吴国强｜武汉大学｜学者主页

2026

Tradeoff Between Quality Factor and Motional Resistance in TPoS Resonators Using Mechanically Coupled Architecture

Yuhao Xiao, Longlong Li, Sheng Liu, Guoqiang Wu

IEEE Transactions on Electron Devices

DOI

2026

Exploring the synergic effect of thermal tuning and mode-coupling for frequency stabilization in micromechanical resonators

Yuhao Xiao, Chengliang Sun, Sheng Liu, Guoqiang Wu

Microsystems & Nanoengineering

DOI

2026

Temperature-Decoupled Multimodal Surface Acoustic Wave Strain Sensors Using Z-Cut Lithium Niobate on Insulator Substrate

Yuanhang Qu, Zhiwei Wen, Yan Liu, Shengxiang Wang, Xiang Chen, Jiaqi Ding, Xiyu Gu, Yao Cai, Guoqiang Wu, Chengliang Sun

IEEE Transactions on Electron Devices

DOI

2025

Machine-Learning-Assisted Anchor Loss Reduction of MEMS Resonator With One-Dimensional Phononic Crystal Tether

Wen Chen, Yuhao Xiao, Kewen Zhu, Longlong Li, Guoqiang Wu

IEEE Transactions on Electron Devices

DOI

2025

Narrowband ladder-type MEMS filter based on high- Q thin-film piezoelectric-on-silicon MEMS resonators

Kewen Zhu, Yuhao Xiao, Wen Chen, Guoqiang Wu

Microelectronics Journal

DOI

2025

Turnover Temperature Point Adjustment in Mechanically Coupled Single-Crystal Silicon MEMS Resonators

Yuhao Xiao, Jinzhao Han, Bowen Li, Guoqiang Wu

Journal of Microelectromechanical Systems

DOI

2025

A Hermetically Sealed Micro Vacuum Ultraviolet Light Source for Detection of VOCs

Weilong You, Wen Chen, Yong Jun Xie, Sheng Liu, Guoqiang Wu

IEEE Electron Device Letters

DOI

2025

Lamprey Teeth-Inspired Flexible Tactile Sensors with High Sensitivity and a Wide Linear Range

Gang Li, Xiaolong Zhang, Yurong Zhang, Xiaohang Luo, Guoqiang Wu, Longjian Xue

ACS Applied Electronic Materials

DOI

2025

Soft and Highly Adhesive Wearable Electronics for Hand Reconstruction Based on PMUT and PPA‐CNTs Strain Sensors

Dongze Lv, Ziwen Tang, Yingzhi Wang, Jiaquan Xu, YeJia Wu, Guoqiang Wu, Jin Xie

Advanced Functional Materials

DOI

2025

A High-Performance Mechanically Coupled Quadruple Breathing Mode Ring Resonator

Bowen Li, Yuhao Xiao, Longlong Li, Zhaomin Hua, Guoqiang Wu

Journal of Microelectromechanical Systems

DOI

2025

A Piezoelectric Micromachined Ultrasonic Transducer-Based Bone Conduction Microphone System for Enhancing Speech Recognition Accuracy

Chongbin Liu, Xiangyang Wang, Jianbiao Xiao, Jun Zhou, Guoqiang Wu

Micromachines

DOI

2024

An oven controlled piezoelectric MEMS dual-resonator platform with frequency stability of ± 100 ppb over industrial temperature range

Yuhao Xiao, Kewen Zhu, Jinzhao Han, Fang Dong, Chengliang Sun, Sheng Liu, Guoqiang Wu

Sensors and Actuators A Physical

DOI

2024

Q-enhancement of piezoelectric micro-oven-controlled MEMS resonators using honeycomb lattice phononic crystals

Yuhao Xiao, Kewen Zhu, Jinzhao Han, Sheng Liu, Guoqiang Wu

Chip

DOI

2024

MEMS Torsional Pendulum Gyroscope With Fishbone-Like Sense Electrodes for Minimizing Quadrature Electrical Readout

Zhongye Wu, Ronghui Feng, Zhizhong Li, Qingsong Li, Dingbang Xiao, Sheng Liu, Guoqiang Wu

IEEE Electron Device Letters

DOI

2024

Dependence of frequency-temperature stability on support tethers in dual-beam piezoresistive sensing MEMS resonators

