun Lang, Shengqi Chu, Bin Shan, Rong Chen

Journal of Materials Chemistry A

DOI

2020

Unravelling the selective growth mechanism of AlO x with dimethylaluminum isopropoxide as a precursor in atomic layer deposition: a combined theoretical and experimental study

Jiaqiang Yang, Kun Cao, Quan Hu, Yanwei Wen, Xiao Liu, Rong Chen, Bin Shan

Journal of Materials Chemistry A

DOI

2019

Atomic Scale Composite Oxides Infiltration to Quantum Dot Photodetector with Ultralow Dark Current

Chenchen Jiang, Kun Cao, Binze Zhou, Yanwei Wen, Bin Shan, Rong Chen

ACS Applied Electronic Materials

DOI

2019

Thin film encapsulation for the organic light-emitting diodes display via atomic layer deposition

Yun Li, Yingfei Xiong, Huizhi Yang, Kun Cao, Rong Chen

Journal of materials research/Pratt's guide to venture capital sources

DOI

2019

Nickel catalyst with atomically-thin meshed cobalt coating for improved durability in dry reforming of methane

Kun Cao, Miao Gong, Jianfeng Yang, Jiaming Cai, Shengqi Chu, Zhiping Chen, Bin Shan, Rong Chen

Journal of Catalysis

DOI

2019

Improved NO–CO reactivity of highly dispersed Pt particles on CeO 2 nanorod catalysts prepared by atomic layer deposition

Quan Hu, Kun Cao, Yun Lang, Rong Chen, Shengqi Chu, Liwei Jia, Jun Yue, Bin Shan

Catalysis Science & Technology

DOI

2018

沉积功率和退火工艺对PE-ALD氧化铝薄膜的影响

刘媛媛，杜纯，曹坤，陈蓉，徐湘伦，黄静，单斌

《半导体技术》

2018

Edge-Selective Growth of MCp2 (M = Fe, Co, and Ni) Precursors on Pt Nanoparticles in Atomic Layer Deposition: A Combined Theoretical and Experimental Study

Yanwei Wen, Jiaming Cai, Jie Zhang, Jiaqiang Yang, Lu Shi, Kun Cao, Rong Chen, Bin Shan

Chemistry of Materials

DOI

2018

Bottom up Stabilization of CsPbBr3 Quantum Dots-Silica Sphere with Selective Surface Passivation via Atomic Layer Deposition

Qinyong Xiang, Binze Zhou, Kun Cao, Yanwei Wen, Yun Li, Zhaojie Wang, Chenchen Jiang, Bin Shan, Rong Chen

Chemistry of Materials

DOI

2018

Effect of Ni Content of Ni/γ‐Al2O3 Catalysts Prepared by the Atomic Layer Deposition Method on CO2 Reforming of Methane

Guihui Wang, Fei Luo, Kun Cao, Yuhua Zhang, Jinlin Li, Fuzhen Zhao, Rong Chen, Jingping Hong

Energy Technology

DOI

2018

Selective Passivation of Pt Nanoparticles with Enhanced Sintering Resistance and Activity toward CO Oxidation via Atomic Layer Deposition

Jiaming Cai, Jie Zhang, Kun Cao, Miao Gong, Yun Lang, Xiao Liu, Shengqi Chu, Bin Shan, Rong Chen

ACS Applied Nano Materials

DOI

2018

Development of a scanning probe microscopy integrated atomic layer deposition system for in situ successive monitoring of thin film growth

Kun Cao, Quan Hu, Jiaming Cai, Miao Gong, Jianfeng Yang, Bin Shan, Rong Chen

Review of Scientific Instruments

DOI

2017

Review Article: Catalysts design and synthesis via selective atomic layer deposition

Kun Cao, Jiaming Cai, Xiao Liu, Rong Chen

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI

2017

Nanofence Stabilized Platinum Nanoparticles Catalyst via Facet‐Selective Atomic Layer Deposition

Kun Cao, Lu Shi, Miao Gong, Jiaming Cai, Xiao Liu, Shengqi Chu, Yun Lang, Bin Shan, Rong Chen

Small

DOI

2017

Atomic Layer Deposition of Ni on Cu Nanoparticles for Methanol Synthesis from CO2 Hydrogenation

