2026
Area-Selective Atomic Layer Deposition of Al2O3 on GaN Using Microcontact-Printed Octadecylphosphonic Acid Layers
Zihao Li, Xiaohong Zeng, Jinteng Zhang, Shicheng Yang, Shicheng Han, Yecheng Ding, Yaping Kong, Nan Hu, Yang Shen, Sunan Ding
The Journal of Physical Chemistry C