Can Li, Yuhao Xiao, Weilong You, Guoqiang Wu

Microelectronic Engineering

DOI

2024

An acoustic pressure-gradient MEMS vector hydrophone system based on piezoelectric micromachined ultrasonic transducer array

Xiangyang Wang, Chongbin Liu, Guoqiang Wu

Microelectronics Journal

DOI

2024

Filiform Papillae‐Inspired Wearable Pressure Sensor with High Sensitivity and Wide Detection Range

Gang Li, Yurong Zhang, Xiaolong Zhang, Bo Zhu, Yifeng Lei, Daobing Chen, Langquan Shui, Guoqiang Wu, Longjian Xue

Advanced Functional Materials

DOI

2024

Performance-Enhanced Piezoelectric Micromachined Ultrasonic Transducers by PDMS Acoustic Lens Design

Licheng Jia, Yong Liang, Fansheng Meng, Guojun Zhang, Renxin Wang, Changde He, Yuhua Yang, Jiangong Cui, Wendong Zhang, Guoqiang Wu

Micromachines

DOI

2024

Investigation of performance dependence on transduction diaphragm design for piezoelectric micromachined ultrasonic transducers

Chongbin Liu, Xiangyang Wang, Guoqiang Wu

Microelectronics Journal

DOI

2024

A ScAlN-based piezoelectric breathing mode dual-ring resonator with high temperature stability

Zhaoyang Lu, Longlong Li, Wen Chen, Yuhao Xiao, Weilong You, Guoqiang Wu

Microelectronic Engineering

DOI

2023

A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss

Kewen Zhu, Yuhao Xiao, Jinzhao Han, Guoqiang Wu

Journal of Microelectromechanical Systems

DOI

2023

Anchor Loss Reduction for Square-Extensional Mode MEMS Resonator Using Tethers With Auxiliary Structures

Wen Chen, Wenhan Jia, Yuhao Xiao, Guoqiang Wu

IEEE Sensors Journal

DOI

2023

A transceiver integrated piezoelectric micromachined ultrasound transducer array for underwater imaging

Yunxin Yao, Licheng Jia, Chongbin Liu, Xiangyang Wang, Chengliang Sun, Sheng Liu, Guoqiang Wu

Sensors and Actuators A Physical

DOI

2022

A dual-mass fully decoupled MEMS gyroscope with optimized structural design for minimizing mechanical quadrature coupling

Zhongye Wu, Ronghui Feng, Chengliang Sun, Peng Wang, Guoqiang Wu

Microelectronic Engineering

DOI

2022

A ScAlN Piezoelectric High-Frequency Acoustic Pressure-Gradient MEMS Vector Hydrophone With Large Bandwidth

Zhikai Zhou, Chongbin Liu, Licheng Jia, Lei Shi, Xianzhong Wang, Jifang Tao, Chengliang Sun, Guoqiang Wu

IEEE Electron Device Letters

DOI

2022

Theoretical Modeling of Piezoelectric Micromachined Ultrasonic Transducers With Honeycomb Structure

Chongbin Liu, Licheng Jia, Lei Shi, Chengliang Sun, Daw Don Cheam, Peng Wang, Guoqiang Wu

Journal of Microelectromechanical Systems

DOI

2022

A Miniaturized Ultrasonic Sugar Concentration Detection System Based on Piezoelectric Micromachined Ultrasonic Transducers

Lei Shi, Licheng Jia, Chongbin Liu, Chengliang Sun, Sheng Liu, Guoqiang Wu

IEEE Transactions on Instrumentation and Measurement

DOI

2021

Aln Based Piezoelectric Micromachined Ultrasonic Transducers for Continuous Monitoring of the Mechano-Acoustic Cardiopulmonary Signals

Licheng Jia, Lei Shi, Chengliang Sun, Sheng Liu, Guoqiang Wu

Proceedings, IEEE micro electro mechanical systems

DOI

2021

Wafer-Scale Encapsulated Saw Temperature and Pressure Sensors for Harsh Environments

E. Ng, J. Sharma, Eva Wai Leong Ching, Guoqiang Wu, D. Pohl, O. Vancauwenberghe

IEEE/LEOS International Conference on Optical MEMS

DOI

2021

Design and Performance of ScAlN/AlN Trapezoidal Cantilever-Based MEMS Piezoelectric Energy Harvesters