Fuzhen Zhao, Miao Gong, Kun Cao, Yuhua Zhang, Jinlin Li, Rong Chen

ChemCatChem

DOI

2017

Oxide‐Nanotrap‐Anchored Platinum Nanoparticles with High Activity and Sintering Resistance by Area‐Selective Atomic Layer Deposition

Xiao Liu, Qianqian Zhu, Yun Lang, Kun Cao, Shengqi Chu, Bin Shan, Rong Chen

Angewandte Chemie

DOI

2017

Macroporous SmMn 2 O 5 mullite for NO x -assisted soot combustion

Zijian Feng, Qinhan Liu, Yongjie Chen, Pengfei Zhao, Peng Qi, Kun Cao, Rong Chen, Meiqing Shen, Bin Shan

Catalysis Science & Technology

DOI

2017

Ultrathin CoO x -modified hematite with low onset potential for solar water oxidation

Chun Du, Jun Wang, Xiao Liu, Jie Yang, Kun Cao, Yanwei Wen, Rong Chen, Bin Shan

Physical Chemistry Chemical Physics

DOI

2016

基于选择性原子层沉积方法的催化剂可控制备与性能研究

曹坤

《华中科技大学》

2016

Synthesis of Cerium-Oxide Coated Platinum Core-Shell Structure Catalysts with Enhanced Stability and Activity via Atomic Layer Deposition

Kun Cao, Lu Dan Shi, Jiaming Cai, Bin Shan, Rong Chen

ECS Transactions

DOI

2016

Surface passivation of Fe3O4 nanoparticles with Al2O3 via atomic layer deposition in a rotating fluidized bed reactor

Chen-Long Duan, Deng Zhang, Kun Cao, Hongfeng Yin, Bin Shan, Rong Chen

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI

2016

Atomic layer deposition of nanoparticles on self-assembled monolayer templates: an electrochemistry study

Qianqian Zhu, Kun Cao, Bin Shan, Jiaming Cai, Rong Chen

DOI

2015

Spectroscopic Ellipsometry Characterization of Pd Thin Film Grown by Atomic Layer Deposition

Yihang Zhang, Xueqi Zhou, Kun Cao, Xiuguo Chen, Shiyuan Liu, Bin Shan, Rong Chen

ECS Transactions

DOI

2015

Synthesis of Noble Metal Nanoparticles By Atomic Layer Deposition Utilizing Self-Assembled Monolayers Templates

Qianqian Zhu, Kun Cao, Bin Shan, Rong Chen

ECS Meeting Abstracts

DOI

2015

Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor

Wenjie He, Hai‐Tao Zhang, Zhiyong Chen, Bo Chu, Kun Cao, Bin Shan, Rong Chen

IEEE Transactions on Control Systems Technology

DOI

2015

Controlled Synthesis of Pd/Pt Core Shell Nanoparticles Using Area-selective Atomic Layer Deposition

Kun Cao, Qianqian Zhu, Bin Shan, Rong Chen

Scientific Reports

DOI

2015

Atomically Controllable Pd@Pt Core–Shell Nanoparticles towards Preferential Oxidation of CO in Hydrogen Reactions Modulated by Platinum Shell Thickness

Kun Cao, Xiao Liu, Qianqian Zhu, Bin Shan, Rong Chen

ChemCatChem

DOI

2015

Ellipsometry study on Pd thin film grown by atomic layer deposition with Maxwell–Garnett effective medium approximation model

Yihang Zhang, Xueqi Zhou, Kun Cao, Xiuguo Chen, Deng Zhang, Shiyuan Liu, Bin Shan, Rong Chen

Thin Solid Films

DOI

2015

Tuning the morphology and composition of ultrathin cobalt oxide films via atomic layer deposition

Huang Bin, Kun Cao, Xiao Liu, Lihua Qian, Bin Shan, Rong Chen

RSC Advances

DOI

2014

Promoted Platinum Catalytic Activity and Thermal Stability with Nano-Scale Cobalt Oxide Coating via Atomic Layer Deposition

Kun Cao, Huang Bin, Yihang Zhang, Xiao Liu, Bin Shan, Rong Chen

ECS Transactions

DOI

2013

Ellipsometry Study on Nanoparticles Grown by Atomic Layer Deposition

Xueqi Zhou, Ying Zhang, Zhengqiong Dong, Shiyuan Liu, Chuanwei Zhang, Huang Bin, Kun Cao, Bin Shan, Rong Chen