Yan Liu, Bohao Hu, Yao Cai, Jie Zhou, Wenjuan Liu, Alexander Tovstopyat, Guoqiang Wu, Chengliang Sun

IEEE Transactions on Electron Devices

DOI

2021

A Novel Transfer Function Based Ring-Down Suppression System for PMUTs

Zhi-Peng Wu, Wenjuan Liu, Zhihao Tong, Songsong Zhang, Y. Gu, Guoqiang Wu, Alexander Tovstopyat, Chengliang Sun, Liang Lou

Italian National Conference on Sensors

DOI

2021

Enhancement of Transmitting Sensitivity of Piezoelectric Micromachined Ultrasonic Transducers by Electrode Design

Licheng Jia, Lei Shi, Chongbin Liu, Chengliang Sun, Guoqiang Wu

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

DOI

2020

MEMS器件低应力封装技术

吴忠烨，杨尚书，吴国强

《微纳电子与智能制造》

DOI

2020

Considerations for an 8-inch Wafer-Level CMOS Compatible AlN Pyroelectric 5–14 μm Wavelength IR Detector Towards Miniature Integrated Photonics Gas Sensors

Doris K. T. Ng, Guoqiang Wu, Tan‐Tan Zhang, Linfang Xu, Jianbo Sun, Wing Wai Chung, Hong Nian Cai, Qingxin Zhang, Navab Singh

Journal of Microelectromechanical Systems

DOI

2020

MEMS Resonators for Frequency Reference and Timing Applications

Guoqiang Wu, Jing-Hui Xu, E. Ng, Wen Chen

Journal of microelectromechanical systems

DOI

2020

Correction to "Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications"

Guoqiang Wu, Jing-Hui Xu, Xiao-Ling Zhang, Nan Wang, D. Yan, Jayce Lay Keng Lim, Yao Zhu, Wei Li, Y. Gu

IEEE transactions on industrial electronics (1982. Print)

DOI

2019

Low-Cost, Tiny-Sized MEMS Hydrophone Sensor for Water Pipeline Leak Detection

Jing-Hui Xu, K. Chai, Guoqiang Wu, Bei-Bei Han, E. Wai, Wei Li, J. Yeo, Edwin Nijhof, Y. Gu

IEEE transactions on industrial electronics (1982. Print)

DOI

2018

Development of Six-Degree-of-Freedom Inertial Sensors With an 8-in Advanced MEMS Fabrication Platform

Guoqiang Wu, Bei-Bei Han, D. D. Cheam, L. Wai, P. Chang, Navab Singh, Y. Gu

IEEE transactions on industrial electronics (1982. Print)

DOI

2018

Robust Packaging For MEMS Sensors Using Plastic Moulding

Guoqiang Wu, L. Wai, Bei-Bei Han, D. D. Cheam, P. Chang, Navab Singh, Y. Gu

Electronic Packaging Technology Conference

DOI

2018

A Quadruple Mass Vibrating MEMS Gyroscope With Symmetric Design

Guoqiang Wu, Li-Chua Geng, Navab Singh, Y. Gu

IEEE Sensors Letters

DOI

2018

6-DOF Inertial Sensor Development with Advanced Fabrication Platform

Guoqiang Wu, Bei-Bei Han, D. D. Cheam, Peter Hyun Kee Chang, Navab Singh, Y. Gu

IEEE International Conference on Nano/Micro Engineered and Molecular Systems

DOI

2018

Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications

Guoqiang Wu, Jing-Hui Xu, Xiao-Ling Zhang, Nan Wang, D. Yan, Jayce Lay Keng Lim, Yao Zhu, Wei Li, Y. Gu

IEEE transactions on industrial electronics (1982. Print)

DOI

2018

A Lame Mode Resonator Based on Aluminum Nitride on Silicon Platform

Nan Wang, Yao Zhu, Guoqiang Wu, Zhi-Peng Ding, E. Ng, Yoshio Nishida, P. Chang, Navab Singh, Y. Gu

Electronic Packaging Technology Conference

DOI

2017

A dual-mass fully decoupled MEMS gyroscope with wide bandwidth and high linearity

Guoqiang Wu, Li-Chua Geng, Y. Gu

DOI

2017

High Q low inpedance WLCSP resonator for sub-100 MHZ programmable oscillator application

Guoqiang Wu, Jing-Hui Xu, Xiao-Ling Zhang, Nan Wang, D. Yan, Jayce Lay Keng Lim, Yao Zhu, Wei Li, Y. Gu

IEEE/LEOS International Conference on Optical MEMS

DOI

2017

サブ100MHzプログラマブル発振器応用のための高Q低インピーダンスWLCSP共振器【Powered by NICT】

Guoqiang Wu, Jing-Hui Xu, Xiao-Lin Zhang, Nan Wang, D. Yan, Lim Jayce Lay Keng, Yao Zhu, Wei Li, Y. Gu

2016

Methods for precisely controlling the residual stress and temperature coefficient of the frequency of a MEMS resonator based on an AlN cavity silicon-on-insulator platform

Nan Wang, Jing-Hui Xu, Xiao-Ling Zhang, Guoqiang Wu, Yao Zhu, Wei Li, Y. Gu

DOI

2016

Design, fabrication and characterization of a resonant magnetic field sensor based on mechanically coupled dual-microresonator

Guoqiang Wu, Di Xu, B. Xiong, L. Che, Yun-Li Wang

DOI

2016

GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers

Guoqiang Wu, Yao Zhu, S. Merugu, Nan Wang, Chengliang Sun, Y. Gu

DOI

2015

Quality factor measurement for MEMS resonator using time-domain amplitude decaying method

Yuzhao Wang, Yongning Xie, Tianlei Zhang, Guoqiang Wu, Gang Wang, Caijia Yu

DOI

2014

A resonant MEMS magnetic field sensor with electromagnetic induction sensing

De-Hui Xu, Guoqiang Wu, B. Xiong, Yuelin Wang

IEEE International Conference on Nano/Micro Engineered and Molecular Systems

DOI

2014

Phononic crystal strip based anchors for reducing anchor loss of micromechanical resonators

D. Feng, De-Hui Xu, Guoqiang Wu, B. Xiong, Yuelin Wang

DOI

2013

A wide measurement pressure range CMOS-MEMS based integrated thermopile vacuum gauge with an XeF2 dry-etching process

Xiao Sun, De-Hui Xu, B. Xiong, Guoqiang Wu, Yuelin Wang

DOI

2013

Resonant Magnetic Field Sensor With Capacitive Driving and Electromagnetic Induction Sensing

Guoqiang Wu, De-Hui Xu, B. Xiong, D. Feng, Yuelin Wang

IEEE Electron Device Letters

DOI

2013

Wafer-Level Vacuum Packaging for Microsystems Using Glass Frit Bonding

Guoqiang Wu, De-Hui Xu, Xiao Sun, B. Xiong, Yuelin Wang

IEEE Transactions on Components, Packaging, and Manufacturing Technology

DOI

2013

Extending of band gaps in silicon based one-dimensional phononic crystal strips

D. Feng, De-Hui Xu, Guoqiang Wu, B. Xiong, Yuelin Wang

DOI

2013

A 4 MHz Lamé mode microresonator-based oscil lator

吴国强，徐德辉，熊斌，王跃林

Journal of Measurement Science and Instrumentation

2013

Effect of air damping on quality factor of bulk mode microresonators

Guoqiang Wu, De-Hui Xu, B. Xiong, Yi Wang

DOI

2012

Wafer-Level Vacuum Packaging for MEMS Resonators Using Glass Frit Bonding

Guoqiang Wu, De-Hui Xu, B. Xiong, Yu-Chen Wang, Yuelin Wang, Yinglei Ma

Journal of microelectromechanical systems

DOI

2012

Wafer level vacuum packaged resonator with in-situ Au-Al eutectic Re-Distribution layer

Guoqiang Wu, De-Hui Xu, B. Xiong, E. Jing, Yuelin Wang

Italian National Conference on Sensors

DOI

2012

High $Q$ Single Crystal Silicon Micromechanical Resonators With Hybrid Etching Process