MRS Proceedings

DOI

精选作品

期刊论文

Alcohol-Mediated Area-Selective Atomic Layer Deposition through Surface Chemical States Modulation

Mechanistic Criteria for Area Selective Deposition of Multicomponent Oxide Dielectrics

Theoretical insights into the regulation of Pt sintering via Co3O4 nano-islands for enhanced catalysis

Atomic Layer Etching for Extreme Manufacturing: Pushing the Limits of Atomic Scale Precision

基于DFT的Cu/SiO2衬底选择性原子层沉积前驱体筛选

Steric Barriers in Area-Selective Atomic Layer Deposition: Theoretical Insights into Al Precursors on Octadecanethiol-Covered Cu Substrates

Steric Hindrance and Film Quality in HfO2 Atomic Layer Deposition: Comparative Kinetic Monte Carlo Simulation of TEMA-Hf and HfCp(NMe2)3 Precursors

Dual-Oxide Bridge-Trap Structure via Atomic Layer Infiltration for Enhanced Performance of Quantum Dot Photodetector

Defect-Dominated Gas Permeation through High-Barrier Coatings Modeled with Fractional Diffusion Equations

Atomic-scale passivation strategy for stabilizing tricolor perovskite quantum dots with enhanced photoluminescence

Area Selective Deposition of Ru on W/SiO2 Nanopatterns via Sequential Reactant Dosing and Thermal Defect Correction

Nucleation Delay in Selective Atomic Layer Deposition: Density Functional Insights Coupled Numerical Nucleation Model

Nucleation and Growth Study of Al2O3 Film Fabricated Through Atomic Layer Deposition on Pet Substrate

Studies on Selective Deposition of SiO2 by Rapid Atomic Layer Deposition

Effect of Al precursor’s properties on interactions with self-assembled monolayers for area selective deposition

Exploring the impact of separation wall characteristics on Pt particle sintering inhibition: A theoretical study

Area selective deposition for bottom-up atomic-scale manufacturing

CsBr-Triggered Reversible Phase Transition of Perovskite Nanocrystals for Advanced Information Encryption and Decryption

Multi‐Functional Atomically Thin Oxides from Bismuth Liquid Metal

Surface Reaction Kinetics for Inherent Selective Atomic Layer Deposition of Tantalum Oxide

Numerical Simulation of Spatial Atomic Layer Deposition on Moving Substrates with Microgrooves and Porous Structures

Atomic Layer Deposition for Quantum Dots Displays’ Devices Stabilization

Selective Atomic Layer Deposition to Extend Moore’s Law and Beyond: Surface Kinetic Tuning for Self-Aligned Growth

Self-aligned patterning of tantalum oxide on Cu/SiO2 through redox-coupled inherently selective atomic layer deposition

Atomic layer deposition in advanced display technologies: from photoluminescence to encapsulation

Calibration of a QMS System for High-Sensitivity Gas Permeation Measurement

Selectivity dependence of atomic layer deposited manganese oxide on the precursor ligands on platinum facets

Surface Acidity-Induced Inherently Selective Atomic Layer Deposition of Tantalum Oxide on Dielectrics

Advances in Atomic Layer Deposition

Stretchable PDMS Encapsulation via SiO2 Doping and Atomic Layer Infiltration for Flexible Displays

Acid-mediated phase transition synthesis of stable nanocrystals for high-power LED backlights

MXene-based flexible pressure sensor with piezoresistive properties significantly enhanced by atomic layer infiltration

Atomic layer deposition for advanced nanomanufacturing

First-principles study of electronic properties of amine ligand-capped CsPbBr3 surface with organo-metallic alumina precursor treatment

Promotional Effect of H2 Pretreatment on the CO PROX Performance of Pt1/Co3O4: A First-Principles-Based Microkinetic Analysis

Empirical Model and PSO-Based Algorithm for Efficient Measurement of Gas Permeation Through High Barrier

金属前驱体区域选择性原子层沉积机制

A Predictive Instrument for Sensitive and Expedited Measurement of Ultra-Barrier Permeation

Flexible PDMS/Al2O3 Nanolaminates for the Encapsulation of Blue OLEDs

Inherently Area-Selective Atomic Layer Deposition of Manganese Oxide through Electronegativity-Induced Adsorption

23.2: Invited Paper: Performance Boosting of Quantum Dots based LED via Atomic Layer Deposition