Guoqiang Wu, De-Hui Xu, B. Xiong, Yuelin Wang

IEEE Sensors Journal

DOI

2012

Uncooled Thermoelectric Infrared Sensor With Advanced Micromachining

De-Hui Xu, B. Xiong, Guoqiang Wu, Yinglei Ma, Yuelin Wang

IEEE Sensors Journal

DOI

2012

Isotropic Silicon Etching With $\hbox{XeF}_{2}$ Gas for Wafer-Level Micromachining Applications

De-Hui Xu, B. Xiong, Guoqiang Wu, Yu-Chen Wang, Xiao Sun, Yuelin Wang

Journal of microelectromechanical systems

DOI

2012

A high-performance bulk mode single crystal silicon microresonator based on a cavity-SOI wafer

Guoqiang Wu, De-Hui Xu, B. Xiong, Yuelin Wang

DOI

2012

Redistribution of Electrical Interconnections for Three-Dimensional Wafer-Level Packaging With Silicon Bumps

Guoqiang Wu, De-Hui Xu, B. Xiong, Yuelin Wang

IEEE Electron Device Letters

DOI

2012

A high Q micromachined single crystal silicon bulk mode resonator with pre-etched cavity

Guoqiang Wu, De-Hui Xu, B. Xiong, Yuelin Wang

DOI

2012

Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator

Guoqiang Wu, De-Hui Xu, B. Xiong, Yuelin Wang

DOI

2012

Micro-mechanical magnetic field sensor and preparation method thereof

B. Xiong, Guoqiang Wu, De-Hui Xu, Yuelin Wang

2012

3D monolithic integrated thermoelectric IR sensor

De-Hui Xu, B. Xiong, Guoqiang Wu, Yinglei Ma, E. Jing, Yuelin Wang

Italian National Conference on Sensors

DOI

精选作品

期刊论文

Tradeoff Between Quality Factor and Motional Resistance in TPoS Resonators Using Mechanically Coupled Architecture

Exploring the synergic effect of thermal tuning and mode-coupling for frequency stabilization in micromechanical resonators

Temperature-Decoupled Multimodal Surface Acoustic Wave Strain Sensors Using Z-Cut Lithium Niobate on Insulator Substrate

Machine-Learning-Assisted Anchor Loss Reduction of MEMS Resonator With One-Dimensional Phononic Crystal Tether

Narrowband ladder-type MEMS filter based on high- Q thin-film piezoelectric-on-silicon MEMS resonators

Turnover Temperature Point Adjustment in Mechanically Coupled Single-Crystal Silicon MEMS Resonators

A Hermetically Sealed Micro Vacuum Ultraviolet Light Source for Detection of VOCs

Lamprey Teeth-Inspired Flexible Tactile Sensors with High Sensitivity and a Wide Linear Range

Soft and Highly Adhesive Wearable Electronics for Hand Reconstruction Based on PMUT and PPA‐CNTs Strain Sensors

A High-Performance Mechanically Coupled Quadruple Breathing Mode Ring Resonator

A Piezoelectric Micromachined Ultrasonic Transducer-Based Bone Conduction Microphone System for Enhancing Speech Recognition Accuracy

An oven controlled piezoelectric MEMS dual-resonator platform with frequency stability of ± 100 ppb over industrial temperature range

Q-enhancement of piezoelectric micro-oven-controlled MEMS resonators using honeycomb lattice phononic crystals

MEMS Torsional Pendulum Gyroscope With Fishbone-Like Sense Electrodes for Minimizing Quadrature Electrical Readout

Dependence of frequency-temperature stability on support tethers in dual-beam piezoresistive sensing MEMS resonators

An acoustic pressure-gradient MEMS vector hydrophone system based on piezoelectric micromachined ultrasonic transducer array

Filiform Papillae‐Inspired Wearable Pressure Sensor with High Sensitivity and Wide Detection Range

Performance-Enhanced Piezoelectric Micromachined Ultrasonic Transducers by PDMS Acoustic Lens Design

Investigation of performance dependence on transduction diaphragm design for piezoelectric micromachined ultrasonic transducers

A ScAlN-based piezoelectric breathing mode dual-ring resonator with high temperature stability

A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss

Anchor Loss Reduction for Square-Extensional Mode MEMS Resonator Using Tethers With Auxiliary Structures

A transceiver integrated piezoelectric micromachined ultrasound transducer array for underwater imaging