Computational fluid dynamics modeling of spatial atomic layer deposition on microgroove substrates

28.3: Stabilization of photoluminescence perovskite nanocrystals via atomic layer deposition and the process influences

High Luminance and Stability of Perovskite Quantum Dot Light-Emitting Diodes via ZnBr2 Passivation and an Ultrathin Al2O3 Barrier with Improved Carrier Balance and Ion Diffusive Inhibition

Bifunctionally faceted Pt/Ru nanoparticles for preferential oxidation of CO in H2

Highly-stable PEN as a gas-barrier substrate for flexible displays via atomic layer infiltration

基于原子层沉积技术的纳米颗粒表面改性方法（英文）

Dependence of inherent selective atomic layer deposition of FeOx on Pt nanoparticles on the coreactant and temperature

Two-Step Hybrid Passivation Strategy for Ultrastable Photoluminescence Perovskite Nanocrystals

(Invited) Area-Selective Atomic Layer Deposition of Manganese Oxides on Metal−Dielectric Patterns

Nanoscale Encapsulation of Perovskite Nanocrystal Luminescent Films via Plasma-Enhanced SiO2 Atomic Layer Deposition

Effect of Microgroove Structures on the Fluid Dynamics and Film Conformality in Spatial Atomic Layer Deposition of Al2O3

Quantum‐Dot Luminescent Microspheres: Atomic Layer Deposition Assisted Encapsulation of Quantum Dot Luminescent Microspheres toward Display Applications (Advanced Optical Materials 12/2020)

Composite Encapsulation Films with Ultrahigh Barrier Performance for Improving the Reliability of Blue Organic Light‐Emitting Diodes

Dual‐Shelled RbLi(Li3SiO4)2:Eu2+@Al2O3@ODTMS Phosphor as a Stable Green Emitter for High‐Power LED Backlights

Atomic Layer Deposition Assisted Encapsulation of Quantum Dot Luminescent Microspheres toward Display Applications

Interface Engineering of CsPbBr3 Nanocrystal Light‐Emitting Diodes via Atomic Layer Deposition

Inherently Selective Atomic Layer Deposition and Applications

Atomically decorating of MnOx on palladium nanoparticles towards selective oxidation of benzyl alcohol with high yield

Atomic level deposition to extend Moore’s law and beyond

Particle-Size-Dependent Methane Selectivity Evolution in Cobalt-Based Fischer–Tropsch Synthesis

Transient analysis and process optimization of the spatial atomic layer deposition using the dynamic mesh method

Surface functionalization on nanoparticles via atomic layer deposition

Highly dispersed Pt studded on CoO x nanoclusters for CO preferential oxidation in H 2

Unravelling the selective growth mechanism of AlO x with dimethylaluminum isopropoxide as a precursor in atomic layer deposition: a combined theoretical and experimental study

Atomic Scale Composite Oxides Infiltration to Quantum Dot Photodetector with Ultralow Dark Current

Thin film encapsulation for the organic light-emitting diodes display via atomic layer deposition

Nickel catalyst with atomically-thin meshed cobalt coating for improved durability in dry reforming of methane

Improved NO–CO reactivity of highly dispersed Pt particles on CeO 2 nanorod catalysts prepared by atomic layer deposition

沉积功率和退火工艺对PE-ALD氧化铝薄膜的影响

Edge-Selective Growth of MCp2 (M = Fe, Co, and Ni) Precursors on Pt Nanoparticles in Atomic Layer Deposition: A Combined Theoretical and Experimental Study

Bottom up Stabilization of CsPbBr3 Quantum Dots-Silica Sphere with Selective Surface Passivation via Atomic Layer Deposition

Effect of Ni Content of Ni/γ‐Al2O3 Catalysts Prepared by the Atomic Layer Deposition Method on CO2 Reforming of Methane

Selective Passivation of Pt Nanoparticles with Enhanced Sintering Resistance and Activity toward CO Oxidation via Atomic Layer Deposition

Development of a scanning probe microscopy integrated atomic layer deposition system for in situ successive monitoring of thin film growth

Review Article: Catalysts design and synthesis via selective atomic layer deposition

Nanofence Stabilized Platinum Nanoparticles Catalyst via Facet‐Selective Atomic Layer Deposition

Atomic Layer Deposition of Ni on Cu Nanoparticles for Methanol Synthesis from CO2 Hydrogenation