A dual-mass fully decoupled MEMS gyroscope with optimized structural design for minimizing mechanical quadrature coupling

A ScAlN Piezoelectric High-Frequency Acoustic Pressure-Gradient MEMS Vector Hydrophone With Large Bandwidth

Theoretical Modeling of Piezoelectric Micromachined Ultrasonic Transducers With Honeycomb Structure

A Miniaturized Ultrasonic Sugar Concentration Detection System Based on Piezoelectric Micromachined Ultrasonic Transducers

Aln Based Piezoelectric Micromachined Ultrasonic Transducers for Continuous Monitoring of the Mechano-Acoustic Cardiopulmonary Signals

Wafer-Scale Encapsulated Saw Temperature and Pressure Sensors for Harsh Environments

Design and Performance of ScAlN/AlN Trapezoidal Cantilever-Based MEMS Piezoelectric Energy Harvesters

A Novel Transfer Function Based Ring-Down Suppression System for PMUTs

Enhancement of Transmitting Sensitivity of Piezoelectric Micromachined Ultrasonic Transducers by Electrode Design

MEMS器件低应力封装技术

Considerations for an 8-inch Wafer-Level CMOS Compatible AlN Pyroelectric 5–14 μm Wavelength IR Detector Towards Miniature Integrated Photonics Gas Sensors

MEMS Resonators for Frequency Reference and Timing Applications

Correction to "Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications"

Low-Cost, Tiny-Sized MEMS Hydrophone Sensor for Water Pipeline Leak Detection

Development of Six-Degree-of-Freedom Inertial Sensors With an 8-in Advanced MEMS Fabrication Platform

Robust Packaging For MEMS Sensors Using Plastic Moulding

A Quadruple Mass Vibrating MEMS Gyroscope With Symmetric Design

6-DOF Inertial Sensor Development with Advanced Fabrication Platform

Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications

A Lame Mode Resonator Based on Aluminum Nitride on Silicon Platform

A dual-mass fully decoupled MEMS gyroscope with wide bandwidth and high linearity

High Q low inpedance WLCSP resonator for sub-100 MHZ programmable oscillator application

サブ100MHzプログラマブル発振器応用のための高Q低インピーダンスWLCSP共振器【Powered by NICT】

Methods for precisely controlling the residual stress and temperature coefficient of the frequency of a MEMS resonator based on an AlN cavity silicon-on-insulator platform

Design, fabrication and characterization of a resonant magnetic field sensor based on mechanically coupled dual-microresonator

GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers

Quality factor measurement for MEMS resonator using time-domain amplitude decaying method

A resonant MEMS magnetic field sensor with electromagnetic induction sensing

Phononic crystal strip based anchors for reducing anchor loss of micromechanical resonators

A wide measurement pressure range CMOS-MEMS based integrated thermopile vacuum gauge with an XeF2 dry-etching process

Resonant Magnetic Field Sensor With Capacitive Driving and Electromagnetic Induction Sensing

Wafer-Level Vacuum Packaging for Microsystems Using Glass Frit Bonding

Extending of band gaps in silicon based one-dimensional phononic crystal strips

A 4 MHz Lamé mode microresonator-based oscil lator

Effect of air damping on quality factor of bulk mode microresonators

Wafer-Level Vacuum Packaging for MEMS Resonators Using Glass Frit Bonding

Wafer level vacuum packaged resonator with in-situ Au-Al eutectic Re-Distribution layer

High $Q$ Single Crystal Silicon Micromechanical Resonators With Hybrid Etching Process

Uncooled Thermoelectric Infrared Sensor With Advanced Micromachining

Isotropic Silicon Etching With $\hbox{XeF}_{2}$ Gas for Wafer-Level Micromachining Applications

A high-performance bulk mode single crystal silicon microresonator based on a cavity-SOI wafer

Redistribution of Electrical Interconnections for Three-Dimensional Wafer-Level Packaging With Silicon Bumps

A high Q micromachined single crystal silicon bulk mode resonator with pre-etched cavity

Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator

Micro-mechanical magnetic field sensor and preparation method thereof

3D monolithic integrated thermoelectric IR sensor

预印本

High-Sensitivity AlN-Based Surface Acoustic Wave Strain Sensor with Strain–Temperature Decoupling Method

研究方向